Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Numerical optimization of illumination and mask layout for the enlargement of process windows and for the control of photoresist profiles in proximity printing
Motzek, Kristian; Partel, Stefan; Vogler, Uwe; Erdmann, Andreas
Konferenzbeitrag
2011Simulation tools for advanced mask aligner lithography
Bramati, Arianna; Vogler, Uwe; Meliorisz, Balint; Motzek, Kristian; Hornung, Michael; Voelkel, Reinhard
Konferenzbeitrag