Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al₀.₇₇Sc₀.₂₃N (1120) thin films
Ding, Anli; Kirste, Lutz; Lu, Yuan; Driad, Rachid; Kurz, Nicolas; Lebedev, Vadim; Christoph, Tim; Feil, Niclas M.; Lozar, Roger; Metzger, Thomas; Ambacher, Oliver; Zukauskaite, Agne
Zeitschriftenaufsatz
2020Non-Polar a-plane AlScN(1120) Thin Film Based SAW Resonantors with Significantly Improved Electromechanical Coupling
Ding, Anli; Driad, Rachid; Lu, Yuan; Feil, Niclas M.; Kirste, Lutz; Christoph, Tim; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2019Development and characterization of piezoelectric AlScN-based alloys for electroacoustic applications
Lu, Yuan
: Ambacher, Oliver (Referent); Fiederle, Michael (Referent)
Dissertation
2019Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators
Ding, Anli; Kurz, Nicolas; Driad, Rachid; Lu, Yuan; Lozar, Roger; Christoph, Tim; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2019Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
Kurz, N.; Ding, Anli; Urban, F.D.; Lu, Yuan; Kirste, Lutz; Feil, N.M.; Zukauskaite, Agne; Ambacher, Oliver
Zeitschriftenaufsatz
2019Optical constants and band gap of wurtzite Al₁₋ₓScₓN/Al₂O₃ prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
Baeumler, Martina; Lu, Yuan; Kurz, Nicolas; Kirste, Lutz; Prescher, Mario; Christoph, Tim; Wagner, Joachim; Zukauskaite, Agne; Ambacher, Oliver
Zeitschriftenaufsatz
2018Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x = 0.41) thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Prescher, Mario; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Zeitschriftenaufsatz
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Zeitschriftenaufsatz
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Zeitschriftenaufsatz
2017Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
Reusch, Markus; Cherneva, Sabina; Lu, Yuan; Zukauskaite, A.; Kirste, L.; Holc, K.; Datcheva, M.; Stoychev, D.; Lebedev, V.; Ambacher, O.
Zeitschriftenaufsatz

 

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