Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Analytical determination of the complex refractive index and the incident angle of an optically isotropic substrate by ellipsometric parameters and reflectance
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Zeitschriftenaufsatz
2021Characterization of Mueller matrices in retroreflexellipsometry
Chen, Chia-Wei
Konferenzbeitrag
2021Sensitivity enhanced roll-angle sensor by means of a quarter-waveplate
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Zeitschriftenaufsatz
2020Ellipsometric inline inspection of dielectric substrates with nonplanar surfaces
Hartrumpf, Matthias; Chen, Chia-Wei; Längle, Thomas; Beyerer, Jürgen
Zeitschriftenaufsatz
2020Retroreflex ellipsometry for isotropic substrates with nonplanar surfaces
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Zeitschriftenaufsatz
2019Measurement of ellipsometric data and surface orientations by modulated circular polarized light
Chen, Chia-Wei; Hartrumpf, Matthias; Längle, Thomas; Beyerer, Jürgen
Zeitschriftenaufsatz
2019An Overview of Return-Path Ellipsometry
Chen, Chia-Wei
Konferenzbeitrag