Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Atomic layer deposition of textured Li4Ti5O12: A high-power and long life-cycle life anode for lithium-ion thin-film batteries
Speulmanns, J.; Kia, A.M.; Bönhardt, S.; Weinreich, W.; Adelhelm, P.
2021Impact of the interface layer on the cycling behaviour and retention of ferroelectric hafnium oxide
Lederer, M.; Mertens, K.; Kia, A.M.; Emara, J.; Olivo, R.; Raffel, Y.; Lehninger, D.; Ali, T.; Kühnel, K.; Seidel, K.; Kämpfe, T.; Eng, L.M.
2021Spectroscopic analysis of ultra-thin TiN as a diffusion barrier for lithium-ion batteries by ToF-SIMS, XPS, and EELS
Kia, A.M.; Speulmanns, J.; Bönhardt, S.; Emara, J.; Kühnel, K.; Haufe, N.; Weinreich, W.
2020Analysis of the composition of tantalum nitride in CMOS metallization trenches using parallel angle‐resolved XPS
Wehring, B.; Gerlich, L.; Kia, A.M.; Wislicenus, M.; Uhlig, B.
2020Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition
Kia, A.M.; Bönhardt, S.; Zybell, S.; Kühnel, K.; Haufe, N.; Weinreich, W.
2020A novel hybrid high-speed and low power antiferroelectric HSO boosted charge trap memory for high-density storage
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kühnel, K.; Lehninger, D.; Müller, F.; Lederer, M.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Kia, A.M.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kämpfe, T.; Müller, J.; Seidel, K.; Houdt, J.V. van; Eng, L.M.
2019Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
Bönhardt, S.; Kühnel, K.; Kia, A.M.; Weinreich, W.
2019ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
Kia, A.M.; Haufe, N.; Esmaeili, S.; Mart, C.; Utriainen, M.; Puurunen, R.L.; Weinreich, W.