Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Marcus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin
Vortrag
2017BEoL post CMP cleaning challenges for 22 nm FD-SOI and beyond
Koch, Johannes; Rehschuh, Stephan; Gerlich, Lukas; Dhavamani, Abitha; Steinke, Philipp; Krause, Robert; Naue, Johannes; Bott, Sascha; Vasilev, Boris; Breuer, Dirk; Seidel, Robert; Preusse, Axel; Bartha, Johann Wolfgang; Uhlig, Benjamin
Konferenzbeitrag
2017Seed-layer resistance and its impact on the electrochemical copper deposition
Wislicenus, Marcus; Gerlich, Lukas; Koch, Johannes; Uhlig, Benjamin
Vortrag
2016CVD-CoXN for advanced semiconductor metallization
Dhavamani, Abitha; Wislicenus, Marcus; Gerlich, Lukas; Uhlig, Benjamin
Vortrag
2016The influence of adsorption kinetics on copper superfilling for dual damascene
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel
Zeitschriftenaufsatz
2015Theory of co-adsorption and its application to copper superfilling
Liske, Romy; Krause, Robert; Uhlig, Benjamin; Gerlich, Lukas; Bott, Sascha; Wislicenus, Marcus; Preusse, Axel
Vortrag
2014Cobalt advanced barrier metallization: A resist composition analysis
Wislicenus, Marcus; Liske, Romy; Gerlich, Lukas; Vasilev, Boris; Preusse, Axel
Konferenzbeitrag