Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Coherent Diffractive Imaging with a Laboratory-Scale, Gas-Discharge Plasma Extreme Ultraviolet Light Source
Bußmann, J.; Odstrcil, M.; Bresenitz, R.; Rudolf, D.; Miao, J.; Brocklesby, W.S.; Juschkin, L.
Konferenzbeitrag
2016Erratum. Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source: Publisher’s note
Baksh, P.D.; Odstrcil, M.; Kim, H.-S.; Boden, S.A.; Frey, J.G.; Brocklesby, W.S.
Zeitschriftenaufsatz
2016High resolution, wide field of view, ptychographic imaging of a biological sample using a high harmonic generation source
Baksh, P.; Odstrcil, M.; Kim, H.; Boden, S.; Card, R.; Bailey, J.; Deinhardt, K.; Chad, J.; Brocklesby, W.S.; Frey, J.G.
Konferenzbeitrag
2016Lensless proximity EUV lithography with a Xenon gas discharge plasma radiation
Kim, H.; Danylyuk, S.; Brose, S.; Loosen, P.; Bergmann, K.; Brocklesby, W.S.; Juschkin, L.
Konferenzbeitrag
2016Lloyd's mirror interference lithography with EUV radiation from a high-harmonic source
Kim, H.; Baksh, P.; Odstrcil, M.; Miszczak, M.; Frey, J.G.; Juschkin, L.; Brocklesby, W.S.
Zeitschriftenaufsatz
2016Restorative self-image of rough-line grids
Kim, H.; Li, W.; Marconi, M.C.; Brocklesby, W.S.; Juschkin, L.
Zeitschriftenaufsatz
2016Single exposure imaging of talbot carpets and resolution characterization of detectors for micro- and nano-patterns
Kim, H.; Danylyuk, S.; Brocklesby, W.S.; Juschkin, L.
Zeitschriftenaufsatz
2016Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source
Baksh, P.D.; Odstrcil, M.; Kim, H.-S.; Boden, S.A.; Frey, J.G.; Brocklesby, W.S.
Zeitschriftenaufsatz
2015Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light
Bußmann, J.; Odstrčil, M.; Bresenitz, R.; Rudolf, D.; Miao, J.; Brocklesby, W.S.; Grützmacher, D.; Juschkin, L.
Konferenzbeitrag
2015Optical properties of 2D fractional Talbot patterns under coherent EUV illumination
Kim, H.; Li, W.; Danylyuk, S.; Brocklesby, W.S.; Marconi, M.C.; Juschkin, L.
Zeitschriftenaufsatz
2015Ptychographic imaging with a compact gas–discharge plasma extreme ultraviolet light source
Odstrcil, M.; Bussmann, J.; Rudolf, D.; Bresenitz, R.; Miao, J.; Brocklesby, W.S.; Juschkin, L.
Zeitschriftenaufsatz
2015Ultra-broadband ptychography with self-consistent coherence estimation from a high harmonic source
Odstrcil, M.; Baksh, P.; Kim, H.; Boden, S.A.; Brocklesby, W.S.; Frey, J.G.
Konferenzbeitrag
2014Fractional Talbot lithography with extreme ultraviolet light
Kim, H.; Li, W.; Danylyuk, S.; Brocklesby, W.S.; Marconi, M.C.; Juschkin, L.
Zeitschriftenaufsatz