Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
Moskovkin, Pavel; Maszl, Christian; Schierholz, Roland; Breilmann, Wolfgang; Petersen, Jan; Pflug, Andreas; Müller, Jérôme; Raza, Mohsin; Konstantinidis, Stephanos; Keudell, Achim von; Lucas, Stéphane
Zeitschriftenaufsatz
2021Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition
Tonneau, Romain; Moskovkin, Pavel; Müller, Jérôme; Melzig, Thomas; Haye, Emile; Konstantinidis, Stephanos; Pflug, Andreas; Lucas, Stéphane
Zeitschriftenaufsatz