Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Grating coupled optical waveguide interferometry combined with in situ spectroscopic ellipsometry to monitor surface processes in aqueous solutions
Agocs, E.; Kozma, P.; Nador, J.; Hamori, A.; Janosov, M.; Kalas, B.; Kurunczi, S.; Fodor, B.; Ehrentreich-Förster, E.; Fried, M.; Horvath, R.; Petrik, P.
Zeitschriftenaufsatz
2013Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry
Petrik, P.; Gumprecht, T.; Nutsch, A.; Roeder, G.; Lemberger, M.; Juhasz, G.; Polgar, O.; Major, C.; Kozma, P.; Janosov, M.; Fodor, B.; Agocs, E.; Fried, M.
Zeitschriftenaufsatz
2011Expanded beam (macro-imaging) ellipsometry
Fried, M.; Juhasz, G.; Major, C.; Petrik, P.; Polgar, O.; Horvath, Z.; Nutsch, A.
Konferenzbeitrag
2006Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films
Fried, M.; Petrik, P.; Horvath, Z.E.; Lohner, T.; Schmidt, C.; Schneider, C.; Ryssel, H.
Konferenzbeitrag
2004Optical characterization of ferroelectric Strontium-Bismuth-Tantalate (SBT) thin films
Schmidt, C.; Petrik, P.; Schneider, C.; Fried, M.; Lohner, T.; Barsony, I.; Gyulai, J.; Ryssel, H.
Konferenzbeitrag
2002Characterisation of BaxSr1-xTiO3 films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction
Petrik, P.; Khanh, N.Q.; Horvath, Z.E.; Zolnai, Z.; Barsony, I.; Lohner, T.; Fried, M.; Gyulai, J.; Schmidt, C.; Schneider, C.; Ryssel, H.
Zeitschriftenaufsatz
2001In-situ measurement of the crystallization of amorphous- silicon in a vertical furnace using spectroscopic ellipsometry
Petrik, P.; Lehnert, W.; Schneider, C.; Lohner, T.; Fried, M.; Gyulai, J.; Ryssel, H.
Zeitschriftenaufsatz
2000Ellipsometric characterization of oxidized porous silicon layer structures
Lohner, T.; Fried, M.; Petrik, P.; Polgar, O.; Gyulai, J.; Lehnert, W.
Zeitschriftenaufsatz
2000Ellipsometric study of polycrystalline silicon films prepared by low-pressure chemical vapor deposition
Petrik, P.; Lohner, T.; Fried, M.; Biro, L.P.; Khanh, N.Q.; Gyulai, J.; Lehnert, W.; Schneider, C.; Ryssel, H.
Zeitschriftenaufsatz
2000In situ spectroscopic ellipsometry for the characterization of polysilicon formation inside a vertical furnace
Petrik, P.; Lehnert, W.; Schneider, C.; Fried, M.; Lohner, T.; Gyulai, J.; Ryssel, H.
Zeitschriftenaufsatz
1998Comparative study of polysilicon-on-oxide using spectroscopy ellipsometry, atomic force microscopy and transformation electron microscopy
Petrik, P.; Fried, M.; Lohner, T.; Berger, R.; Biro, L.P.; Schneider, C.; Ryssel, H.; Gyulai, J.
Konferenzbeitrag
1998Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
Petrik, P.; Biro, L.P.; Fried, M.; Lohner, T.; Berger, R.; Schneider, C.; Gyulai, J.; Ryssel, H.
Zeitschriftenaufsatz
1998Surface disorder production during plasma immersion implantation
Lohner, T.; Khanh, N.Q.; Petrik, P.; Biro, L.P.; Fried, M.; Pinter, I.; Lehnert, W.; Frey, L.; Ryssel, H.; Wentnik, D.J.; Gyulai, J.
Konferenzbeitrag