Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Analysis of risks and related damages due to the implementation of virtual metrology algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Vortrag
2012A calculation model for the economic effects of implementing predictive maintenance algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Vortrag
2011Implementing virtual metrology into semiconductor production processes - an investment assessment
Koitzsch, Matthias; Merhof, Jochen; Michl, Markus; Noll, Humbert; Nemecek, Alexander; Honold, Alfred; Kleineidam, Gerhard; Lebrecht, Holger
Konferenzbeitrag