Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry
Würzner, S.; Herms, M.; Kaden, T.; Möller, H.J.; Wagner, M.
Zeitschriftenaufsatz
2016Comparative investigations of the surface damage of monocrystalline silicon wafers by scanning infrared reflection examination and raman spectroscopy
Möller, H.J.; Würzner, S.; Buchwald, R.; Herms, M.; Wagner, M.
Konferenzbeitrag
2016Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Konferenzbeitrag
2015Failure and stress analysis of Cu TSVs using GHz-scanning acoustic microscopy and scanning infrared polariscopy
Wolf, I. de; Khaled, A.; Herms, M.; Wagner, M.; Djuric, T.; Czurratis, P.; Brand, S.
Konferenzbeitrag
2013Impact of a p-type solar cell process on the electrical quality of Czochralski silicon
Lauer, K.; Möller, C.; Neckermann, K.; Blech, M.; Herms, M.; Mchedlidze, T.; Weber, J.; Meyer, S.
Zeitschriftenaufsatz, Konferenzbeitrag
2009The feasibility of prostate cancer detection by triple spectroscopy
Salomon, G.; Hess, T.; Erbersdobler, A.; Eichelberg, C.; Greschner, S.; Sobchuk, A.N.; Korolik, A.K.; Nemkovich, N.A.; Schreiber, J.; Herms, M.; Graefen, M.; Huland, H.
Zeitschriftenaufsatz
2007Prostate cancer detection by laser induced autofluorescence and multicomponent spectroscopy
Salomon, G.; Hess, T.; Erbersdobler, A.; Eichelberg, C.; Greschnerd, S.; Sobchuk, A.N.; Korolik, A.K.; Nemkovich, N.A.; Schreiber, J.; Herms, M.; Graefen, M.; Huland, H.
Konferenzbeitrag
2005Nondestructive characterization of nanoparticles in solids by Raman spectroscopy and small angle x-ray scattering
Herms, M.; Irmer, G.; Verma, P.; Goerigk, G.
Konferenzbeitrag
2005Performance study of monolithic line radiation detector based on semi-insulating GaAs using X-ray source
Zatko, B.; Dubecky, F.; Scepko, P.; Melov, V.; Herms, M.; Haupt, L.
Konferenzbeitrag, Zeitschriftenaufsatz
2005Utilization of wet chemical etching for revealing defects in GaAs x-ray detector arrays
Skriniarová, J.; Perdochová, A.; Hrúzik, M.; Veselý, M.; Bendjus, B.; Haupt, L.; Besse, I.; Herms, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2005Zerstörungsfreie Prüfverfahren für die Elektronik, mikrobearbeitete Strukturen und Baugruppen
Köhler, B.; Schreiber, J.; Bendjus, B.; Herms, M.; Melov, V.G.; Krüger, P.; Meyendorf, N.
Zeitschriftenaufsatz
2004Micro- and nano-NDE in the laboratory for acoustic diagnosis and quality assurance EADQ Dresden
Köhler, B.; Schreiber, J.; Bendjus, B.; Herms, M.; Melov, V.; Helfen, L.; Mikulik, P.; Baumbach, T.
Konferenzbeitrag
2002Advanced x-ray imaging techniques for semiconductor wafer characterisation
Baumbach, T.; Mikulik, P.; Korytar, D.; Pernot, P.; Lubbert, D.; Helfen, L.; Herms, M.; Landesberger, C.
Konferenzbeitrag
2002Precipitation in low-temperature grown GaAs
Herms, M.; Irmer, G.; Goerigk, G.; Bedel, E.; Claverie, A.
Zeitschriftenaufsatz
2001Raman studies on gaas1-xbix and inas1-xbix
Verma, P.; Oe, K.; Yamada, M.; Harima, H.; Herms, M.; Irmer, G.
Zeitschriftenaufsatz
20003D-Analyse von Eigenspannungen in einkristallinen Halbleiterwafern mittels Infrarot-Raster-Polariskopie und hochaufgelöster Röntgenbeugung
Herms, M.; Melov, V.G.; Schreiber, J.; Fukuzawa, M.; Yamada, M.
Konferenzbeitrag
2000Breakdown of Elasticity in Copper and Aluminium Interconnects
Schreiber, J.; Melov, V.G.; Herms, M.
Konferenzbeitrag
2000Micro-raman investigation of InAsBi epilayers grown by MOVPE
Verma, P.; Herms, M.; Irmer, G.; Okamoto, H.; Oe, K.; Yamada, M.
Konferenzbeitrag
2000Residual strain in annealed GaAs single crystal wafers measured by scanning infrared polariscopy and x-ray diffraction
Herms, M.; Fukuzawa, M.; Melov, V.G.; Schreiber, J.; Yamada, M.
Konferenzbeitrag
2000Residual strain in annealed GaAs single crystal wafers measured by scanning infrared polariscopy and x-ray diffraction and topography
Herms, M.; Fukuzawa, M.; Melov, V.G.; Schreiber, J.; Möck, P.; Yamada, M.
Zeitschriftenaufsatz
2000Size analysis of nanocrystals in semiconductor doped glasses with anomalous small-angle X-ray and raman scattering
Irmer, G.; Monecke, J.; Verma, P.; Goerigk, G.; Herms, M.
Zeitschriftenaufsatz
2000Spatially Resolved Analysis of Residual Strain in Semiconductor Single Crystal Wafers by Scanning Infrared Polariscopy and High Resolution X-Ray Diffraction
Schreiber, J.; Herms, M.; Fukuzawa, M.; Yamada, M.
Konferenzbeitrag
1999Anomalous small angle scattering experiments on low temperature grown GaAs epilayers
Herms, M.; Goerigk, G.; Bedel, E.; Claverie, A.
Aufsatz in Buch
1999Characterization of GaAs(1-x) Bi(x) Epilayers by Raman Scattering and X-ray Diffraction
Herms, M.; Melov, V.G.; Verma, P.; Irmer, G.; Okamoto, H.; Fukuzawa, M.; Oe, K.; Yamada, M.
Konferenzbeitrag
1999Dislocation Bundles in GaAs Substrates: Assessed by X-Ray and Makyoh Topography, X-Ray Diffraction, Scanning Infrared Polariscopy, Light Interferometry and Nomarski Microscopy
Möck, P.; Fukuzawa, M.; Laczik, Z.; Smith, G.W.; Brooker, G.; Yamada, M.; Herms, M.
Konferenzbeitrag
1999Kleinwinkelstreuexperimente an GaAs-Einkristallen
Herms, M.; Meier, G.; Goerigk, G.
Konferenzbeitrag
1999Partial pressure of phosphorus and arsenic vapor measured by raman scattering
Roth, K.; Kortus, J.; Herms, M.; Porezag, D.; Pederson, M.
Zeitschriftenaufsatz
1999Photoelastic Characterization of Residual Strain in GaAs Wafers Annealed in Holders of Different Geometry
Herms, M.; Fukuzawa, M.; Yamada, M.; Klöber, J.; Zychowitz, G.; Niklas, J.
Zeitschriftenaufsatz
1999Residual Strain in Semi-Insulating InP Wafers Treated by Multiple-Step Wafer Annealing
Fukuzawa, M.; Herms, M.; Uchida, M.; Oda, O.; Yamada, M.
Zeitschriftenaufsatz