Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Analysis of distinct scattering of extreme ultraviolet phase and amplitude multilayer defects with an actinic dark-field microscope
Bahrenberg, L.; Herbert, S.; Tempeler, J.; Maryasov, A.; Hofmann, O.; Danylyuk, S.; Lebert, R.; Loosen, P.; Juschkin, L.
Konferenzbeitrag
2015Table-Top EUV and Soft X-Ray Microscopy
Herbert, S.; Bahrenberg, L.; Maryasov, A.; Danylyuk, S.; Loosen, P.; Juschkin, L.; Bergmann, K.; Lebert, R.
Zeitschriftenaufsatz
2012Quantum efficiency determination of a novel CMOS design for fast imaging applications in the extreme ultraviolet
Herbert, Stefan; Banyay, Matus; Maryasov, Alexey; Hochschulz, Frank; Paschen, Uwe; Vogt, Holger; Juschkin, Larissa
Zeitschriftenaufsatz
2011Actinic EUV-mask metrology: Tools, concepts, components
Lebert, R.; Farahzadi, A.; Diete, W.; Schäfer, D.; Phiesel, C.; Wilhein, T.; Herbert, S.; Maryasov, A.; Juschkin, L.; Esser, D.; Hoefer, M.; Hoffmann, D.
Konferenzbeitrag
2011Challenges of high-speed EUV mask blank inspection
Herbert, S.; Hochschulz, Frank; Maryasov, A.; Danylyuk, S.
Konferenzbeitrag
2011EUV actinic mask blank defect inspection: Results and status of concept realization
Maryasov, A.; Herbert, S.; Juschkin, L.; Lebert, R.; Bergmann, K.
Konferenzbeitrag
2011EUV dark-field microscopy for defect inspection
Juschkin, L.; Maryasov, A.; Herbert, S.; Aretz, A.; Bergmann, K.; Lebert, R.
Konferenzbeitrag
2010Contributions to EUV mask metrology infrastructure
Farahzadi, A.; Lebert, R.; Benk, M.; Juschkin, L.; Herbert, S.; Maryasov, A.
Konferenzbeitrag
2010Defect inspection with an EUV microscope
Herbert, S.; Maryasov, A.; Juschkin, L.; Lebert, R.; Bergmann, K.
Konferenzbeitrag