Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1991Simulation of defects in 3-dimensional resist profiles in optical lithography
Mewes, D.; Weiß, M.; Schießl-Hoyler, R.; Czech, G.; Henke, W.
Zeitschriftenaufsatz
1991A study of reticle defects imaged into three-dimensional developed profiles of positive photoresist using the SOLID lithography simulator
Mewes, D.; Schießl-Hoyler, R.; Czech, G.; Henke, W.; Weiß, M.
Zeitschriftenaufsatz
1990Assessment of high contrast g- and i-line resists using high numerical aperture exposure tools
Binder, J.; Czech, G.; Gutmann, A.; Henke, W.; Karl, J.; Mager, L.; Sarlette, D.
Konferenzbeitrag
1990Simulation of lithographic images and resist profiles
Henke, W.; Czech, G.
Konferenzbeitrag