Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2019 | Material parameter extraction for complex AlScN thin film using dual mode resonators in combination with advanced microstructural analysis and finite element modeling
Parsapour, Fazel; Pashchenko, Vladimir; Kurz, Nicolas; Sandu, Cosmin Silviu; LaGrange, Thomas; Yamashita, Kaoru; Lebedev, Vadim; Muralt, Paul | Zeitschriftenaufsatz |
| 2018 | Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver | Konferenzbeitrag |
| 2012 | Admittance matrix of a trapezoidal piezoelectric heterogeneous bimorph
Schächtele, Jonathan; Goll, Erich; Muralt, Paul; Kaltenbacher, Dominik | Zeitschriftenaufsatz |