Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012The development path of electrostatic resonant to electrostatic quasistatic driven micro scanning mirrors
Grahman, Jan; Jung, Denis; Kallweit, David; Sandner, Thilo; Graßhoff, Thomas; Schenk, Harald
Konferenzbeitrag
2012Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Jung, Denis; Sandner, Thilo; Kallweit, David; Schenk, Harald
Konferenzbeitrag
2011Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation
Kallweit, David; Jung, Denis; Sandner, Thilo; Schenk, Harald
Konferenzbeitrag
2011Microscanner with Vertical out of Plane Combdrive
Sandner, Thilo; Jung, Denis; Kallweit, David; Grasshoff, T.; Schenk, Harald
Konferenzbeitrag