Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Zeitschriftenaufsatz
20202D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride
Meinel, K.; Melzer, M.; Stoeckel, C.; Shaporin, A.; Forke, R.; Zimmermann, S.; Hiller, K.; Otto, T.; Kuhn, H.
Zeitschriftenaufsatz
2020On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes
Haase, M.; Melzer, M.; Lang, N.; Ecke, R.; Zimmermann, S.; Helden, J.-P.H. van; Schulz, S.E.
Zeitschriftenaufsatz
2020Ruthenium(II) MOCVD Precursors for Phosphorus‐Doped Ruthenium Layer Formation
Preuß, A.; Tamuliene, J.; Madajska, K.; Szymanska, I.B.; Korb, M.; Rüffer, T.; Jeschke, J.; Melzer, M.; Bankwitz, J.; Schulz, S.E.; Lang, H.
Zeitschriftenaufsatz
2019Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Konferenzbeitrag
2019Piezoelektrischer Mikrospiegel mit großem Scanwinkel, basierend auf Dünnschicht-Aluminiumnitrid
Meinel, K.; Stoeckel, C.; Melzer, M.; Zimmermann, S.; Forke, R.; Hiller, K.; Otto, T.
Konferenzbeitrag
2018Plasma membrane proteome analysis identifies a role of barley membrane steroid binding protein in root architecture response to salinity
Witzel, Katja; Matros, Andrea; Møller, Anders L.B.; Ramireddy, Eswarayya; Finnie, Christine; Peukert, Manuela; Rutten, Twan; Herzog, Andreas; Kunze, Gotthard; Melzer, Michael; Kaspar-Schoenefeld, Stephanie; Schmülling, Thomas; Svensson, Birte; Mock, Hans-Peter
Zeitschriftenaufsatz
2018Thin Film Piezoelectric Aluminum Nitride for Piezoelectric Micromachined Ultrasonic Transducers
Stoeckel, C.; Meinel, K.; Melzer, M.; Otto, T.
Konferenzbeitrag
2017Low-temperature chemical vapor deposition of cobalt oxide thin films from a dicobaltatetrahedrane precursor
Melzer, M.; Nichenametla, Charan K.; Georgi, Colin; Lang, Heinrich; Schulz, S.E.
Zeitschriftenaufsatz
2016Bis(β-diketonato)-and allyl-(β-diketonato)-palladium(II) complexes: Synthesis, characterization and MOCVD application
Assim, K.; Melzer, M.; Korb, M.; Rüffer, T.; Jakob, A.; Noll, J.; Georgi, C.; Schulz, S.E.; Lang, H.
Zeitschriftenaufsatz
2016Chemical vapor deposition of ruthenium-based layers by a single-source approach
Jeschke, J.; Möckel, S.; Korb, M.; Rüffer, T.; Assim, K.; Melzer, M.; Herwig, G.; Georgi, C.; Schulz, S.E.; Lang, H.
Zeitschriftenaufsatz
2016Manganese half-sandwich complexes as metal-organic chemical vapor deposition precursors for manganese-based thin films
Assim, K.; Jeschke, J.; Jakob, A.; Dhakal, D.; Melzer, M.; Georgi, C.; Schulz, S.E.; Gessner, T.; Lang, H.
Zeitschriftenaufsatz
2015High-performance giant magnetoresistive sensorics on flexible Si membranes
Pérez, N.; Melzer, M.; Makarov, D.; Ueberschär, O.; Ecke, R.; Schulz, S.E.; Schmidt, O.G.
Zeitschriftenaufsatz
2014ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics
Wächtler, T.; Sharma, A.; Ahner, N.; Melzer, M.; Mueller, S.; Lehmann, D.; Schäfer, P.; Schulze, S.; Schulz, S.E.; Zahn, D.R.T.; Hietschold, M.; Gessner, T.
Konferenzbeitrag
2013Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications
Melzer, M.; Waechtler, T.; Müller, S.; Fiedler, H.; Hermann, S.; Rodriguez, R.D.; Villabona, A.; Sendzik, A.; Mothes, R.; Schulz, S.E.; Zahn, D.R.T.; Hietschold, M.; Lang, H.; Gessner, T.
Zeitschriftenaufsatz
2012ALD of Metal and Metal Oxide Thin Films for Applications in ULSI Metallization Systems and Spintronic Layer Stacks
Waechtler, T.; Mueller, S.; Fiedler, H.; Melzer, M.; Schulz, S.E.; Gessner, T.
Konferenzbeitrag
2012Differentiation of endosperm transfer cells of barley: A comprehensive analysis at the micro-scale
Thiel, J.; Riewe, D.; Rutten, T.; Melzer, M.; Friedel, S.; Bollenbeck, F.; Weschke, W.; Weber, H.
Zeitschriftenaufsatz
2007Downregulation of high-isoelectric-point extracellular superoxide dismutase mediates alterations in the metabolism of reactive oxygen species and developmental disturbances in hybrid aspen
Srivastava, V.; Schinkel, H.; Witzell, J.; Hertzberg, M.; Torp, M.; Srivastava, M.K.; Karpinska, B.; Melzer, M.; Wingsle, G.
Zeitschriftenaufsatz