Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Metal mirrors with excellent figure and roughness
Steinkopf, R.; Gebhardt, A.; Scheiding, S.; Rohde, M.; Stenzel, O.; Gliech, S.; Giggel, V.; Löscher, H.; Ullrich, G.; Rucks, P.; Duparre, A.; Risse, S.; Eberhardt, R.; Tünnermann, A.
Konferenzbeitrag
2007Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A.
Konferenzbeitrag
2007UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A.
Konferenzbeitrag
2006Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A.
Konferenzbeitrag
2005Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A.
Konferenzbeitrag
2005Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S.
Konferenzbeitrag
2005Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A.
Zeitschriftenaufsatz
2005Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.
Konferenzbeitrag
2005Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A.
Konferenzbeitrag
2005Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A.
Zeitschriftenaufsatz
2005Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A.
Konferenzbeitrag
2004157 nm and 193 nm scatter, R and T measurement technique
Gliech, S.; Gessner, H.; Hultaker, A.; Duparre, A.
Konferenzbeitrag
2004Characterization of CaF2 substrates for VUV fluoride coatings
Hultaker, A.; Gliech, S.; Gessner, H.; Duparre, A.
Konferenzbeitrag
2004High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A.
Konferenzbeitrag
2004Light scatter technique for application in optics, nanotechnology and engineering
Gliech, S.; Duparre, A.
Konferenzbeitrag
2004VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J.
Patent
2003Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A.
Konferenzbeitrag
2003Entwicklung und Anwendung eines Messsystems zur Bestimmung des totalen Streulichts von optischen und technisch rauhen Oberflächen und Schichten
Gliech, S.
Dissertation
2003Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A.
Aufsatz in Buch
2003System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A.
Konferenzbeitrag
2003VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N.
Aufsatz in Buch
2003VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A.
Konferenzbeitrag
2002Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A.
Zeitschriftenaufsatz
2002Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M.
Zeitschriftenaufsatz
2001Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G.
Zeitschriftenaufsatz
2000Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H.
Konferenzbeitrag
2000DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A.
Konferenzbeitrag
2000International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M.
Zeitschriftenaufsatz
2000Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J.
Konferenzbeitrag
1999Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S.
Zeitschriftenaufsatz
1999Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S.
Zeitschriftenaufsatz
1999International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M.
Konferenzbeitrag
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Konferenzbeitrag
1999Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G.
Konferenzbeitrag
1997Concepts for standardization of total scatter measurements at 633 nm
Kadkhoda, M.; Strink, P.; Ristau, D.; Duparre, A.; Gliech, S.; Reng, N.; Greif, M.; Schuhmann, R.; Goldner, M.
Konferenzbeitrag
1997Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Konferenzbeitrag
1997Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S.
Konferenzbeitrag
1996Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S.
Konferenzbeitrag
1996Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Duparre, A.; Gliech, S.
Konferenzbeitrag
1996Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S.
Zeitschriftenaufsatz
1994Interface and volume inhomogenities in optical thin films investigated by light scattering methods
Duparre, A.; Gliech, S.; Hehl, K.; Pichlmaier, U.; Schuhmann, U.
Konferenzbeitrag