Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Device Design and Process Integration of SiC Trench MOSFETs
Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Bauer, Anton
Vortrag
2021Frabrication and Evaluation of 4H-SiC Double Trench MOSFETs on 6-inch Wafer
Lim, Minwho; Kim, Seongjun; Rusch, Oleg; Kang, Min-Jae; Sung, Mi-Je; Kwak, Juyoung; Lee, Nam-Suk; Shin, Hoon-Kyu; Erlbacher, Tobias; Bauer, Anton
Vortrag
2020Pre-Deposition Interfacial Oxidation and Post-Deposition Interface Nitridation of LPCVD TEOS Used as Gate Dielectric on 4H-SiC
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton J.
Konferenzbeitrag
2019Ohmic Contact Mechanism for Ni/C-Faced 4H-n-SiC Substrate
Kim, Seongjun; Kim, Hong-Ki; Lim, Minwho; Jeong, Seonghoon; Kang, Min-Jae; Kang, Min-Sik; Lee, Nam-Suk; Coung, Tran Viet; Kim, Hyunsoo; Erlbacher, Tobias; Bauer, Anton J.; Shin, Hoon-Kyu
Zeitschriftenaufsatz
2019Pre-deposition interfacial oxidation and post-deposition interface nitridation of LPCVD TEOS used as gate dielectric on 4H-SiC
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton
Poster
2019Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations
Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, Anton J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu
Konferenzbeitrag