Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Light scattering characterization of single-layer nanoporous SiO2 antireflection coating in visible light
Sekman, Y.; Felde, N.; Ghazaryan, L.; Szeghalmi, A.; Schröder, S.
Zeitschriftenaufsatz
2019On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating
Ghazaryan, L.; Sekman, Y.; Schröder, S.; Mühlig, C.; Stevanovic, I.; Botha, R.; Aghaee, M.; Creatore, M.; Tünnermann, A.; Szeghalmi, A.
Zeitschriftenaufsatz
2019Wide-Angle Broadband Antireflection Coatings Prepared by Atomic Layer Deposition
Pfeiffer, K.; Ghazaryan, L.; Schulz, U.; Szeghalmi, A.
Zeitschriftenaufsatz
2018Growth of Atomic Layer Deposited Ruthenium and its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen
Müller, R.; Ghazaryan, L.; Schenk, P.; Wolleb, S.; Beladiya, V.; Otto, F.; Kaiser, N.; Tünnermann, A.; Fritz, T.; Szeghalmi, A.
Zeitschriftenaufsatz
2018Laser-induced damage threshold of nanoporous single-layer ALD antireflective coatings
Gischkat, T.; Botha, R.; Stevanovic, I.; Szeghalmi, A.; Ghazaryan, L.; Bächli, A.
Konferenzbeitrag
2018Reproducibility and stability of nanoporous SiO2 thin film coatings
Ghazaryan, L.; Szeghalmi, A.
Konferenzbeitrag
2017Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
Shestaeva, S.; Bingel, A.; Munzert, P.; Ghazaryan, L.; Patzig, C.; Tünnermann, A.; Szeghalmi, A.
Zeitschriftenaufsatz
2017Nanoporous thin films made by atomic layer deposition and molecular layer deposition
Ghazaryan, L.
Dissertation
2016Comparative study of ALD SiO2 thin films for optical applications
Pfeiffer, K.; Shestaeva, S.; Bingel, A.; Munzert, P.; Ghazaryan, L.; Helvoirt, C. van; Kessels, W.M.M.; Sanli, U.T.; Grevent, C.; Schütz, G.; Putkonen, M.; Buchanan, I.; Jensen, L.; Ristau, D.; Tünnermann, A.; Szeghalmi, A.
Zeitschriftenaufsatz
2016Encapsulation of optical gratings using nanoporous alumina layers
Ghazaryan, Lilit; Kley, Ernst-Bernhard; Szeghalmi, Adriana
Zeitschriftenaufsatz
2016Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Zeitschriftenaufsatz
2016Verfahren zur Herstellung optisch wirksamer Elemente
Szeghalmi, Adriana; Ghazaryan, Lilit; Kley, Ernst Bernhard
Patent
2015Nanoporous SiO2 made by atomic layer deposition and atomic layer etching
Ghazaryan, L.; Kley, E.-B.; Tünnermann, A.; Szeghalmi, A.
Konferenzbeitrag
2013Stability and annealing of alucones and alucone alloys
Ghazaryan, Lilit; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana Viorica
Zeitschriftenaufsatz