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| 2008 | Metal mirrors with excellent figure and roughness
Steinkopf, R.; Gebhardt, A.; Scheiding, S.; Rohde, M.; Stenzel, O.; Gliech, S.; Giggel, V.; Löscher, H.; Ullrich, G.; Rucks, P.; Duparre, A.; Risse, S.; Eberhardt, R.; Tünnermann, A. | Konferenzbeitrag |
| 2007 | Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A. | Konferenzbeitrag |
| 2007 | UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A. | Konferenzbeitrag |
| 2006 | Scattering analysis of optical components in the DUV
Schröder, S.; Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2005 | Investigating the ArF laser stability of CaF2 at elevated fluences
Burkert, A.; Mühlig, C.; Triebel, W.; Keutel, D.; Natura, U.; Parthier, L.; Gliech, S.; Schröder, S.; Duparre, A. | Konferenzbeitrag |
| 2005 | Low-loss gratings for next-generation gravitational wave detectors
Clausnitzer, T.; Kley, E.-B.; Tünnermann, A.; Bunkowski, A.; Burmeister, O.; Danzmann, K.; Schnabel, R.; Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 2005 | Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions
Schröder, S.; Gliech, S.; Duparre, A. | Zeitschriftenaufsatz |
| 2005 | Scatter analysis of optical components from 193 nm to 13.5 nm
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2005 | Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2005 | Streulichtanalyse für die Nanotechnotechnik
Schröder, S.; Gliech, S.; Duparre, A. | Zeitschriftenaufsatz |
| 2005 | Surface texture investigation of ultra-precision optical components
Schröder, S.; Ratteit, J.; Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2004 | 157 nm and 193 nm scatter, R and T measurement technique
Gliech, S.; Gessner, H.; Hultaker, A.; Duparre, A. | Konferenzbeitrag |
| 2004 | Characterization of CaF2 substrates for VUV fluoride coatings
Hultaker, A.; Gliech, S.; Gessner, H.; Duparre, A. | Konferenzbeitrag |
| 2004 | High-sensitivity light scattering measurement of optical coating components
Gliech, S.; Schröder, S.; Duparre, A. | Konferenzbeitrag |
| 2004 | Light scatter technique for application in optics, nanotechnology and engineering
Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2004 | VERFAHREN UND VORRICHTUNG ZUR UNTERDRUECKUNG VON LICHTABSORPTION, LICHTSTREUUNG UND KONTAMINATION BEI WELLENLAENGEN UNTERHALB VON 200NM
Duparre, A.; Gliech, S.; Notni, G.; Steinert, J. | Patent |
| 2003 | Characterizing CaF2 for VUV optical components: Roughness, surface scatter, and bulk scatter
Hultaker, A.; Benkert, N.; Gliech, S.; Duparre, A. | Konferenzbeitrag |
| 2003 | Entwicklung und Anwendung eines Messsystems zur Bestimmung des totalen Streulichts von optischen und technisch rauhen Oberflächen und Schichten
Gliech, S. | Dissertation |
| 2003 | Methology to evaluate light scatter mechanisms of VUV substrates and coatings
Duparre, A.; Gliech, S.; Hultaker, A. | Aufsatz in Buch |
| 2003 | System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm
Gliech, S.; Geßner, H.; Duparre, A. | Konferenzbeitrag |
| 2003 | VULSTAR: A laser based system for measuring light scattering, transmittance, and reflectance at 157 nm and 193 nm
Duparre, A.; Gliech, S.; Benkert, N. | Aufsatz in Buch |
| 2003 | VUV light scattering measurements of substrates and thin film coatings
Hultaker, A.; Gliech, S.; Benkert, N.; Duparre, A. | Konferenzbeitrag |
| 2002 | Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A. | Zeitschriftenaufsatz |
| 2002 | Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components
Duparre, A.; Ferre-Borrull, J.; Gliech, S.; Notni, G.; Steinert, J.; Bennett, J.M. | Zeitschriftenaufsatz |
| 2001 | Surface characterization of optical components for the DUV, VUV und EUV
Duparre, A.; Kozhevnikov, I.; Gliech, S.; Steinert, J.; Notni, G. | Zeitschriftenaufsatz |
| 2000 | Advanced Methods for surface and subsurface defect characterization of optical components
Steinert, J.; Gliech, S.; Wuttig, A.; Duparre, A.; Truckenbrodt, H. | Konferenzbeitrag |
| 2000 | DUV/VUV light scattering measurement of optical components for lithography applications
Gliech, S.; Steinert, J.; Flemming, M.; Duparre, A. | Konferenzbeitrag |
| 2000 | International round-robin experiment to test the International Organization for Standardization total-scattering draft standard
Kadkhoda, P.; Müller, A.; Ristau, D.; Duparre, A.; Gliech, S.; Lauth, H.; Schuhmann, U.; Reng, N.; Tilsch, M.; Schuhmann, R.; Amra, C.; Deumie, C.; Jolie, C.; Kessler, H.; Lindström, T.; Ribbing, C.G.; Bennet, J.M. | Zeitschriftenaufsatz |
| 2000 | Light scattering of UV-optical components
Duparre, A.; Gliech, S.; Steinert, J. | Konferenzbeitrag |
| 1999 | Charakterisierung optischer Komponenten für DUV Spektralbereich
Mann, K.; Apel, O.; Ristau, D.; Duparre, A.; Gliech, S. | Zeitschriftenaufsatz |
| 1999 | Hochauflösende Topometrie im Kontext globaler Makrostrukturen
Duparre, A.; Notni, G.; Recknagel, R.-J.; Feigl, T.; Gliech, S. | Zeitschriftenaufsatz |
| 1999 | International round-robin experiment on optical total scattering at 633 nm according to ISO/DIS 13696
Kadkhoda, P.; Amra, C.; Bennett, J.M.; Deumie, C.; Duparre, A.; Gliech, S.; Jolie, C.; Kessler, H.; Lauth, H.; Lindström, T.; Müller, A.; Reng, N.; Ribbing, C.G.; Ristau, D.; Schuhmann, R.G.; Schuhmann, U.; Tilsch, M. | Konferenzbeitrag |
| 1999 | Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1999 | Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry, and light scattering
Gliech, S.; Duparre, A.; Recknagel, R.-J.; Notni, G. | Konferenzbeitrag |
| 1997 | Concepts for standardization of total scatter measurements at 633 nm
Kadkhoda, M.; Strink, P.; Ristau, D.; Duparre, A.; Gliech, S.; Reng, N.; Greif, M.; Schuhmann, R.; Goldner, M. | Konferenzbeitrag |
| 1997 | Non-contact testing of optical surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1997 | Quality assessment from supersmooth to rough surfaces by multiple-wavelength light scattering measurement
Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1996 | Analysis of interface and volume inhomogenities in a multilayer system by light scattering methods
Pichlmaier, S.; Hehl, K.; Schuhmann, U.; Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1996 | Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths
Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1996 | Optical scattering and surface microstructure of thin films for laser application
Duparre, A.; Kiesel, A.; Gliech, S. | Zeitschriftenaufsatz |
| 1994 | Interface and volume inhomogenities in optical thin films investigated by light scattering methods
Duparre, A.; Gliech, S.; Hehl, K.; Pichlmaier, U.; Schuhmann, U. | Konferenzbeitrag |