Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Material parameter extraction for complex AlScN thin film using dual mode resonators in combination with advanced microstructural analysis and finite element modeling
Parsapour, Fazel; Pashchenko, Vladimir; Kurz, Nicolas; Sandu, Cosmin Silviu; LaGrange, Thomas; Yamashita, Kaoru; Lebedev, Vadim; Muralt, Paul
Zeitschriftenaufsatz
2018Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver
Konferenzbeitrag
2012Admittance matrix of a trapezoidal piezoelectric heterogeneous bimorph
Schächtele, Jonathan; Goll, Erich; Muralt, Paul; Kaltenbacher, Dominik
Zeitschriftenaufsatz