Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: An experimental and computational study
Beladiya, V.; Becker, M.; Faraz, T.; Kessels, W.M.M.; Schenk, P.; Otto, F.; Fritz, T.; Gruenewald, M.; Helbing, C.; Jandt, K.D.; Tünnermann, A.; Sierka, M.; Szeghalmi, A.
Zeitschriftenaufsatz
2018Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
Beladiya, V.; Faraz, T.; Kessels, W.M.M.; Tünnermann, A.; Szeghalmi, A.
Konferenzbeitrag
2018Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
Faraz, T.; Knoops, H.C.M.; Verheijen, M.A.; Helvoirt, C.A.A. van; Karwal, S.; Sharma, A.; Beladiya, V.; Szeghalmi, A.; Hausmann, D.M.; Henri, J.; Creatore, M.; Kessels, W.M.M.
Zeitschriftenaufsatz
2016Atomic Layer Deposited Molybdenum Oxide for the Hole-Selective Contact of Silicon Solar Cells
Bivour, M.; Macco, B.; Temmler, J.; Kessels, W.M.M.; Hermle, M.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Comparative study of ALD SiO2 thin films for optical applications
Pfeiffer, K.; Shestaeva, S.; Bingel, A.; Munzert, P.; Ghazaryan, L.; Helvoirt, C. van; Kessels, W.M.M.; Sanli, U.T.; Grevent, C.; Schütz, G.; Putkonen, M.; Buchanan, I.; Jensen, L.; Ristau, D.; Tünnermann, A.; Szeghalmi, A.
Zeitschriftenaufsatz
2009High-efficiency n-type silicon solar cells with front side boron emitter
Benick, J.; Hoex, B.; Dingemanns, G.; Kessels, W.M.M.; Richter, A.; Hermle, M.; Glunz, S.W.
Konferenzbeitrag
2009Quantitative characterization of dry textured silicon surfaces
Souren, F.M.M.; Sanden, M.C.M. van de; Kessels, W.M.M.; Rentsch, J.
Konferenzbeitrag
2008High efficiency n-type Si solar cells on Al2O3-passivated boron emitters
Benick, J.; Hoex, B.; Sanden, M.C.M. van de; Kessels, W.M.M.; Schultz, O.; Glunz, S.W.
Zeitschriftenaufsatz