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| 2010 | Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L. | Zeitschriftenaufsatz |
| 2009 | Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2009 | UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale
Schmitt, H.; Amon, B.; Beuer, S.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2008 | Electrical AFM techniques for the advanced characterization of materials in semiconductor technology
Yanev, V.; Rommel, M.; Spoldi, G.; Beuer, S.; Amon, B.; Petersen, S.; Lugstein, A.; Steiger, A.; Bauer, A.J.; Ryssel, H. | Poster |
| 2008 | Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H. | Poster |
| 2008 | Recent improvements in the integration of field emitters into scanning probe microscopy sensors
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2008 | SSRM characterisation of FIB induced damage in silicon
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2007 | Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2007 | Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H. | Poster |
| 2007 | High throughput manufacturing process of probes for sub-50nm scanning thermal microscopy
Richter, C.; Engl, W.; Weinzierl, P.; Sulzbach, T.; Beuer, S.; Petersen, S.; Stockmeyer, J.; Rommel, M. | Poster |
| 2007 | Recent improvements in the integration of field emitters into scanning probe microscopy sensors
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H. | Poster |
| 2007 | Verfahren zur Erzeugung von Submikrometer-Strukturen an einer ausgepraegten Topographie
Lehrer, C.; Beuer, S.; Engl, W.; Richter, C.; Sulzbach, T. | Patent |
| 2006 | Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H. | Poster |
| 2006 | Active Fuse
Berberich, S.E.; März, M.; Bauer, A.J.; Beuer, S.; Ryssel, H. | Konferenzbeitrag |