Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function
Dai, Gaoliang; Hu, Xiukun; Hering, Julian; Eifler, Matthias; Seewig, Jörg; Freymann, Georg von
Zeitschriftenaufsatz
2020Performance specification of areal surface texture instruments exemplified by a self-built WLI
Bulun, Georgis; Eifler, Matthias; Hering, Julian; Freymann, Georg von; Seewig, Jörg
Konferenzbeitrag
2018Kalibriernormal und Verfahren zu seiner Herstellung
Eifler, Matthias; Freymann, Georg; Hering, Julian; Seewig, Jörg
Patent
2016Automated aberration correction of arbitrary laser modes in high numerical aperture systems
Hering, Julian; Waller, Erik H.; Freymann, Georg von
Zeitschriftenaufsatz
2015Calibration of z-axis linearity for arbitrary optical topography measuring instruments
Eifler, Matthias; Seewig, Jörg; Hering, Julian; Freymann, Georg von
Konferenzbeitrag