Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Material parameter extraction for complex AlScN thin film using dual mode resonators in combination with advanced microstructural analysis and finite element modeling
Parsapour, Fazel; Pashchenko, Vladimir; Kurz, Nicolas; Sandu, Cosmin Silviu; LaGrange, Thomas; Yamashita, Kaoru; Lebedev, Vadim; Muralt, Paul
Zeitschriftenaufsatz
2019Optical constants and band gap of wurtzite Al₁₋ₓScₓN/Al₂O₃ prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
Baeumler, Martina; Lu, Yuan; Kurz, Nicolas; Kirste, Lutz; Prescher, Mario; Christoph, Tim; Wagner, Joachim; Zukauskaite, Agne; Ambacher, Oliver
Zeitschriftenaufsatz
2018Determination of elastic and piezoelectric properties of Al0.84Sc0.16N thin films
Kurz, Nicolas; Parsapour, Fazel; Pashchenko, Vladimir; Kirste, Lutz; Lebedev, Vadim; Pascal, Nicolay; Muralt, Paul; Ambacher, Oliver
Konferenzbeitrag
2018Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x = 0.41) thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Prescher, Mario; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Zeitschriftenaufsatz
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Zeitschriftenaufsatz
2018Temperature cross-sensitivity of AlN-based flexural plate wave sensors
Reusch, Markus; Holc, Katarzyna; Lebedev, Vadim; Kurz, Nicolas; Zukauskaite, Agne; Ambacher, Oliver
Zeitschriftenaufsatz
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Zeitschriftenaufsatz
2017Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus; Holc, Katarzyna; Zukauskaite, Agne; Lebedev, Vadim; Kurz, Nicolas; Ambacher, Oliver
Konferenzbeitrag