Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Piezoelectric characterization of Sc0.26Al0.74N layers on Si (001) substrates
Sinusía Lozano, M.; Pérez-Campos, A.; Reusch, Markus; Kirste, Lutz; Fuchs, Theo; Zukauskaite, Agne; Chen, Z.; Iriarte, G.F.
Zeitschriftenaufsatz
2016Electro-optical characterization of IC compatible microcantilevers
Pérez-Campos, A.; Iriarte, G.F.; Lebedev, V.; Calle, F.
Zeitschriftenaufsatz
2014PostCMOS compatible sacrificial layers for aluminum nitride microcantilevers
Pérez-Campos, A.; Iriarte, G.F.; Lebedev, V.; Calle, F.
Zeitschriftenaufsatz
2013High precision pressure sensors based on SAW devices in the GHz range
Rodríguez-Madrid, J.G.; Iriarte, G.F.; Williams, O.A.; Calle, F.
Zeitschriftenaufsatz
2012Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators
Rodríguez-Madrid, J.G.; Iriarte, G.F.; Araujo, D.; Villar, M.P.; Williams, O.A.; Müller-Sebert, W.; Calle, F.
Zeitschriftenaufsatz
2011Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology
Iriarte, G.F.; Rodríguez, J.G.; Ro, R.; Lee, R.; Williams, O.A.; Araujo, D.; Villar, M.P.; Calle, F.
Konferenzbeitrag
2011Sputter optimization of AlN on diamond substrates for high frequency SAW resonators
Rodríguez, J.G.; Iriarte, G.F.; Calle, F.; Araujo, D.; Villar, M.P.; Williams, O.A.
Konferenzbeitrag