Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2000Electrodeposition of photoresist - optimization of deposition conditions, investigation of lithographic processes and chemical-resistance
Schnupp, R.; Baumgärtner, R.; Kuhnhold, R.; Ryssel, H.
Zeitschriftenaufsatz
1999Design and sensitivity optimization of vibration sensors for tool state monitoring
Thomas, J.S.; Kuhnhold, R.; Ryssel, H.
Konferenzbeitrag
1999The influence of surface oxidation on the pH-sensing properties of silicon nitride
Mikolajick, T.; Kuhnhold, R.; Schnupp, R.; Ryssel, H.
Konferenzbeitrag
1999Simulation of the production of functional layers for vibration sensors for tool state monitoring and finite element analysis of mechanical characteristics
Thomas, J.; Kuhnhold, R.; Schnupp, R.; Temmel, G.; Ryssel, H.
Konferenzbeitrag