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2020 | Imprinting the polytype structure of silicon carbide by rapid thermal processing Pezoldt, Jörgen; Cimalla, Volker | Zeitschriftenaufsatz |
2020 | Influence of Different Surface Morphologies on the Performance of High-Voltage, Low-Resistance Diamond Schottky Diodes Reinke, Philipp; Benkhelifa, Fouad; Kirste, Lutz; Czap, Heiko; Pinti, Lucas; Zürbig, Verena; Cimalla, Volker; Nebel, Christoph E.; Ambacher, Oliver | Zeitschriftenaufsatz |
2020 | Verfahren zum Bonden von zumindest einem Wafer und Substrat mit einem darauf befindlichen Wafer Gerrer, Thomas; Cimalla, Volker; Graff, Andreas; Simon-Najasek, Michél | Patent |
2019 | 3 GHz RF measurements of AlGaN/GaN transistors transferred from silicon substrates onto single crystalline diamond Gerrer, Thomas; Czap, Heiko; Maier, Thomas; Benkhelifa, Fouad; Müller, Stefan; Nebel, Christoph E.; Waltereit, Patrick; Quay, Rüdiger; Cimalla, Volker | Zeitschriftenaufsatz |
2019 | Adaptive low-temperature covalent bonding of III-nitride thin films by extremely thin water interlayers Gerrer, Thomas; Graff, Andreas; Simon-Najasek, Michél; Czap, Heiko; Maier, Thomas; Benkhelifa, Fouad; Müller, Stefan; Nebel, Christoph E.; Waltereit, Patrick; Quay, Rüdiger; Cimalla, Volker | Zeitschriftenaufsatz |
2019 | Diamond Schottky-Diode in a non-isolated buck converter Reiner, Richard; Zürbig, Verena; Pinti, Lucas; Reinke, Philipp; Meder, Dirk; Mönch, Stefan; Benkhelifa, Fouad; Quay, Rüdiger; Cimalla, Volker; Nebel, Christoph E.; Ambacher, Oliver | Konferenzbeitrag |
2018 | Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators Knapp, Marius; Hoffmann, René; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
2018 | Metallization design investigations for graphene as a virtually massless electrode material for 2.1 GHz solidly mounted (BAW-SMR) resonators Knapp, Marius; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver | Konferenzbeitrag |
2018 | Pulsed laser deposition of ferroelectric potassium tantalate-niobate optical waveguiding thin films Jia, Yuechen; Winkler, Markus; Cheng, Chen; Chen, Feng; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Szabados, Jan; Breunig, Ingo; Buse, Karsten | Zeitschriftenaufsatz |
2018 | Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding Gerrer, Thomas; Cimalla, Volker; Waltereit, Patrick; Müller, Stefan; Benkhelifa, Fouad; Maier, Thomas; Czap, Heiko; Ambacher, Oliver; Quay, Rüdiger | Zeitschriftenaufsatz, Konferenzbeitrag |
2018 | Verfahren zum Transfer zumindest einer Dünnschicht Cimalla, Volker; Gerrer, Thomas; Preschle, Marina; Yoshikawa, Taro | Patent |
2017 | Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
2017 | Potassium tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics Jia, Yuechen; Winkler, Markus; Szabados, Jan; Breunig, Ingo; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Buse, Karsten | Konferenzbeitrag |
2017 | Potassium-tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics Jia, Yuechen; Szabados, Jan; Winkler, Markus; Breunig, Ingo; Cimalla, Volker; Kirste, Lutz; Zukauskaite, Agne; Buse, Karsten | Konferenzbeitrag |
2017 | Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding Gerrer, Thomas; Cimalla, Volker; Waltereit, Patrick; Müller, Stefan; Benkhelifa, Fouad; Maier, Thomas; Czap, Heiko; Nebel, Christoph E.; Quay, Rüdiger | Konferenzbeitrag |
2017 | Wettability investigations and wet transfer enhancement of large-area CVD-graphene on aluminum nitride Knapp, Marius; Hoffmann, René; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
2016 | Consequences of plasma oxidation and vacuum annealing on the chemical properties and electron accumulation of In2O3 surfaces Berthold, T.; Rombach, J.; Stauden, T.; Polyakov, V.; Cimalla, V.; Krischok, S.; Bierwagen, O.; Himmerlich, M. | Zeitschriftenaufsatz |
2016 | Electrostatic self-assembly of diamond nanoparticles onto Al- and N-Polar sputtered aluminum nitride surfaces Yoshikawa, Taro; Reusch, Markus; Zürbig, Verena; Cimalla, Volker; Lee, K.-H.; Kurzyp, M.; Arnault, J.-C.; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim | Zeitschriftenaufsatz |
2016 | Interaction of indium oxide nanoparticle film surfaces with ozone, oxygen and water Himmerlich, M.; Eisenhardt, A.; Berthold, T.; Wang, C.Y.; Cimalla, V.; Ambacher, O.; Krischok, S. | Zeitschriftenaufsatz |
2016 | Optimierung der Mikrostruktur und der Messparameter eines photostimulierten Ozonsensors auf der Basis von Indiumoxid Mischo, M. : Ambacher, O. (Referent); Cimalla, V. (Betreuer) | Dissertation |
2016 | The role of surface electron accumulation and bulk doping for gas-sensing explored with single-crystalline In2O3 thin films Rombach, J.; Papadogianni, A.; Mischo, M.; Cimalla, V.; Kirste, L.; Ambacher, O.; Berthold, T.; Krischok, S.; Himmerlich, M.; Selve, S.; Bierwagen, O. | Zeitschriftenaufsatz |
2015 | Bias-free lateral terahertz emitters - a simulation study Granzner, R.; Polyakov, V.M.; Cimalla, V.; Ambacher, O.; Schwierz, F. | Zeitschriftenaufsatz |
2015 | Changes of electronic properties of AlGaN/GaN HEMTs by surface treatment Pletschen, W.; Linkohr, S.; Kirste, L.; Cimalla, V.; Müller, S.; Himmerlich, M.; Krischok, S.; Ambacher, O. | Konferenzbeitrag |
2015 | Control of drinking water by linking biosensors with physicochemical methods Cimalla, Volker; Hugger, Stefan; Fuchs, Frank; Anzt, Johannes; Bitterling, Moritz; Yang, Nianjun; Kohl, Christina; Maucher, Tanja; Mühlemeier, Ilka; Burger-Kentischer, Anke; Trick, Iris | Zeitschriftenaufsatz, Konferenzbeitrag |
2015 | Detection of different target-DNA concentrations with highly sensitive AlGaN/GaN high electron mobility transistors Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2015 | Dynamic detection of target-DNA with AlGaN/GaN high electron mobility transistors Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Podolska, A.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2015 | Electrical conductivity and gas-sensing properties of Mg-doped and undoped single-crystalline In2O3 thin films: Bulk vs. surface Rombach, J.; Bierwagen, O.; Papadogianni, A.; Mischo, M.; Cimalla, V.; Berthold, T.; Krischok, S.; Himmerlich, M. | Zeitschriftenaufsatz, Konferenzbeitrag |
2015 | Impedance characterization of DNA-functionalization layers on AlGaN/GaN high electron mobility transistors Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Podolska, A.; Ambacher, O. | Konferenzbeitrag, Zeitschriftenaufsatz |
2015 | Integration of an opto-chemical detector based on group III-nitride nanowire heterostructures Kleindienst, R.; Becker, P.; Cimalla, V.; Grewe, A.; Hille, P.; Krüger, M.; Schörmann, J.; Schwarz, U.T.; Teubert, J.; Eickhoff, M.; Sinzinger, S. | Zeitschriftenaufsatz |
2015 | Large area InN terahertz emitters based on the lateral photo-Dember effect Wallauer, J.; Grumber, C.; Polyakov, V.; Iannucci, R.; Cimalla, V.; Ambacher, O.; Walther, M. | Zeitschriftenaufsatz |
2014 | Densification of thin aluminum oxide films by thermal treatments Cimalla, V.; Baeumler, M.; Kirste, L.; Prescher, M.; Christian, B.; Passow, T.; Benkhelifa, F.; Bernhardt, F.; Eichapfel, G.; Himmerlich, M.; Krischok, S.; Pezoldt, J. | Zeitschriftenaufsatz |
2014 | Electronic nose for toxic gas detection based on photostimulated core-shell nanowires Wongchoosuk, C.; Subannajui, K.; Wang, C.; Yang, Y.; Güder, F.; Kerdcharoen, T.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
2014 | Integrated opto-chemical sensor system based on group III-nitride nanowires Kleindienst, R.; Krüger, M.; Grewe, A.; Sinzinger, S.; Holc, K.; Schätzle, J.; Steffen, A.; Cimalla, V.; Schwarz, U.T.; Becker, P.; Hille, P.; Schörmann, J.; Teubert, J.; Eickhoff, M. | Konferenzbeitrag |
2014 | Nano-diamond based spheres for radio frequency electromechanical resonators Lebedev, V.; Iankov, D.; Heidrich, N.; Zürbig, V.; Wild, C.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2014 | Parameterextraktion an InAs/GaSb-Übergitterdetektoren für das langwellige Infrarot Lemke, F. : Ambacher, O. (Gutachter); Cimalla, V. (Gutachter); Rehm, R. (Betreuer) | Master Thesis |
2014 | Sips adsorption model for DNA sensing with AlGaN/GaN high electron mobility transistors Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2013 | CIP (cleaning-in-place) stability of AlGaN/GaN pH sensors Linkohr, S.; Pletschen, W.; Schwarz, S.U.; Anzt, J.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2013 | Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V. | Zeitschriftenaufsatz |
2013 | Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O. | Zeitschriftenaufsatz |
2013 | Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Holc, K.; Schätzle, J.; Schwarz, U.; Teubert, J.; Sinzinger, S. | Konferenzbeitrag |
2013 | Miniaturisierte optische Integrationsplattform für III-N basierte opto-chemische Detektoren Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Holc, K.; Schätzle, J.; Schörmann, J.; Schwarz, U.T.; Teubert, J.; Sinzinger, S. | Konferenzbeitrag |
2013 | Piezo-actuated tunable diamond/AlN micro lenses Zürbig, V.; Pätz, D.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Cimalla, V.; Nebel, C.; Ambacher, O.; Lebedev, V. | Konferenzbeitrag |
2013 | Seebeck ozone sensors Mischo, M.; Bitterling, M.; Himmerlich, M.; Krischok, S.; Ambacher, O.; Cimalla, V. | Konferenzbeitrag |
2013 | Thermal functionalization of GaN surfaces with 1-alkenes Schwarz, S.U.; Cimalla, V.; Eichapfel, G.; Himmerlich, M.; Krischok, S.; Ambacher, O. | Zeitschriftenaufsatz |
2013 | Tuning of the optical properties of In-rich In(x)Ga(1-x)N (x=0.82-0.49) alloys by light-ion irradiation at low energy Luca, M. de; Pettinari, G.; Polimeni, A.; Capizzi, M.; Ciatto, G.; Amidani, L.; Fonda, E.; Boscherini, F.; Filippone, F.; Bonapasta, A.A.; Knübel, A.; Cimalla, V.; Ambacher, O.; Giubertoni, D.; Bersani, M. | Konferenzbeitrag |
2012 | An advanced fabrication method of highly ordered ZnO nanowire arrays on silicon substrates by atomic layer deposition Subannajui, K.; Güder, F.; Danhof, J.; Menzel, A.; Yang, Y.; Kirste, L.; Wang, C.Y.; Cimalla, V.; Schwarz, U.; Zacharias, M. | Zeitschriftenaufsatz |
2012 | Device for converting mechanical energy into electrical energy for autonomous power supply of e.g. electronic components of electric circuit of electrical device, has moving element with membrane whose side includes concave and convex areas Lebedev, V.; Cimalla, V. | Patent |
2012 | Electrostatically coupled vibration modes in unimorph complementary mircocantilevers Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Raynor, B.; Polyakov, V.M.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2012 | Evaluation of AlN material properties through vibration analysis of thin membranes Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2012 | Evaluation on AIN material properties through vibration analysis of thin membranes Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2012 | Halbleiterbauelement mit einer orienterten Schicht und Verfahren zu seiner Herstellung Kirste, Lutz; Cimalla, Volker; Aidam, R. | Patent |
2012 | Influence of plasma treatments on the properties of GaN/AlGaN/GaN HEMT structures Linkohr, S.; Pletschen, W.; Polyakov, V.M.; Himmerlich, M.; Lorenz, P.; Krischok, S.; Kirste, L.; Müller, S.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
2012 | Photo luminescent and gas-sensing properties of ZnO nanowires prepared by an ionic liquid assisted vapor transfer approach Subannajui, K.; Wongchoosuk, C.; Ramgir, N.; Wang, C.Y.; Yang, Y.; Hartel, A.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
2012 | Photoluminescent and gas-sensing properties of ZnO nanowires prepared by an ionic liquid assisted vapor transfer approach Subannajui, K.; Wongchoosuk, C.; Ramgir, N.; Wang, C.Y.; Yang, Y.; Hartel, A.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
2012 | Photon stimulated ozone sensor based on indium oxide nanoparticles II: Ozone monitoring in humidity and water environments Wang, C.Y.; Bagchi, S.; Bitterling, M.; Becker, R.W.; Köhler, K.; Cimalla, V.; Ambacher, O.; Chaumette, B. | Zeitschriftenaufsatz |
2012 | Plasma affected 2DEG properties on GaN/AlGaN/GaN HEMTs Linkohr, S.; Pletschen, W.; Kirste, L.; Himmerlich, M.; Lorenz, P.; Krischok, S.; Polyakov, V.M.; Müller, S.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
2012 | SEMICONDUCTOR STRUCTURAL ELEMENT AND METHOD FOR THE PRODUCTION THEREOF Cimalla, V.; Lebedev, V. | Patent |
2012 | Superior functionality by design: Selective ozone sensing realized by rationally constructed high-index ZnO surfaces Güder, F.; Yang, Y.; Menzel, A.; Wang, C.Y.; Danhof, J.; Subannajui, K.; Hartel, A.; Hiller, D.; Kozhummal, R.; Ramgir, N.; Cimalla, V.; Schwarz, U.T.; Zacharias, M. | Zeitschriftenaufsatz |
2012 | Surface properties of stoichiometric and defect-rich indium oxide films grown by MOCVD Himmerlich, M.; Wang, C.Y.; Cimalla, V.; Ambacher, O.; Krischok, S. | Zeitschriftenaufsatz |
2011 | AlGaN/GaN sensors for direct monitoring of nerve cell response to inhibitors Cimalla, I.; Gebinoga, M.; Schober, A.; Polyakov, V.M.; Lebedev, V.; Cimalla, V. | Aufsatz in Buch |
2011 | AlN based microgenerators for powering implantable sensor devices Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
2011 | AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation Hampl, S.; Cimalla, V.; Polster, T.; Hoffmann, M. | Konferenzbeitrag |
2011 | AlN-basierte mikroelektromechanische Strukturen für Implantate Heidrich, N.; Knöbber, F.; Hampl, S.; Pletschen, W.; Sah, R.E.; Cimalla, V.; Lebedev, V.; Ambacher, O. | Konferenzbeitrag |
2011 | Biocompatible AlN-based piezo energy harvesters for implants Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
2011 | DNA-sensor based on AlGaN/GaN high electron mobility transistor Schwarz, S.U.; Linkohr, S.; Lorenz, P.; Krischok, S.; Nakamura, T.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Zeitschriftenaufsatz |
2011 | Dynamic characterization of thin aluminum nitride microstructures Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
2011 | Electron and hole accumulation in InN/InGaN heterostructures Lebedev, V.; Polyakov, V.M.; Knübel, A.; Aidam, R.; Kirste, L.; Cimalla, V.; Granzner, R.; Schwierz, F.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2011 | Growth mechanism and electronic properties of epitaxial In(2)O(3) films on sapphire Wang, C.Y.; Kirste, L.; Morales, F.M.; Mánuel, J.M.; Röhlig, C.-C.; Köhler, K.; Cimalla, V.; García, R.; Ambacher, O. | Zeitschriftenaufsatz |
2011 | Low-temperature grown high-quality piezoelectric AIN Film for sensor application Sah, R.E.; Bludau, O.; Röhlig, C.-C.; Kirste, L.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
2011 | Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Foerster, C.; Cimalla, V.; Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, M.A. | Zeitschriftenaufsatz |
2011 | Mikromechanischer Schalter Lebedev, Vadim; Cimalla, Volker | Patent |
2011 | Oxidation behaviour of carbon monoxide at the photostimulated surface of ZnO nanowires Wang, C.Y.; Kinzer, M.; Youn, S.K.; Ramgir, N.; Kunzer, M.; Köhler, K.; Zacharias, M.; Cimalla, V. | Zeitschriftenaufsatz |
2011 | Photon stimulated sensor based on indium oxide nanoparticles I: Wide-concentration-range ozone monitoring in air Wang, C.Y.; Becker, R.W.; Passow, T.; Pletschen, W.; Köhler, K.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2011 | Sensorsystem und Verfahren zur Erfassung einer Messgröße Wang, Chunyu; Domke, J.; Cimalla, Volker; Badeja, M.; Clad, M. | Patent |
2011 | Stratospheric ozone detection using a photon stimulated ozone sensor based on indium oxide nanoparticles Wang, C.Y.; Becker, R.W.; Kappeler, O.; Cimalla, V.; Matthes, M.; Mundhenke, J. | Zeitschriftenaufsatz |
2010 | AlGaN/GaN based heterostructures for MEMS and NEMS applications Cimalla, V.; Röhlig, C.-C.; Lebedev, V.; Ambacher, O.; Tonisch, K.; Niebelschütz, F.; Brueckner, K.; Hein, M.A. | Konferenzbeitrag |
2010 | Catalyst-free growth of ZnO nanowires based on topographical confinement and preferential chemisorption and their use for room temperature CO detection Youn, S.K.; Ramgir, N.; Wang, C.Y.; Subannajui, K.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
2010 | Diamond/AlN thin films for optical applications Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
2010 | Elastic properties of nanowires Röhlig, C.-C.; Niebelschütz, F.; Brueckner, P.; Tonisch, K.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
2010 | Group III-nitride based sensors - advances towards a new generation of biosensors Cimalla, I.; Lübbers, B.; Cimalla, V.; Gebinoga, M.; Schober, A.; Ambacher, O. | Aufsatz in Buch |
2010 | Impact of Al content on transport properties of two-dimensional electron gas in GaN/Al(x)Ga(1-x)N/GaN heterostructures Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Köhler, K.; Müller, S.; Waltereit, P.; Ambacher, O. | Zeitschriftenaufsatz |
2010 | Impact of n-type doping on the terahertz surface emission from c-plane InN Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Schwierz, F. | Zeitschriftenaufsatz, Konferenzbeitrag |
2010 | InN nanocolumns Grandal, J.; Sánchez-García, M.A.; Calleja, E.; Lazic, S.; Gallardo, E.; Calleja, J.M.; Luna, E.; Trampert, A.; Niebelschütz, F.; Cimalla, V.; Ambacher, O. | Aufsatz in Buch |
2010 | Investigation of stress in AIN thin films for piezoelectric MEMS Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H. | Konferenzbeitrag |
2010 | Near-UV LEDs for integrated InO-based ozone sensors Wang, C.Y.; Cimalla, V.; Kunzer, M.; Passow, T.; Pletschen, W.; Kappeler, O.; Wagner, J.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2010 | A novel bio-functionalization of AlGaN/GaN-ISFETs for DNA-sensors Linkohr, S.; Schwarz, S.; Krischok, S.; Lorenz, P.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
2010 | A novel functionalization of AlGaN/GaN-pH-ISFETs for DNA-sensors Linkohr, S.; Schwarz, S.U.; Krischok, S.; Lorenz, P.; Nakamura, T.; Polyakov, V.M.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Konferenzbeitrag |
2010 | Photon stimulated ozone sensing Wang, C.Y.; Cimalla, V.; Ambacher, O.; Himmerlich, M.; Krischok, S. | Aufsatz in Buch |
2010 | Piezoactuated diamond MEMS for RF and optical applications Lebedev, Vadim; Cimalla, Volker | Aufsatz in Buch |
2010 | Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators Niebelschütz, F.; Brueckner, K.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Zeitschriftenaufsatz, Konferenzbeitrag |
2010 | Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering Sah, R.E.; Kirste, L.; Baeumler, M.; Hiesinger, P.; Cimalla, V.; Lebedev, V.; Baumann, H.; Zschau, H.-E. | Zeitschriftenaufsatz |
2010 | Search for a suitable ohmic metallization scheme to GaN/AlGaN heterostructures for sub-micron devices Kolaklieva, L.; Kakanakov, R.; Chitanov, V.; Dulgerova, P.; Cimalla, V. | Konferenzbeitrag |
2010 | SPM electrical characterization of Ti/Al - based ohmic contacts for sub-micron devices Kolaklieva, L.; Nesheva, D.; Kakanakov, R.; Bineva, I.; Cimalla, V. | Konferenzbeitrag |
2010 | Transport properties of InN Cimalla, V.; Lebedev, V.; Ambacher, O.; Polyakov, V.M.; Schwierz, F.; Niebelschütz, F.; Ecke, G.; Myers, T.H.; Schaff, W.J. | Aufsatz in Buch |
2009 | Band gap, electronic structure, and surface electron accumulation of cubic and rhombohedral In2O3 King, P.D.C.; Veal, T.D.; Fuchs, F.; Wang, C.Y.; Payne, D.J.; Bourlange, A.; Zhang, H.; Bell, G.R.; Cimalla, V.; Ambacher, O.; Egdell, R.G.; Bechstedt, F.; McConville, C.F. | Zeitschriftenaufsatz |
2009 | Carrier mass measurements in degenerate indium nitride Pettinari, G.; Polimeni, A.; Capizzi, M.; Blokland, J.H.; Christianen, P.C.M.; Maan, J.C.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2009 | Composition and interface chemistry dependence in ohmic contacts to GaN HEMT structures on the Ti/Al ratio and annealing conditions Kolaklieva, L.; Kakanakov, R.; Stefanov, P.; Cimalla, V.; Maroldt, S.; Ambacher, O.; Tonisch, K.; Niebelschütz, F. | Konferenzbeitrag, Zeitschriftenaufsatz |
2009 | Determination of the composition of In(x)Ga(1-x)N from strain measurements Morales, F.M.; Gonzales, D.; Lozano, J.G.; García, R.; Hauguth-Frank, S.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2009 | Effect of annealing on the properties of indium-tin-oxynitride films as ohmic contacts for GaN-based optoelectronic devices Himmerlich, M.; Koufaki, M.; Ecke, G.; Mauder, C.; Cimalla, V.; Schaefer, J.A.; Kondilis, A.; Pelekanos, N.T.; Modreanu, M.; Krischok, S.; Aperathitis, E. | Zeitschriftenaufsatz |
2009 | Halbleiterbauelement und Verfahren zu seiner Herstellung Lebedev, V.; Cimalla, V. | Patent |
2009 | Nanocrystalline diamond microelectromechanical resonators Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F. | Konferenzbeitrag |
2009 | Performance modification of SiC MEMS Niebelschütz, F.; Brueckner, K.; Cimalla, V.; Hein, M.A.; Pezoldt, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
2009 | Piezoelectrically actuated AlN and Nanodiamond microstructures Knöbber, F.; Sillero, E.; Röhlig, C.-C.; Williams, O.A.; Sah, R.E.; Kirste, L.; Cimalla, V.; Nebel, C.E.; Calle, F.; Lebedev, V. | Konferenzbeitrag |
2009 | Resonant piezoelectric ALGAN/GAN mems sensors in longitudinal mode operation Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Konferenzbeitrag |
2009 | Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F. | Zeitschriftenaufsatz |
2009 | Transport characteristics of indium nitride (InN) films grown by plasma assisted molecular beam epitaxy (PAMBE) Knübel, A.; Aidam, R.; Cimalla, V.; Kirste, L.; Baeumler, M.; Leancu, C.-C.; Lebedev, V.; Wallauer, J.; Walther, M.; Wagner, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
2009 | Verfahren und Sensor zum Nachweis von Sauerstoff Wang, C.; Cimalla, V.; Ambacher, O. | Patent |
2009 | Wide band gap based MEMS for harsh environment applications Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M. | Konferenzbeitrag |
2008 | (AlGaIn)N UV LEDs for integrated metal-oxide based ozone sensors Wagner, J.; Wang, C.Y.; Röhlig, C.-C.; Maier, M.; Kunzer, M.; Passow, T.; Schirmacher, W.; Pletschen, W.; Cimalla, V.; Köhler, K.; Ambacher, O. | Konferenzbeitrag |
2008 | Electric field distribution in GaN/AlGaN/GaN heterostructures with two-dimensional electron and hole gas Buchheim, C.; Goldhahn, R.; Gobsch, G.; Tonisch, K.; Cimalla, V.; Niebelschütz, F.; Ambacher, O. | Zeitschriftenaufsatz |
2008 | Electrical and optical properties of In2O3 nanoparticles prepared by MOCVD Wang, C.Y.; Cimalla, V.; Kups, T.; Ambacher, O.; Himmerlich, M.; Krischok, S. | Konferenzbeitrag |
2008 | Electronic and photoconductive properties of ultrathin InGaN photodetectors Lebedev, V.; Polyakov, V.M.; Hauguth-Frank, S.; Cimalla, V.; Wang, C.-Y.; Ecke, G.; Schwierz, F.; Schober, A.; Lozano, J.G.; Morales, F.M.; Gonzales, D.; Ambacher, O. | Zeitschriftenaufsatz |
2008 | Experimental evidence of different hydrogen donors in n-type InN Pettinari, G.; Masia, F.; Capizzi, M.; Polimeni, A.; Losurdo, M.; Bruno, G.; Kim, T.H.; Choi, S.; Brown, A.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2008 | Highly efficient THz emission from differently grown InN at 800 nm and 1060 nm excitation Matthäus, G.; Cimalla, V.; Pradarutti, B.; Riehemann, S.; Notni, G.; Lebedev, V.; Ambacher, O.; Nolte, S.; Tünnermann, A. | Zeitschriftenaufsatz |
2008 | Integration of thin-film-fracture-based nanowires into microchip fabrication Jebril, S.; Elbahri, M.; Titazu, G.; Subannajui, K.; Essa, S.; Niebelschütz, F.; Röhlig, C.-C.; Cimalla, V.; Ambacher, O.; Schmidt, B.; Kabiraj, D.; Avasti, D.; Adelung, R. | Zeitschriftenaufsatz |
2008 | Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication Niebelschütz, F.; Pezoldt, J.; Stauden, T.; Cimalla, V.; Tonisch, K.; Brueckner, K.; Hein, M.; Ambacher, O.; Schober, A. | Konferenzbeitrag |
2008 | Phase stabilization and phonon properties of single crystalline rhombohedral indium oxide Wang, C.Y.; Dai, Y.; Pezoldt, J.; Lu, B.; Kups, T.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
2008 | Piezoelectric actuation of (GaN/)AlGaN/GaN heterostructures Tonisch, K.; Buchheim, C.; Niebelschütz, F.; Schober, A.; Gobsch, G.; Cimalla, V.; Ambacher, O.; Goldhahn, R. | Zeitschriftenaufsatz |
2008 | The role of Ti/Al ratio in nanolayered ohmic contacts for GaN/AlGaN HEMTs Kolaklieva, L.; Kakanakov, R.; Cimalla, V.; Maroldt, S.; Niebelschütz, F.; Tonisch, K.; Ambacher, O. | Konferenzbeitrag |
2008 | Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Michael, S.; Dadgar, A.; Krost, A.; Cimalla, V.; Ambacher, O.; Stephan, R.; Hein, M.A. | Zeitschriftenaufsatz |
2007 | Analysis of nanostructures by means of Auger electron spectroscopy Ecke, G.; Cimalla, V.; Tonisch, K.; Lebedev, V.; Romanus, H.; Ambacher, O.; Liday, J. | Zeitschriftenaufsatz |
2007 | High efficient terahertz emission from InN surfaces Cimalla, V.; Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Tünnermann, A.; Lebedev, V.; Ambacher, O. | Zeitschriftenaufsatz |
2007 | Integration of In2O3 nanoparticle based ozone sensors with GaInN/GaN light emitting diodes Wang, C.-Y.; Cimalla, V.; Kups, T.; Röhlig, C.-C.; Stauden, T.; Ambacher, O.; Kunzer, M.; Passow, T.; Schirmacher, W.; Pletschen, W.; Köhler, K.; Wagner, J. | Zeitschriftenaufsatz |
2006 | Detailed study of differently grown InN wavers as strong THz surface emitters excited at 800 nm and 1060 nm Matthäus, G.; Pradarutti, B.; Brückner, C.; Riehemann, S.; Notni, G.; Nolte, S.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A. | Konferenzbeitrag |
2006 | InN as THz emitter excited at 1060 nm and 800 nm Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A. | Konferenzbeitrag |