| | |
|---|
| 2018 | Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators
Knapp, Marius; Hoffmann, René; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
| 2018 | Metallization design investigations for graphene as a virtually massless electrode material for 2.1 GHz solidly mounted (BAW-SMR) resonators
Knapp, Marius; Lebedev, Vadim; Cimalla, Volker; Ambacher, Oliver | Konferenzbeitrag |
| 2018 | Pulsed laser deposition of ferroelectric potassium tantalate-niobate optical waveguiding thin films
Jia, Yuechen; Winkler, Markus; Cheng, Chen; Chen, Feng; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Szabados, Jan; Breunig, Ingo; Buse, Karsten | Zeitschriftenaufsatz |
| 2018 | Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding
Gerrer, Thomas; Cimalla, Volker; Waltereit, Patrick; Müller, Stefan; Benkhelifa, Fouad; Maier, Thomas; Czap, Heiko; Ambacher, Oliver; Quay, Rüdiger | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2018 | Verfahren zum Transfer zumindest einer Dünnschicht
Cimalla, Volker; Gerrer, Thomas; Preschle, Marina; Yoshikawa, Taro | Patent |
| 2017 | Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
| 2017 | Potassium tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics
Jia, Yuechen; Winkler, Markus; Szabados, Jan; Breunig, Ingo; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Buse, Karsten | Konferenzbeitrag |
| 2017 | Potassium-tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics
Jia, Yuechen; Szabados, Jan; Winkler, Markus; Breunig, Ingo; Cimalla, Volker; Kirste, Lutz; Zukauskaite, Agne; Buse, Karsten | Konferenzbeitrag |
| 2017 | Transfer of AlGaN/GaN RF-devices onto diamond substrates via van der Waals bonding
Gerrer, Thomas; Cimalla, Volker; Waltereit, Patrick; Müller, Stefan; Benkhelifa, Fouad; Maier, Thomas; Czap, Heiko; Nebel, Christoph E.; Quay, Rüdiger | Konferenzbeitrag |
| 2017 | Wettability investigations and wet transfer enhancement of large-area CVD-graphene on aluminum nitride
Knapp, Marius; Hoffmann, René; Cimalla, Volker; Ambacher, Oliver | Zeitschriftenaufsatz |
| 2016 | Consequences of plasma oxidation and vacuum annealing on the chemical properties and electron accumulation of In2O3 surfaces
Berthold, T.; Rombach, J.; Stauden, T.; Polyakov, V.; Cimalla, V.; Krischok, S.; Bierwagen, O.; Himmerlich, M. | Zeitschriftenaufsatz |
| 2016 | Electrostatic self-assembly of diamond nanoparticles onto Al- and N-Polar sputtered aluminum nitride surfaces
Yoshikawa, Taro; Reusch, Markus; Zürbig, Verena; Cimalla, Volker; Lee, K.-H.; Kurzyp, M.; Arnault, J.-C.; Nebel, Christoph E.; Ambacher, Oliver; Lebedev, Vadim | Zeitschriftenaufsatz |
| 2016 | Interaction of indium oxide nanoparticle film surfaces with ozone, oxygen and water
Himmerlich, M.; Eisenhardt, A.; Berthold, T.; Wang, C.Y.; Cimalla, V.; Ambacher, O.; Krischok, S. | Zeitschriftenaufsatz |
| 2016 | Optimierung der Mikrostruktur und der Messparameter eines photostimulierten Ozonsensors auf der Basis von Indiumoxid
Mischo, M.
: Ambacher, O. (Referent); Cimalla, V. (Betreuer) | Dissertation |
| 2016 | The role of surface electron accumulation and bulk doping for gas-sensing explored with single-crystalline In2O3 thin films
Rombach, J.; Papadogianni, A.; Mischo, M.; Cimalla, V.; Kirste, L.; Ambacher, O.; Berthold, T.; Krischok, S.; Himmerlich, M.; Selve, S.; Bierwagen, O. | Zeitschriftenaufsatz |
| 2015 | Bias-free lateral terahertz emitters - a simulation study
Granzner, R.; Polyakov, V.M.; Cimalla, V.; Ambacher, O.; Schwierz, F. | Zeitschriftenaufsatz |
| 2015 | Changes of electronic properties of AlGaN/GaN HEMTs by surface treatment
Pletschen, W.; Linkohr, S.; Kirste, L.; Cimalla, V.; Müller, S.; Himmerlich, M.; Krischok, S.; Ambacher, O. | Konferenzbeitrag |
| 2015 | Control of drinking water by linking biosensors with physicochemical methods
Cimalla, Volker; Hugger, Stefan; Fuchs, Frank; Anzt, Johannes; Bitterling, Moritz; Yang, Nianjun; Kohl, Christina; Maucher, Tanja; Mühlemeier, Ilka; Burger-Kentischer, Anke; Trick, Iris | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Detection of different target-DNA concentrations with highly sensitive AlGaN/GaN high electron mobility transistors
Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2015 | Dynamic detection of target-DNA with AlGaN/GaN high electron mobility transistors
Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Podolska, A.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Electrical conductivity and gas-sensing properties of Mg-doped and undoped single-crystalline In2O3 thin films: Bulk vs. surface
Rombach, J.; Bierwagen, O.; Papadogianni, A.; Mischo, M.; Cimalla, V.; Berthold, T.; Krischok, S.; Himmerlich, M. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Impedance characterization of DNA-functionalization layers on AlGaN/GaN high electron mobility transistors
Espinosa, N.; Schwarz, S.U.; Cimalla, V.; Podolska, A.; Ambacher, O. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2015 | Integration of an opto-chemical detector based on group III-nitride nanowire heterostructures
Kleindienst, R.; Becker, P.; Cimalla, V.; Grewe, A.; Hille, P.; Krüger, M.; Schörmann, J.; Schwarz, U.T.; Teubert, J.; Eickhoff, M.; Sinzinger, S. | Zeitschriftenaufsatz |
| 2015 | Large area InN terahertz emitters based on the lateral photo-Dember effect
Wallauer, J.; Grumber, C.; Polyakov, V.; Iannucci, R.; Cimalla, V.; Ambacher, O.; Walther, M. | Zeitschriftenaufsatz |
| 2014 | Densification of thin aluminum oxide films by thermal treatments
Cimalla, V.; Baeumler, M.; Kirste, L.; Prescher, M.; Christian, B.; Passow, T.; Benkhelifa, F.; Bernhardt, F.; Eichapfel, G.; Himmerlich, M.; Krischok, S.; Pezoldt, J. | Zeitschriftenaufsatz |
| 2014 | Electronic nose for toxic gas detection based on photostimulated core-shell nanowires
Wongchoosuk, C.; Subannajui, K.; Wang, C.; Yang, Y.; Güder, F.; Kerdcharoen, T.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
| 2014 | Integrated opto-chemical sensor system based on group III-nitride nanowires
Kleindienst, R.; Krüger, M.; Grewe, A.; Sinzinger, S.; Holc, K.; Schätzle, J.; Steffen, A.; Cimalla, V.; Schwarz, U.T.; Becker, P.; Hille, P.; Schörmann, J.; Teubert, J.; Eickhoff, M. | Konferenzbeitrag |
| 2014 | Nano-diamond based spheres for radio frequency electromechanical resonators
Lebedev, V.; Iankov, D.; Heidrich, N.; Zürbig, V.; Wild, C.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2014 | Parameterextraktion an InAs/GaSb-Übergitterdetektoren für das langwellige Infrarot
Lemke, F.
: Ambacher, O. (Gutachter); Cimalla, V. (Gutachter); Rehm, R. (Betreuer) | Master Thesis |
| 2014 | Sips adsorption model for DNA sensing with AlGaN/GaN high electron mobility transistors
Espinosa, N.; Schwarz, S. U.; Cimalla, V.; Ambacher, O. | Konferenzbeitrag |
| 2013 | CIP (cleaning-in-place) stability of AlGaN/GaN pH sensors
Linkohr, S.; Pletschen, W.; Schwarz, S.U.; Anzt, J.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2013 | Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations
Heidrich, N.; Knöbber, F.; Polyakov, V.M.; Cimalla, V.; Pletschen, W.; Sah, R.E.; Kirste, L.; Leopold, S.; Hampl, S.; Ambacher, O.; Lebedev, V. | Zeitschriftenaufsatz |
| 2013 | Crystallographic texture of submicron thin aluminum nitride films on molybdenum electrode for suspended micro and nanosystems
Sah, R.E.; Kirste, L.; Kirmse, H.; Mildner, M.; Wilde, L.; Kopta, S.; Knöbber, F.; Krieg, M.; Cimalla, V.; Lebedev, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2013 | Micro-optical system as integration platform for III-N nanowire based opto-chemical detectors
Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Holc, K.; Schätzle, J.; Schwarz, U.; Teubert, J.; Sinzinger, S. | Konferenzbeitrag |
| 2013 | Miniaturisierte optische Integrationsplattform für III-N basierte opto-chemische Detektoren
Kleindienst, R.; Cimalla, V.; Eickhoff, M.; Grewe, A.; Holc, K.; Schätzle, J.; Schörmann, J.; Schwarz, U.T.; Teubert, J.; Sinzinger, S. | Konferenzbeitrag |
| 2013 | Piezo-actuated tunable diamond/AlN micro lenses
Zürbig, V.; Pätz, D.; Pletschen, W.; Hees, J.; Sah, R.E.; Kirste, L.; Heidrich, N.; Cimalla, V.; Nebel, C.; Ambacher, O.; Lebedev, V. | Konferenzbeitrag |
| 2013 | Seebeck ozone sensors
Mischo, M.; Bitterling, M.; Himmerlich, M.; Krischok, S.; Ambacher, O.; Cimalla, V. | Konferenzbeitrag |
| 2013 | Thermal functionalization of GaN surfaces with 1-alkenes
Schwarz, S.U.; Cimalla, V.; Eichapfel, G.; Himmerlich, M.; Krischok, S.; Ambacher, O. | Zeitschriftenaufsatz |
| 2013 | Tuning of the optical properties of In-rich In(x)Ga(1-x)N (x=0.82-0.49) alloys by light-ion irradiation at low energy
Luca, M. de; Pettinari, G.; Polimeni, A.; Capizzi, M.; Ciatto, G.; Amidani, L.; Fonda, E.; Boscherini, F.; Filippone, F.; Bonapasta, A.A.; Knübel, A.; Cimalla, V.; Ambacher, O.; Giubertoni, D.; Bersani, M. | Konferenzbeitrag |
| 2012 | An advanced fabrication method of highly ordered ZnO nanowire arrays on silicon substrates by atomic layer deposition
Subannajui, K.; Güder, F.; Danhof, J.; Menzel, A.; Yang, Y.; Kirste, L.; Wang, C.Y.; Cimalla, V.; Schwarz, U.; Zacharias, M. | Zeitschriftenaufsatz |
| 2012 | Device for converting mechanical energy into electrical energy for autonomous power supply of e.g. electronic components of electric circuit of electrical device, has moving element with membrane whose side includes concave and convex areas
Lebedev, V.; Cimalla, V. | Patent |
| 2012 | Electrostatically coupled vibration modes in unimorph complementary mircocantilevers
Lebedev, V.; Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Raynor, B.; Polyakov, V.M.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2012 | Evaluation of AlN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2012 | Evaluation on AIN material properties through vibration analysis of thin membranes
Lebedev, V.; Knöbber, F.; Heidrich, N.; Sah, R.E.; Pletschen, W.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Halbleiterbauelement mit einer orienterten Schicht und Verfahren zu seiner Herstellung
Kirste, Lutz; Cimalla, Volker; Aidam, R. | Patent |
| 2012 | Influence of plasma treatments on the properties of GaN/AlGaN/GaN HEMT structures
Linkohr, S.; Pletschen, W.; Polyakov, V. M.; Himmerlich, M.; Lorenz, P.; Krischok, S.; Kirste, L.; Müller, S.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Photo luminescent and gas-sensing properties of ZnO nanowires prepared by an ionic liquid assisted vapor transfer approach
Subannajui, K.; Wongchoosuk, C.; Ramgir, N.; Wang, C.Y.; Yang, Y.; Hartel, A.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
| 2012 | Photoluminescent and gas-sensing properties of ZnO nanowires prepared by an ionic liquid assisted vapor transfer approach
Subannajui, K.; Wongchoosuk, C.; Ramgir, N.; Wang, C.Y.; Yang, Y.; Hartel, A.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
| 2012 | Photon stimulated ozone sensor based on indium oxide nanoparticles II: Ozone monitoring in humidity and water environments
Wang, C.Y.; Bagchi, S.; Bitterling, M.; Becker, R.W.; Köhler, K.; Cimalla, V.; Ambacher, O.; Chaumette, B. | Zeitschriftenaufsatz |
| 2012 | Plasma affected 2DEG properties on GaN/AlGaN/GaN HEMTs
Linkohr, S.; Pletschen, W.; Kirste, L.; Himmerlich, M.; Lorenz, P.; Krischok, S.; Polyakov, V.M.; Müller, S.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | SEMICONDUCTOR STRUCTURAL ELEMENT AND METHOD FOR THE PRODUCTION THEREOF
Cimalla, V.; Lebedev, V. | Patent |
| 2012 | Superior functionality by design: Selective ozone sensing realized by rationally constructed high-index ZnO surfaces
Güder, F.; Yang, Y.; Menzel, A.; Wang, C.Y.; Danhof, J.; Subannajui, K.; Hartel, A.; Hiller, D.; Kozhummal, R.; Ramgir, N.; Cimalla, V.; Schwarz, U.T.; Zacharias, M. | Zeitschriftenaufsatz |
| 2012 | Surface properties of stoichiometric and defect-rich indium oxide films grown by MOCVD
Himmerlich, M.; Wang, C.Y.; Cimalla, V.; Ambacher, O.; Krischok, S. | Zeitschriftenaufsatz |
| 2011 | AlGaN/GaN sensors for direct monitoring of nerve cell response to inhibitors
Cimalla, I.; Gebinoga, M.; Schober, A.; Polyakov, V.M.; Lebedev, V.; Cimalla, V. | Aufsatz in Buch |
| 2011 | AlN based microgenerators for powering implantable sensor devices
Bludau, O.; Röhlig, C.-C.; Knöbber, F.; Kirste, L.; Sah, R.E.; Driad, R.; Pletschen, W.; Lebedev, V.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2011 | AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation
Hampl, S.; Cimalla, V.; Polster, T.; Hoffmann, M. | Konferenzbeitrag |
| 2011 | AlN-basierte mikroelektromechanische Strukturen für Implantate
Heidrich, N.; Knöbber, F.; Hampl, S.; Pletschen, W.; Sah, R. E.; Cimalla, V.; Lebedev, V.; Ambacher, O. | Konferenzbeitrag |
| 2011 | Biocompatible AlN-based piezo energy harvesters for implants
Heidrich, N.; Knöbber, F.; Sah, R.E.; Pletschen, W.; Hampl, S.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
| 2011 | DNA-sensor based on AlGaN/GaN high electron mobility transistor
Schwarz, S.U.; Linkohr, S.; Lorenz, P.; Krischok, S.; Nakamura, T.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Zeitschriftenaufsatz |
| 2011 | Dynamic characterization of thin aluminum nitride microstructures
Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Sah, R.E.; Williams, O.A.; Kirste, L.; Leopold, S.; Pätz, D.; Cimalla, V.; Ambacher, O.; Lebedev, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2011 | Electron and hole accumulation in InN/InGaN heterostructures
Lebedev, V.; Polyakov, V.M.; Knübel, A.; Aidam, R.; Kirste, L.; Cimalla, V.; Granzner, R.; Schwierz, F.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2011 | Growth mechanism and electronic properties of epitaxial In(2)O(3) films on sapphire
Wang, C.Y.; Kirste, L.; Morales, F.M.; Mánuel, J.M.; Röhlig, C.-C.; Köhler, K.; Cimalla, V.; García, R.; Ambacher, O. | Zeitschriftenaufsatz |
| 2011 | Low-temperature grown high-quality piezoelectric AIN Film for sensor application
Sah, R.E.; Bludau, O.; Röhlig, C.-C.; Kirste, L.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
| 2011 | Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Foerster, C.; Cimalla, V.; Stephan, R.; Pezoldt, J.; Stauden, T.; Ambacher, O.; Hein, M.A. | Zeitschriftenaufsatz |
| 2011 | Mikromechanischer Schalter
Lebedev, Vadim; Cimalla, Volker | Patent |
| 2011 | Oxidation behaviour of carbon monoxide at the photostimulated surface of ZnO nanowires
Wang, C.Y.; Kinzer, M.; Youn, S.K.; Ramgir, N.; Kunzer, M.; Köhler, K.; Zacharias, M.; Cimalla, V. | Zeitschriftenaufsatz |
| 2011 | Photon stimulated sensor based on indium oxide nanoparticles I: Wide-concentration-range ozone monitoring in air
Wang, C.Y.; Becker, R.W.; Passow, T.; Pletschen, W.; Köhler, K.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2011 | Sensorsystem und Verfahren zur Erfassung einer Messgröße
Wang, Chunyu; Domke, J.; Cimalla, Volker; Badeja, M.; Clad, M. | Patent |
| 2011 | Stratospheric ozone detection using a photon stimulated ozone sensor based on indium oxide nanoparticles
Wang, C.Y.; Becker, R.W.; Kappeler, O.; Cimalla, V.; Matthes, M.; Mundhenke, J. | Zeitschriftenaufsatz |
| 2010 | AlGaN/GaN based heterostructures for MEMS and NEMS applications
Cimalla, V.; Röhlig, C.-C.; Lebedev, V.; Ambacher, O.; Tonisch, K.; Niebelschütz, F.; Brueckner, K.; Hein, M.A. | Konferenzbeitrag |
| 2010 | Catalyst-free growth of ZnO nanowires based on topographical confinement and preferential chemisorption and their use for room temperature CO detection
Youn, S.K.; Ramgir, N.; Wang, C.Y.; Subannajui, K.; Cimalla, V.; Zacharias, M. | Zeitschriftenaufsatz |
| 2010 | Diamond/AlN thin films for optical applications
Knöbber, F.; Bludau, O.; Williams, O.A.; Sah, R.E.; Kirste, L.; Baeumler, M.; Leopold, S.; Pätz, D.; Nebel, C.E.; Ambacher, O.; Cimalla, V.; Lebedev, V. | Konferenzbeitrag |
| 2010 | Elastic properties of nanowires
Röhlig, C.-C.; Niebelschütz, F.; Brueckner, P.; Tonisch, K.; Ambacher, O.; Cimalla, V. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | Group III-nitride based sensors - advances towards a new generation of biosensors
Cimalla, I.; Lübbers, B.; Cimalla, V.; Gebinoga, M.; Schober, A.; Ambacher, O. | Aufsatz in Buch |
| 2010 | Impact of Al content on transport properties of two-dimensional electron gas in GaN/Al(x)Ga(1-x)N/GaN heterostructures
Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Köhler, K.; Müller, S.; Waltereit, P.; Ambacher, O. | Zeitschriftenaufsatz |
| 2010 | Impact of n-type doping on the terahertz surface emission from c-plane InN
Polyakov, V.M.; Cimalla, V.; Lebedev, V.; Schwierz, F. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | InN nanocolumns
Grandal, J.; Sánchez-García, M.A.; Calleja, E.; Lazic, S.; Gallardo, E.; Calleja, J.M.; Luna, E.; Trampert, A.; Niebelschütz, F.; Cimalla, V.; Ambacher, O. | Aufsatz in Buch |
| 2010 | Investigation of stress in AIN thin films for piezoelectric MEMS
Sah, R.E.; Kirste, Lutz; Baeumler, Martina; Hiesinger, P.; Cimalla, Volker; Lebedev, Vadim; Knöbber, F.; Bludau, O.; Röhlig, C.-C.; Baumann, H. | Konferenzbeitrag |
| 2010 | Near-UV LEDs for integrated InO-based ozone sensors
Wang, C.Y.; Cimalla, V.; Kunzer, M.; Passow, T.; Pletschen, W.; Kappeler, O.; Wagner, J.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | A novel bio-functionalization of AlGaN/GaN-ISFETs for DNA-sensors
Linkohr, S.; Schwarz, S.; Krischok, S.; Lorenz, P.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | A novel functionalization of AlGaN/GaN-pH-ISFETs for DNA-sensors
Linkohr, S.; Schwarz, S.U.; Krischok, S.; Lorenz, P.; Nakamura, T.; Polyakov, V.M.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Konferenzbeitrag |
| 2010 | Photon stimulated ozone sensing
Wang, C.Y.; Cimalla, V.; Ambacher, O.; Himmerlich, M.; Krischok, S. | Aufsatz in Buch |
| 2010 | Piezoactuated diamond MEMS for RF and optical applications
Lebedev, Vadim; Cimalla, Volker | Aufsatz in Buch |
| 2010 | Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators
Niebelschütz, F.; Brueckner, K.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering
Sah, R.E.; Kirste, L.; Baeumler, M.; Hiesinger, P.; Cimalla, V.; Lebedev, V.; Baumann, H.; Zschau, H.-E. | Zeitschriftenaufsatz |
| 2010 | Search for a suitable ohmic metallization scheme to GaN/AlGaN heterostructures for sub-micron devices
Kolaklieva, L.; Kakanakov, R.; Chitanov, V.; Dulgerova, P.; Cimalla, V. | Konferenzbeitrag |
| 2010 | SPM electrical characterization of Ti/Al - based ohmic contacts for sub-micron devices
Kolaklieva, L.; Nesheva, D.; Kakanakov, R.; Bineva, I.; Cimalla, V. | Konferenzbeitrag |
| 2010 | Transport properties of InN
Cimalla, V.; Lebedev, V.; Ambacher, O.; Polyakov, V.M.; Schwierz, F.; Niebelschütz, F.; Ecke, G.; Myers, T.H.; Schaff, W.J. | Aufsatz in Buch |
| 2009 | Band gap, electronic structure, and surface electron accumulation of cubic and rhombohedral In2O3
King, P.D.C.; Veal, T.D.; Fuchs, F.; Wang, C.Y.; Payne, D.J.; Bourlange, A.; Zhang, H.; Bell, G.R.; Cimalla, V.; Ambacher, O.; Egdell, R.G.; Bechstedt, F.; McConville, C.F. | Zeitschriftenaufsatz |
| 2009 | Carrier mass measurements in degenerate indium nitride
Pettinari, G.; Polimeni, A.; Capizzi, M.; Blokland, J.H.; Christianen, P.C.M.; Maan, J.C.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2009 | Composition and interface chemistry dependence in ohmic contacts to GaN HEMT structures on the Ti/Al ratio and annealing conditions
Kolaklieva, L.; Kakanakov, R.; Stefanov, P.; Cimalla, V.; Maroldt, S.; Ambacher, O.; Tonisch, K.; Niebelschütz, F. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2009 | Determination of the composition of In(x)Ga(1-x)N from strain measurements
Morales, F.M.; Gonzales, D.; Lozano, J.G.; García, R.; Hauguth-Frank, S.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2009 | Effect of annealing on the properties of indium-tin-oxynitride films as ohmic contacts for GaN-based optoelectronic devices
Himmerlich, M.; Koufaki, M.; Ecke, G.; Mauder, C.; Cimalla, V.; Schaefer, J.A.; Kondilis, A.; Pelekanos, N.T.; Modreanu, M.; Krischok, S.; Aperathitis, E. | Zeitschriftenaufsatz |
| 2009 | Halbleiterbauelement und Verfahren zu seiner Herstellung
Lebedev, V.; Cimalla, V. | Patent |
| 2009 | Nanocrystalline diamond microelectromechanical resonators
Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F. | Konferenzbeitrag |
| 2009 | Performance modification of SiC MEMS
Niebelschütz, F.; Brueckner, K.; Cimalla, V.; Hein, M.A.; Pezoldt, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2009 | Piezoelectrically actuated AlN and Nanodiamond microstructures
Knöbber, F.; Sillero, E.; Röhlig, C.-C.; Williams, O.A.; Sah, R.E.; Kirste, L.; Cimalla, V.; Nebel, C.E.; Calle, F.; Lebedev, V. | Konferenzbeitrag |
| 2009 | Resonant piezoelectric ALGAN/GAN mems sensors in longitudinal mode operation
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Stephan, R.; Cimalla, V.; Ambacher, O.; Hein, M.A. | Konferenzbeitrag |
| 2009 | Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures
Sillero, E.; Williams, O.A.; Lebedev, V.; Cimalla, V.; Röhlig, C.-C.; Nebel, C.E.; Calle, F. | Zeitschriftenaufsatz |
| 2009 | Transport characteristics of indium nitride (InN) films grown by plasma assisted molecular beam epitaxy (PAMBE)
Knübel, A.; Aidam, R.; Cimalla, V.; Kirste, L.; Baeumler, M.; Leancu, C.-C.; Lebedev, V.; Wallauer, J.; Walther, M.; Wagner, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2009 | Verfahren und Sensor zum Nachweis von Sauerstoff
Wang, C.; Cimalla, V.; Ambacher, O. | Patent |
| 2009 | Wide band gap based MEMS for harsh environment applications
Cimalla, V.; Lebedev, V.; Röhlig, C.-C.; Ambacher, O.; Niebelschütz, F.; Tonisch, K.; Pezoldt, J.; Brueckner, K.; Hein, M. | Konferenzbeitrag |
| 2008 | (AlGaIn)N UV LEDs for integrated metal-oxide based ozone sensors
Wagner, J.; Wang, C.Y.; Röhlig, C.-C.; Maier, M.; Kunzer, M.; Passow, T.; Schirmacher, W.; Pletschen, W.; Cimalla, V.; Köhler, K.; Ambacher, O. | Konferenzbeitrag |
| 2008 | Electric field distribution in GaN/AlGaN/GaN heterostructures with two-dimensional electron and hole gas
Buchheim, C.; Goldhahn, R.; Gobsch, G.; Tonisch, K.; Cimalla, V.; Niebelschütz, F.; Ambacher, O. | Zeitschriftenaufsatz |
| 2008 | Electrical and optical properties of In2O3 nanoparticles prepared by MOCVD
Wang, C.Y.; Cimalla, V.; Kups, T.; Ambacher, O.; Himmerlich, M.; Krischok, S. | Konferenzbeitrag |
| 2008 | Electronic and photoconductive properties of ultrathin InGaN photodetectors
Lebedev, V.; Polyakov, V.M.; Hauguth-Frank, S.; Cimalla, V.; Wang, C.-Y.; Ecke, G.; Schwierz, F.; Schober, A.; Lozano, J.G.; Morales, F.M.; Gonzales, D.; Ambacher, O. | Zeitschriftenaufsatz |
| 2008 | Experimental evidence of different hydrogen donors in n-type InN
Pettinari, G.; Masia, F.; Capizzi, M.; Polimeni, A.; Losurdo, M.; Bruno, G.; Kim, T.H.; Choi, S.; Brown, A.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2008 | Highly efficient THz emission from differently grown InN at 800 nm and 1060 nm excitation
Matthäus, G.; Cimalla, V.; Pradarutti, B.; Riehemann, S.; Notni, G.; Lebedev, V.; Ambacher, O.; Nolte, S.; Tünnermann, A. | Zeitschriftenaufsatz |
| 2008 | Integration of thin-film-fracture-based nanowires into microchip fabrication
Jebril, S.; Elbahri, M.; Titazu, G.; Subannajui, K.; Essa, S.; Niebelschütz, F.; Röhlig, C.-C.; Cimalla, V.; Ambacher, O.; Schmidt, B.; Kabiraj, D.; Avasti, D.; Adelung, R. | Zeitschriftenaufsatz |
| 2008 | Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication
Niebelschütz, F.; Pezoldt, J.; Stauden, T.; Cimalla, V.; Tonisch, K.; Brueckner, K.; Hein, M.; Ambacher, O.; Schober, A. | Konferenzbeitrag |
| 2008 | Phase stabilization and phonon properties of single crystalline rhombohedral indium oxide
Wang, C.Y.; Dai, Y.; Pezoldt, J.; Lu, B.; Kups, T.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2008 | Piezoelectric actuation of (GaN/)AlGaN/GaN heterostructures
Tonisch, K.; Buchheim, C.; Niebelschütz, F.; Schober, A.; Gobsch, G.; Cimalla, V.; Ambacher, O.; Goldhahn, R. | Zeitschriftenaufsatz |
| 2008 | The role of Ti/Al ratio in nanolayered ohmic contacts for GaN/AlGaN HEMTs
Kolaklieva, L.; Kakanakov, R.; Cimalla, V.; Maroldt, S.; Niebelschütz, F.; Tonisch, K.; Ambacher, O. | Konferenzbeitrag |
| 2008 | Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators
Brueckner, K.; Niebelschütz, F.; Tonisch, K.; Michael, S.; Dadgar, A.; Krost, A.; Cimalla, V.; Ambacher, O.; Stephan, R.; Hein, M.A. | Zeitschriftenaufsatz |
| 2007 | Analysis of nanostructures by means of Auger electron spectroscopy
Ecke, G.; Cimalla, V.; Tonisch, K.; Lebedev, V.; Romanus, H.; Ambacher, O.; Liday, J. | Zeitschriftenaufsatz |
| 2007 | High efficient terahertz emission from InN surfaces
Cimalla, V.; Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Tünnermann, A.; Lebedev, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2007 | Integration of In2O3 nanoparticle based ozone sensors with GaInN/GaN light emitting diodes
Wang, C.-Y.; Cimalla, V.; Kups, T.; Röhlig, C.-C.; Stauden, T.; Ambacher, O.; Kunzer, M.; Passow, T.; Schirmacher, W.; Pletschen, W.; Köhler, K.; Wagner, J. | Zeitschriftenaufsatz |
| 2006 | Detailed study of differently grown InN wavers as strong THz surface emitters excited at 800 nm and 1060 nm
Matthäus, G.; Pradarutti, B.; Brückner, C.; Riehemann, S.; Notni, G.; Nolte, S.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A. | Konferenzbeitrag |
| 2006 | InN as THz emitter excited at 1060 nm and 800 nm
Pradarutti, B.; Matthäus, G.; Brückner, C.; Riehemann, S.; Notni, G.; Cimalla, V.; Lebedev, V.; Ambacher, O.; Tünnermann, A. | Konferenzbeitrag |