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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Die-level patterning of parylene F by laser-ablation for further processing with ALD functional layers
Dogan, Özgü; Mokwa, Wilfried; Mai, Lukas; Devi, Anjana; Vogt, Holger
Konferenzbeitrag
2017Review Article: Recommended reading list of early publications on atomic layer deposition - outcome of the "Virtual Project on the History of ALD"
Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael C.; Berdova, Maria; Boyadjiev, Stefan; Cameron, David; Chen, Rong; Chubarov, Mikhail; Cremers, Véronique; Devi, Anjana; Drozd, V.E.; El’nikova, Liliya; Gottardi, Gloria; Grigoras, Kestutis; Hausmann, Dennis; Hwang, Cheolseong; Jen, Shihhui; Kallio, Tanja; Kanervo, Jaana; Khmelnitskiy, Ivan; Kim, Dohan; Klibanov, Lev; Koshtyal, Yury; Krause, A. Outi; Kuhs, Jakob; Kärkkänen, Irina; Kääriäinen, Marja Leena; Kääriäinen, Tommi; Lamagna, Luca; Łapicki, Adam; Leskelä, Markku; Lipsanen, Harri; Aav, Jussi; Malkov, Anatoly; Malygin, Anatoly; Mennad, Abdelkader; Militzer, Christian; Molarius, Jyrki; Norek, Małgorzata; Ozgit-Akgun, Cagla; Panov, Mikhail; Pedersen, Henrik; Piallat, Fabien; Popov, Georgi; Puurunen, Riikka; Rampelberg, Geert; Ras, Robin; Rauwel, Erwan; Roozeboom, Fred; Sajavaara, Timo; Salami, Hossein; Savin, Hele; Schneider, Nathanaëlle; Seidel, Thomas E.; Sundqvist, Jonas; Suyatin, Dmitry B.; Törndahl, Tobias; Ommen,
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