Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2019 | Comparison of low damage sputter deposition techniques to enable the application of very thin a-Si passivation films
Linss, V.; Bivour, M.; Iwata, H.; Ortner, K. | Konferenzbeitrag |
| 2018 | Roll-to-roll deposition of permeation barrier layers using a rotatable dual magnetron sputtering system
Himmler, Anika; Fahland, Matthias; Linß, Volker | Konferenzbeitrag |
| 2018 | Roll-to-roll deposition of silicon oxynitride layers on polymer films using a rotatable dual magnetron system
Himmler, Anika; Fahland, Matthias; Linß, Volker | Zeitschriftenaufsatz |
| 2018 | Roll-to-roll sputtering of oxide layers into ultrathin flexible glass
Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker | Konferenzbeitrag |
| 2018 | Towards industrial deposition of metal oxides for passivating and carrier selective contacts
Linss, V.; Tutsch, L.; Bivour, M. | Konferenzbeitrag |
| 2016 | Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons
Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V. | Konferenzbeitrag |