Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Accuracy analysis of a stand-alone EUV spectrometer for the characterization of ultrathin films and nanoscale gratings
Schröder, Sophia; Bahrenberg, Lukas; Eryilmaz, Nimet Kutay; Glabisch, Sven; Danylyuk, Serhiy; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2020Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
Bahrenberg, Lukas; Danylyuk, Serhiy; Glabisch, Sven; Ghafoori, Moein; Schröder, Sophia; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Zeitschriftenaufsatz
2020Computational proximity lithography with extreme ultraviolet radiation
Deuter, Valerie; Grochowicz, Maciej; Brose, Sascha; Biller, Jan; Danylyuk, Serhiy; Taubner, Thomas; Siemion, Agnieszka; Grützmacher, Detlev; Juschkin, Larissa
Zeitschriftenaufsatz
2020Design and realization of an industrial stand-alone EUV resist qualification setup
Lüttgenau, Bernhard; Brose, Sascha; Choi, Seonghyeok; Panitzek, Dieter; Danylyuk, Serhiy; Lebert, Rainer; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2020Nanoscale grating characterization through EUV spectroscopy aided by machine learning techniques
Bahrenberg, Lukas; Glabisch, Sven; Danylyuk, Serhiy; Ghafoori, Moein; Schröder, Sophia; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2020Novel high-contrast phase-shifting masks for EUV interference lithography
Lüttgenau, Bernhard; Brose, Sascha; Danylyuk, Serhiy; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2019EUV-LET 2.0: A compact exposure tool for industrial research at a wavelength of 13.5nm
Brose, Sascha; Danylyuk, Serhiy; Bahrenberg, Lukas; Lebert, Rainer; Stollenwerk, Jochen; Loosen, Peter; Juschkin, Larissa
Konferenzbeitrag
2019Industrial photoresist development with the EUV laboratory exposure tool. Mask fabrication, sensitivity and contrast
Brose, Sascha; Danylyuk, Serhiy; Grüneberger, Franziska; Gerngroß, Maik; Stollenwerk, Jochen; Schirmer, Matthias; Loosen, Peter
Konferenzbeitrag
2019Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces
Bahrenberg, Lukas; Glabisch, Sven; Ghafoori, Moein; Brose, Sascha; Danylyuk, Serhiy; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag
2019Spectroscopic reflectometry in the extreme ultraviolet for critical dimension metrology
Bahrenberg, Lukas; Danylyuk, Serhiy; Michels, Robert; Glabisch, Sven; Ghafoori, Moein; Brose, Sascha; Stollenwerk, Jochen; Loosen, Peter
Konferenzbeitrag