Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Encapsulation of optical gratings using nanoporous alumina layers
Ghazaryan, Lilit; Kley, Ernst-Bernhard; Szeghalmi, Adriana
Zeitschriftenaufsatz
2015Double-sided diffractive photo-mask for sub-500nm resolution proximity i-line mask-aligner lithography
Bourgin, Yannick; Siefke, Thomas; Käsebier, Thomas; Kley, Ernst-Bernhard; Zeitner, Uwe D.
Konferenzbeitrag
2015Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography
Bourgin, Yannick; Siefke, Thomas; Käsebier, Thomas; Genevee, Pascal; Szeghalmi, Adriana; Kley, Ernst-Bernhard; Zeitner, Uwe D.
Zeitschriftenaufsatz
2015Encapsulation process for diffraction gratings
Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana
Zeitschriftenaufsatz
2015Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
Ratzsch, Stephan; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana
Zeitschriftenaufsatz
2015Photonic microstructures in lithium niobate by potassium hydroxide-assisted ion beam-enhanced etching
Geiss, Reinhard; Brandt, Juliane; Hartung, Holger; Tünnermann, Andreas; Pertsch, Thomas; Kley, Ernst-Bernhard; Schrempel, Frank
Zeitschriftenaufsatz
2015Scattering dark states in multiresonant concentric plasmonic nanorings
Alaee, R.; Lehr, D.; Filter, R.; Lederer, Falk; Kley, Ernst-Bernhard; Rockstuhl, Carsten; Tünnermann, Andreas
Zeitschriftenaufsatz
2015Self-organized, effective medium Black Silicon for infrared antireflection
Steglich, Martin; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2014Black silicon by ICP-RIE and its prospects in photovoltaics
Steglich, Martin; Käsebier, Thomas; Zilk, Matthias; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014Chiral nanomaterial fabrication by means of on-edge lithography
Dietrich, Kay; Lehr, Dennis; Puffky, Oliver; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014Efficient fabrication of complex nano-optical structures by E-beam lithography based on charakter projection
Zeitner, Uwe Detlef; Harzendorf, Torsten; Fuchs, Frank; Banasch, Michael; Schmidt, Holger; Kley, Ernst-Bernhard
Konferenzbeitrag
2014Elevating optical activity: Efficient on-edge lithography of three-dimensional starfish metamaterial
Dietrich, Kay; Menzel, Christoph; Lehr, Dennis; Puffky, Oliver; Hübner, U.; Pertsch, Thomas; Tünnermann, Andreas; Kley, Ernst-Bernhard
Zeitschriftenaufsatz
2014Enhancement of second harmonic generation in self-suspended lithium niobate photonic crystal cavities
Diziain, S.; Geiss, R.; Zilk, M.; Schrempel, F.; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Konferenzbeitrag
2014Enhancing the efficiency of upconversion by double-resonant plasmonic nanorings
Lehr, Dennis; Filter, Robert; Alaee, Rasoul; Dietrich, Kay; Rockstuhl, Carsten; Lederer, Falk; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014High-refractive-index gratings for spectroscopic and laser applications
Zeitner, Uwe Detlef; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014Investigation on the angular dependent reflectance of coupled high-contrast gratings
Kroker, Stefanie; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching
Geiss, Reinhard; Diziain, Séverine; Steinert, Michael; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Zeitschriftenaufsatz
2014Plasmonic nanoring fabrication tuned to pitch: Efficient, deterministic, and large scale realization of ultra-small gaps for next generation plasmonic devices
Lehr, Dennis; Alaee, Rasoul; Filter, Robert; Dietrich, Kay; Siefke, Thomas; Rockstuhl, Carsten; Lederer, Falk; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2014Silicon wire grid polarizer for ultraviolet applications
Weber, Thomas; Kroker, Stefanie; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2014The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching
Steglich, Martin; Käsebier, Thomas; Zilk, Matthias; Pertsch, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2014Thermal noise of silicon based grating reflectors for high-precision metrology
Kroker, Stefanie; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2014Top-up fabrication of gold nanorings
Scheeler, S.P.; Lehr, D.; Kley, Ernst-Bernhard; Pacholski, C.
Zeitschriftenaufsatz
2014An ultra-black silicon absorber
Steglich, Martin; Lehr, Dennis; Ratzsch, Stephan; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013Asymmetric direction selective filter elements based on high-contrast gratings
Steiner, Stefan; Kroker, Stefanie; Käsebier, Thomas; Voigt, Daniel; Fuchs, Jörg; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2013Calculation of thermal noise in grating reflectors
Heinert, Daniel; Kroker, Stefanie; Friedrich, Daniel; Hild, Stefan; Kley, Ernst-Bernhard; Leavey, Sean; Martin, Iain; Nawrodt, Ronny; Tünnermann, Andreas; Vyatchanin, Sergey Petrovich; Yamamoto, Kazuhiro
Zeitschriftenaufsatz
2013Comparison of different simulation methods for effective medium computer generated holograms
Eckstein, Wiebke; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013Coupled grating reflectors with highly angular tolerant reflectance
Kroker, Stefanie; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013Freestanding lithium niobate photonic crystal cavities for nonlinear optics applications
Diziain, Séverine; Geiss, Reinhard; Zilk, Matthias; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Konferenzbeitrag
2013Heteroepitaxial Ge-on-Si by DC magnetron sputtering
Steglich, Martin; Patzig, Christian; Berthold, Lutz; Schrempel, Frank; Füchsel, Kevin; Höche, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013High contrast gratings for high-precision metrology
Kroker, Stefanie; Steiner, Stefan; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2013High efficiency two-dimensional grating reflectors with angularly tunable polarization efficiency
Kroker, Stefanie; Käsebier, Thomas; Steiner, Stefan; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013Improvement of Ge-on-Si photodiodes by black silicon light trapping
Steglich, Martin; Zilk, Matthias; Schrempel, Frank; Tünnermann, Andreas; Kley, Ernst-Bernhard
Zeitschriftenaufsatz
2013A normal-incidence PtSi photoemissive detector with black silicon light trapping
Steglich, Martin; Zilk, Matthias; Bingel, Astrid; Patzig, Christian; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2013Optical activity in sub-wavelength metallic grids and fishnet metamaterials in the conical mount
Oates, Thomas W.H.; Dastmalchi, Babak; Helgert, Christian; Reissmann, Lars; Huebner, Uwe; Kley, Ernst-Bernhard; Verschuuren, Marc A.; Bergmair, Iris; Pertsch, Thomas; Hingerl, Kurt; Hinrichs, Karsten
Zeitschriftenaufsatz
2013Second harmonic generation in free-standing lithium niobate photonic crystal L3 cavity
Diziain, Severine; Geiss, Reinhard; Zilk, Matthias; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Zeitschriftenaufsatz
2013Stability and annealing of alucones and alucone alloys
Ghazaryan, Lilit; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana Viorica
Zeitschriftenaufsatz
2013The underlying structure of ultrashort pulse laser-induced nanogratings
Zimmermann, Felix; Richter, Sören; Plech, Anton; Döring, Sven; Heinrich, Matthias; Steinert, Michael; Peschel, Ulf; Kley, Ernst-Bernhard; Tünnermann, Andreas; Nolte, Stefan
Konferenzbeitrag
2012Angular bandpass filters based on dielectric resonant waveguide gratings
Steiner, Stefan; Kroker, Stefanie; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2012Antireflective subwavelength structures on microlens arrays - comparison of various manufacturing techniques
Pacholski, Claudia; Morhard, Christoph; Spatz, Joachim P.; Lehr, Dennis; Schulze, Marcel; Kley, Ernst-Bernhard; Tünnermann, Andreas; Helgert, Michael; Sundermann, Michael; Brunner, Robert
Zeitschriftenaufsatz
2012Black silicon for solar cell applications
Kroll, Matthias; Otto, Martin; Käsebier, Thomas; Füchsel, Kevin; Wehrspohn, Ralf; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Konferenzbeitrag
2012Circular dichroism from chiral nanomaterial fabricated by on-edge lithography
Dietrich, Kay; Lehr, Dennis; Helgert, Christian; Tünnermann, Andreas; Kley, Ernst-Bernhard
Zeitschriftenaufsatz
2012Contribution of the magnetic resonance to the third harmonic generation from a fishnet metamaterial
Reinhold, Jörg; Shcherbakov, M.R.; Chipouline, Arkadi; Panov, V.I.; Helgert, Christian; Paul, T.; Rockstuhl, C.; Lederer, Falk; Kley, Ernst-Bernhard; Tünnermann, Andreas; Fedyanin, A.A.; Pertsch, Thomas
Zeitschriftenaufsatz
2012Diffractive optical elements based on subwavelength high-contrast gratings
Kroker, Stefanie; Käsebier, Thomas; Weber, Thomas; Steiner, Stefan; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2012Durability of stochastic antireflective structures - analyses on damage thresholds and adsorbate elimination
Schulze, Marcel; Damm, Michael; Helgert, Michael; Kley, Ernst-Bernhard; Nolte, Stefan; Tünnermann, Andreas
Zeitschriftenaufsatz
2012Enhanced e-beam pattern writing for nano-optics based on character projection
Kley, Ernst-Bernhard; Schmidt, Holger; Zeitner, Uwe; Banasch, Michael; Schnabel, Bernd
Konferenzbeitrag
2012High aspect ratio deep UV wire grid polarizer fabricated by double patterning
Weber, Thomas; Käsebier, Thomas; Szeghalmi, Adriana; Knez, Mato; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz, Konferenzbeitrag
2012High dispersive and monolithic 100% efficiency grisms
Reinhold, Jörg; Schulze, Marcel; Kley, Ernst-Bernhard; Tünnermann, Andreas
Elektronische Publikation
2012High frequency binary amorphous silicon grating working as wire grid polarizer for UV applications
Weber, Thomas; Käsebier, Thomas; Kroker, Stefanie; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2012High performance dielectric diffraction gratings for space applications
Zeitner, Uwe D.; Fuchs, Frank; Kley, Ernst-Bernhard
Konferenzbeitrag
2012High performance diffraction gratings made by e-beam lithography
Zeitner, Uwe D.; Oliva, Maria; Fuchs, Frank; Michaelis, Dirk; Benkenstein, Tino; Harzendorf, Torsten; Kley, Ernst-Bernhard
Zeitschriftenaufsatz
2012Near-field mapping of optical eigenstates in coupled disk microresonators
Schmidt, Carsten; Liebsch, Mattes; Klein, Angela; Janunts, Norik; Chipouline, Arkadi; Käsebier, Thomas; Etrich, Christoph; Lederer, Falk; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas
Zeitschriftenaufsatz
2012Novel direction selective filter elements based on high-contrast gratings
Steiner, Stefan; Kroker, Stefanie; Käsebier, Thomas; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag
2012Plasmonic properties of aluminum nanorings generated by double patterning
Lehr, Dennis; Dietrich, Kay; Helgert, Christian; Käsebier, Thomas; Fuchs, Hans-Jörg; Tünnermann, Andreas; Kley, Ernst-Bernhard
Zeitschriftenaufsatz
2012Resolution limits of transmission optics for x-ray astronomy
Braig, Christoph; Burwitz, Vadim; Käsebier, Thomas; Kley, Ernst-Bernhard; Predehl, Peter; Tünnermann, Andreas
Konferenzbeitrag
2012Spatial and spectral light shaping with metamaterials
Walther, Benny; Helgert, Christian; Rockstuhl, Carsten; Setzpfandt, Frank; Eilenberger, Falk; Kley, Ernst-Bernhard; Lederer, Falk; Tünnermann, Andreas; Pertsch, Thomas
Zeitschriftenaufsatz
2012Tungsten wire grid polarizer for applications in the DUV spectral range
Weber, Thomas; Käsebier, Thomas; Helgert, Michael; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2012Tuning the reflectivity of high contrast gratings based on silicon and silica by means of wet etching with hydrofluoric acid
Jacobitz, Tassilo; Kroker, Stefanie; Käsebier, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas
Konferenzbeitrag