Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Three-state lithography model: An enhanced mathematical approach to predict resist characteristics in grayscale lithography processes
Badawi, Bassem; Sayadi, Olfa; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
2020Defect characterization of unannealed neutron transmutation doped silicon by means of deep temperature microwave detected photo induced current transient spectroscopy
Engst, C.R.; Eisele, I.; Kutter, C.
Zeitschriftenaufsatz
2020Temperature driven memristive switching in Al/TiO2/Al devices
Reiser, Daniel; Drost, Andreas; Chryssikos, Domenikos; Eisele, Ignaz; Tornow, Marc
Konferenzbeitrag
2019Mikrowellenplasmaunterstützte Prozesse für Anwendungen in der Halbleitertechnologie
Altmannshofer, Stephan
: Kutter, C.; Eisele, I.
Dissertation
2019Minority carrier lifetime measurements for contactless oxidation process characterization and furnace profiling
Bscheid, Christian; Engst, Christian R.; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
2019Towards low cost and low temperature capacitive CO2 sensors based on amine functionalized silica nanoparticles
Boudaden, J.; Klumpp, A.; Endres, H.-E.; Eisele, I.
Zeitschriftenaufsatz
2018An approach to reduce greenhouse gases in the semiconductor industry using F2 dissociated in plasma for CVD chamber cleaning
Boudaden, Jamila; Altmannshofer, Stephan; Wieland, Robert; Pittroff, Michael; Eisele, Ignaz
Zeitschriftenaufsatz
2018Deposition of micro crystalline silicon films using microwave plasma enhanced chemical vapor deposition
Altmannshofer, Stephan; Miller, Bastian; Holleitner, Alexander W.; Boudaden, Jamila; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
2018Low power, low noise JFETs for room temperature X-ray detectors
Sturm, Leonhard; Nebrich, L.; Neumeier, K.; Eisele, I.; Kutter, C.
Vortrag
2018Polyimide-based capacitive humidity sensor
Boudaden, Jamila; Steinmaßl, Matthias; Endres, Hanns-Erik; Drost, Andreas; Eisele, Ignaz; Kutter, Christoph; Müller-Buschbaum, Peter
Zeitschriftenaufsatz
2018Smart monitoring system for air quality control with capacitive sensors
Steinmaßl, Matthias; Boudaden, Jamila; Endres, Hanns-Erik; Eisele, Ignaz; Kutter, Christoph; Müller-Buschbaum, Peter
Konferenzbeitrag
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
2017Capacitive CO2 sensor
Boudaden, Jamila; Klumpp, Armin; Endres, Hanns-Erik; Eisele, Ignaz
Zeitschriftenaufsatz
2017Charge sensitive fluid sensor for chemical and biological applications
Heigl, M.; Neumeier, K.; Spitzlsperger, G.; Kutter, C.; Eisele, I.
Konferenzbeitrag
2017Microwave plasma assisted process for cleaning and deposition in future semiconductor technology
Altmannshofer, S.; Boudaden, J.; Wieland, R.; Eisele, I.; Kutter, C.
Konferenzbeitrag
2017Smart HVAC sensors for smart energy
Boudaden, J.; Wenninger, F.; Klumpp, A.; Eisele, I.; Kutter, C.
Konferenzbeitrag
2016CMOS compatible nanogap-field-effect-transistor for integrated NEMS application
Heigl, M.; Neumeier, K.; Eisele, I.
Konferenzbeitrag
2016Hydrogen microwave plasma treatment of Si and SiO2
Altmannshofer, S.; Eisele, I.; Gschwandtner, A.
Zeitschriftenaufsatz
2016Smart capacitive CO2 sensor
Boudaden, Jamila; Klumpp, Armin; Eisele, Ignaz; Kutter, Christoph
Konferenzbeitrag
2015VERFAHREN ZUR ERKENNUNG RESISTENTER KEIME UND VORRICHTUNG ZUM DURCHFÜHREN DESSELBEN
Trupp, Sabine; Schmidt, Jennifer; Eisele, Ignaz; Haberger, Karl; Sittel, Wolfgang
Patent
2012Heterogene Systemintegration von Halbleitersensoren
Klumpp, A.; Nebrich, L.; Eisele, I.
Aufsatz in Buch
2012Highly sensitive radiation detectors for medical applications
Nebrich, L.; Wiest, F.; Eisele, I.
Konferenzbeitrag
2011Growth of highly textured aluminum films on LiTaO3 with optimized titanium intermediate layers
Nüssl, R.; Senft, C.; Beckmeier, D.; Jewula, T.; Ruile, W.; Sulima, T.; Hansch, W.; Eisele, I.
Zeitschriftenaufsatz
2011Work function-based gas sensors: Schottky and FET-based devices
Senft, C.; Iskra, P.; Eisele, I.; Hansch, W.
Aufsatz in Buch
2010The Impact Ionization MOSFET (IMOS) as low-voltage optical detector
Schlosser, M.; Iskra, P.; Abelein, U.; Lange, H.; Lochner, H.; Sulima, T.; Wiest, F.; Zilbauer, T.; Schmidt, B.; Eisele, I.; Hansch, W.
Konferenzbeitrag
2003Cobalt oxide based gas sensors on silicon substrate for operation at low temperatures
Wöllenstein, J.; Burgmair, M.; Plescher, G.; Sulima, T.; Hildenbrand, J.; Böttner, H.; Eisele, I.
Zeitschriftenaufsatz
2002High-tech hydrogen gas sensor
Zimmer, M.; Eisele, I.; Neumeier, K.; Endres, H.-E.; Hagler, R.; Grimm, H.
Konferenzbeitrag
1994Simulation of buried layer experiments containing all four dopant species
Ghaderi, K.; Hobler, G.; Budil, M.; Pötzl, H.; Pichler, P.; Ryssel, H.; Hansch, W.; Eisele, I.; Tian, C.; Stingeder, G.
Konferenzbeitrag