Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Comparison of low damage sputter deposition techniques to enable the application of very thin a-Si passivation films
Linss, V.; Bivour, M.; Iwata, H.; Ortner, K.
Konferenzbeitrag
2018Roll-to-roll deposition of permeation barrier layers using a rotatable dual magnetron sputtering system
Himmler, Anika; Fahland, Matthias; Linß, Volker
Konferenzbeitrag
2018Roll-to-roll deposition of silicon oxynitride layers on polymer films using a rotatable dual magnetron system
Himmler, Anika; Fahland, Matthias; Linß, Volker
Zeitschriftenaufsatz
2018Roll-to-roll sputtering of oxide layers into ultrathin flexible glass
Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker
Konferenzbeitrag
2018Towards industrial deposition of metal oxides for passivating and carrier selective contacts
Linss, V.; Tutsch, L.; Bivour, M.
Konferenzbeitrag
2016Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons
Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V.
Konferenzbeitrag