Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films
Mart, C.; Kohlenbach, N.-D.; Kühnel, K.; Eßlinger, S.; Czernohorsky, M.; Ali, T.; Weinreich, W.; Eng, L.M.
Zeitschriftenaufsatz
2021Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films
Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Zeitschriftenaufsatz
2021Impact of the Nonlinear Dielectric Hysteresis Properties of a Charge Trap Layer in a Novel Hybrid High-Speed and Low-Power Ferroelectric or Antiferroelectric HSO/HZO Boosted Charge Trap Memory
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kuhnel, K.; Lehninger, D.; Muller, F.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kampfe, T.; Muller, J.; Seidel, K.; Houdt, J. Van; Eng, L.M.
Zeitschriftenaufsatz
2021Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide
Lederer, M.; Reck, A.; Mertens, K.; Olivo, R.; Bagul, P.; Kia, A.; Volkmann, B.; Kämpfe, T.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
2021On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide
Lederer, M.; Olivo, R.; Lehninger, D.; Abdulazhanov, S.; Kämpfe, T.; Kirbach, S.; Mart, C.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
2020Effect of Substrate Implant Tuning on the Performance of MFIS Silicon Doped Hafnium Oxide (HSO) FeFET Memory
Ali, T.; Kühnel, K.; Mertens, K.; Czernohorsky, M.; Rudolph, M.; Duhan, P.; Lehninger, D.; Hoffmann, R.; Steinke, P.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Konferenzbeitrag
2020The electrocaloric effect in doped hafnium oxide: Comparison of direct and indirect measurements
Mart, C.; Kämpfe, T.; Czernohorsky, M.; Eßlinger, S.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Zeitschriftenaufsatz
2020Energy harvesting in the back-end of line with CMOS compatible ferroelectric hafnium oxide
Mart, C.; Abdulazhanov, S.; Czernohorsky, M.; Kämpfe, T.; Lehninger, D.; Falidas, K.; Eßlinger, S.; Kühnel, K.; Oehler, S.; Rudolph, M.; Wiatr, M.; Kolodinski, S.; Seidel, R.; Weinreich, W.; Eng, L.M.
Konferenzbeitrag
2020Impact of Ferroelectric Wakeup on Reliability of Laminate based Si-doped Hafnium Oxide (HSO) FeFET Memory Cells
Ali, T.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Olivo, R.; Lehninger, D.; Mertens, K.; Müller, F.; Lederer, M.; Hoffmann, R.; Mart, C.; Kalkani, M.N.; Steinke, P.; Kämpfe, T.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Konferenzbeitrag
2020Integration of Hafnium Oxide on Epitaxial SiGe for p-type Ferroelectric FET Application
Lederer, M.; Müller, F.; Kühnel, K.; Olivo, R.; Mertens, K.; Trentzsch, M.; Dünkel, S.; Müller, J.; Beyer, S.; Seidel, K.; Kämpfe, T.; Eng, L.M.
Zeitschriftenaufsatz
2020A Novel Dual Ferroelectric Layer Based MFMFIS FeFET with Optimal Stack Tuning Toward Low Power and High-Speed NVM for Neuromorphic Applications
Ali, T.; Seidel, K.; Kühnel, K.; Rudolph, M.; Czernohorsky, M.; Mertens, K.; Hoffmann, R.; Zimmermann, K.; Mühle, U.; Müller, J.; Houdt, J. van; Eng, L.M.
Konferenzbeitrag
2020A novel hybrid high-speed and low power antiferroelectric HSO boosted charge trap memory for high-density storage
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kühnel, K.; Lehninger, D.; Müller, F.; Lederer, M.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Kia, A.M.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kämpfe, T.; Müller, J.; Seidel, K.; Houdt, J.V. van; Eng, L.M.
Konferenzbeitrag
2020Pyroelectric CMOS Compatible Sensor Element Based on Hafnium Oxide Thin Films
Mart, C.; Viegas, A.; Eßlinger, S.; Czernohorsky, M.; Weinreich, W.; Mutschall, D.; Kaiser, A.; Neumann, N.; Großmann, T.; Hiller, K.; Eng, L.M.
Konferenzbeitrag
2020Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, M.; Kämpfe, T.; Vogel, N.; Utess, D.; Volkmann, B.; Ali, T.; Olivo, R.; Müller, J.; Beyer, S.; Trentzsch, M.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Olivo, R.; Lederer, M.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: A Temperature-Modulated Operation
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lederer, M.; Olivo, R.; Lehninger, D.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
2020Tunable non-volatile memory by conductive ferroelectric domain walls in lithium niobate thin films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Zeitschriftenaufsatz
2020Tuning Domain Wall Conductance in Lithium Niobate Thin-Films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Konferenzbeitrag
2019Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays
Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M.
Zeitschriftenaufsatz
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Konferenzbeitrag
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Zeitschriftenaufsatz
2017Anodization of sputtered substoichiometric aluminum oxide thin-films for improved nanorod array fabrication
Patrovsky, Fabian; Fiehler, Vera; Derenko, Susan; Barth, Stephan; Bartzsch, Hagen; Ortstein, Katrin; Frach, Peter; Eng, L.M.
Zeitschriftenaufsatz
2013Laser remote-fusion cutting with solid-state lasers
Wagner, A.; Lütke, M.; Wetzig, A.; Eng, L.M.
Zeitschriftenaufsatz
2013Local photochemical plasmon mode tuning in metal nanoparticle arrays
Derenko, S.; Kullock, R.; Wu, Z.; Sarangan, A.; Schuster, C.; Eng, L.M.; Härtling, T.
Zeitschriftenaufsatz
2011Effects of patterning induced stress relaxation in strained SOI/SiGe layers and substrate
Hermann, P.; Hecker, M.; Renn, F.; Rlke, M.; Kolanek, K.; Rinderknecht, J.; Eng, L.M.
Zeitschriftenaufsatz
2011Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy
Hermann, P.; Hecker, M.; Chumakov, D.; Weisheit, M.; Rinderknecht, J.; Shelaev, A.; Dorozhkin, P.; Eng, L.M.
Zeitschriftenaufsatz
2011Non-destructive testing of integrated nanostructures using 3D polarization control in an optical microscope
Härtling, T.; Olk, P.; Kullock, R.; Eng, L.M.
Konferenzbeitrag
2010Controlled photochemical particle growth in two-dimensional ordered metal nanoparticle arrays
Härtling, T.; Seidenstucker, A.; Olk, P.; Plettl, A.; Ziemann, P.; Eng, L.M.
Zeitschriftenaufsatz
2010Fabrication of two-dimensional Au@FePt core-shell nanoparticle arrays by photochemical metal deposition
Härtling, T.; Uhlig, T.; Seidenstücker, A.; Bigall, N.C.; Olk, P.; Wiedwald, U.; Han, L.; Eychmüller, A.; Plettl, A.; Ziemann, P.; Eng, L.M.
Zeitschriftenaufsatz
2010Polarization mode preservation in elliptical index tailored optical fibers for apertureless scanning near-field optical microscopy
Zeh, C.; Spittel, R.; Unger, S.; Opitz, J.; Köhler, B.; Kirchhof, J.; Bartelt, H.; Eng, L.M.
Zeitschriftenaufsatz
2010Three-dimensional, arbitrary orientation of focal polarization
Olk, P.; Härtling, T.; Kullock, R.; Eng, L.M.
Zeitschriftenaufsatz
2009Determination of proximity effect parameters by means of CD-linearity in sub 100 nm electron beam lithography
Hauptmann, M.; Choi, K.-H.; Jaschinsky, P.; Hohle, C.; Kretz, J.; Eng, L.M.
Konferenzbeitrag
2009Fast backscattering parameter determination in e-beam lithography with a modified doughnut test
Keil, K.; Hauptmann, M.; Choi, K.H.; Kretz, J.; Eng, L.M.; Bartha, J.W.
Zeitschriftenaufsatz
2009Utilizing near-field and depolarization effects for tip-enhanced Raman spectroscopy on semiconductor nanostructures
Hermann, P.; Chong, Z.; Hecker, M.; Olk, P.; Weisheit, M.; Rinderknecht, J.; Ritz, Y.; Kücher, P.; Eng, L.M.
Zeitschriftenaufsatz
2007Extending conventional scatterometry using generalized ellipsometry
Reinig, P.; Geiler, T.; Mört, M.; Hingst, T.; Bloeß, H.; Renger, J.; Eng, L.M.
Konferenzbeitrag
2006High throughput screening of ferroelectric thin film libraries
Schroeter, C.; Wessler, B.; Schönecker, A.; Keitel, U.; Eng, L.M.
Zeitschriftenaufsatz