Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Vortrag
2011Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther
Zeitschriftenaufsatz
2011A virtual equipment as a test bench for evaluating virtual metrology algorithms
Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin
Konferenzbeitrag
2011Virtual equipment. A test bench for virtual metrology algorithms
Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin
Vortrag