Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Agiles Sprintlernen - ein Konzept für dezentrales betriebliches Lernen
Jungclaus, Joana; Korge, Gabriele; Arndt, Petra; Bauer, Agnes
Zeitschriftenaufsatz
2019Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Zeitschriftenaufsatz
2019Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Konferenzbeitrag
2019Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar; Chen, Ximing; Zhao, Yanli; Li, Chengzhan; Dai, Xiaoping
Konferenzbeitrag
2019Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Konferenzbeitrag
2019Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors
Schlichting, H.; Sledziewski, T.; Bauer, A.J.; Erlbacher, T.
Konferenzbeitrag
2019Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Konferenzbeitrag
2019Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Zeitschriftenaufsatz
2019First Experimental Test on Bipolar Mode Field Effect Transistor Prototype in 4H-SiC. A Proof of Concept
Benedetto, L. di; Licciardo, G.D.; Huerner, A.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Konferenzbeitrag
2019Improving 5V Digital 4H-SiC CMOS ICs for Operating at 400°C Using PMOS Channel Implantation
Albrecht, M.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2019On the Origin of Charge Compensation in Aluminum-Implanted n-Type 4H-SiC by Analysis of Hall Effect Measurements
Weisse, Julietta; Hauck, Martin; Sledziewski, Tomasz; Krieger, Michael; Bauer, Anton J.; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Konferenzbeitrag
2019Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures
Benedetto, L. di; Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Frey, L.
Konferenzbeitrag
2019Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Vortrag
2019Profiling antimicrobial peptides from the medical maggot Lucilia sericata as potential antibiotics for MDR Gram-negative bacteria
Hirsch, R.; Wiesner, J.; Marker, A.; Pfeifer, Y.; Bauer, A.; Hammann, P.E.; Vilcinskas, A.
Zeitschriftenaufsatz
2019Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations
Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, Anton J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu
Konferenzbeitrag
2019Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Konferenzbeitrag
2019Über das Smartphone Wissen und Unterstützung für pflegende Angehörige bereitstellen
Rutz, Maria; Gerlach, Mario; Schmeer, Regina; Gaugisch, Petra; Bauer, Alexander; Wolff, Dominik; Behrends, Marianne; Kupka, Thomas; Raudies, Stephanie; Meyenburg-Altwarg, Iris; Dierks, Marie-Luise
Zeitschriftenaufsatz
2019Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Zeitschriftenaufsatz
2018Agiles Sprintlernen
Korge, Gabriele; Jungclaus, Joana; Bauer, Agnes
Zeitschriftenaufsatz
2018Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Konferenzbeitrag
2018Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2018Cationic polyacrylamide copolymers (PAMs): Environmental half life determination in sludge‑treated soil
Hennecke, Dieter; Bauer, Angela; Herrchen, Monika; Wischerhoff, Erik; Gores, Friedhelm
Zeitschriftenaufsatz
2018Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
2018Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
2018Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
2018Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.
Konferenzbeitrag
2018Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Aufsatz in Buch
2018Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Zeitschriftenaufsatz
2018Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Konferenzbeitrag
2018The influence of investment expenditures on the development of fast charging infrastructure
Horn, D.; Bauer, A.; Schmidt, A.; Udovenko, O.
Konferenzbeitrag
2018Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Konferenzbeitrag
2018Rollo aus einem Flächenmaterial mit Sandwich-Struktur
Bauer, Annette; Becker, Katharina; Bernaschek, Andreas; Borges, Ralf; Dreyer, Christian
Patent
2018Total Synthesis and Structural Revision of the Antibiotic Tetrapeptide GE81112A
Jürjens, G.; Schuler, S.M.M.; Kurz, M.; Petit, S.; Couturier, C.; Jeannot, F.; Nguyen, F.; Wende, R.C.; Hammann, P.E.; Wilson, D.N.; Bacqué, E.; Pöverlein, C.; Bauer, A.
Zeitschriftenaufsatz
20174.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Konferenzbeitrag
2017Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2017Development of sensor integration concept for mass production processes
Rost, F.; Arnold, B.; Decker, R.; Bauer, A.; Tsapkolenko, A.; Rzepka, S.; Mehner, J.; Kroll, L.
Konferenzbeitrag
2017Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Konferenzbeitrag
2017Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2017Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2017Implementation of new discovery pipelines in industry to access novel lead structures for antibiotics development
Glaeser, J.; Zubeil, F.; Toti, L.; Bauer, A.; Vilcinskas, A.; Hammann, P.
Abstract
2017Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2017Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
2017Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2017Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Konferenzbeitrag
2017Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Konferenzbeitrag
2017Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Konferenzbeitrag
2017Svetamycins A-G, unusual piperazic acid-containing peptides from Streptomyces sp.
Dardić, D.; Lauro, G.; Bifulco, G.; Laboudie, P.; Sakhaii, P.; Bauer, A.; Vilcinskas, A.; Hammann, P.E.; Plaza, A.
Zeitschriftenaufsatz
20164.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2016Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Konferenzbeitrag
2016Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Zeitschriftenaufsatz
2016Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2016Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2016A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Zeitschriftenaufsatz
2016Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Zeitschriftenaufsatz
2016Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Zeitschriftenaufsatz
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2016Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2016Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Konferenzbeitrag
2016Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Konferenzbeitrag
2016Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Poster
2015Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Konferenzbeitrag
2015Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices
Beltran, A.M.; Duguay, S.; Strenger, C.; Bauer, A.J.; Cristiano, F.; Schamm-Chardon, S.
Zeitschriftenaufsatz
2015Classification and key feature extraction for equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton
Vortrag
2015Comprehensive study of the electron scattering mechanisms in 4H-SiC MOSFETs
Uhnevionak, Viktroyia; Burenkov, Alexander; Strenger, Christian; Ortiz, Guillermo; Bedel-Pereira, Elena; Mortet, Vincent; Cristiano, Fuccio; Bauer, Anton J.; Pichler, Peter
Zeitschriftenaufsatz
2015High-voltage monolithic 3D capacitors based on through-silicon-via technology
Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar
Poster
2015Impact of acceptor concentration on electrical properties and density of interface states of 4H-SiC n-metal-oxide-semiconductor field effect transistors studied by Hall effect
Ortiz, Guillermo; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena; Mortet, Vincent
Zeitschriftenaufsatz
2015Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2015Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Zeitschriftenaufsatz
2015Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.
Konferenzbeitrag
2015Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Zeitschriftenaufsatz
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Vortrag
2015Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Konferenzbeitrag
2015Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Konferenzbeitrag
2015Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2015Semiconductor equipment assessment - an enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Konferenzbeitrag
2015Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Zeitschriftenaufsatz
2015Tailoring the electrical properties of HfO2 MOS-devices by aluminum doping
Paskaleva, Albena; Rommel, Mathias; Hutzler, Andreas; Spassov, Dencho; Bauer, Anton J.
Zeitschriftenaufsatz
2015Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability
Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2015Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices
Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.
Konferenzbeitrag
2014Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2014Energetic evaluation of partly or fully automated assembly processes with regard to ergonomics
Böhme, Jeannette; Bauer, Anna; Todtermuschke, Marcel
Konferenzbeitrag
2014Experimental analysis of bipolar SiC-devices for future energy distribution systems
Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2014Hall factor calculation for the characterization of transport properties in n-channel 4H-SiC MOSFETs
Uhnevionak, U.; Burenkov, A.; Strenger, C.; Mortet, V.; Bedel-Peireira, E.; Cristiano, F.; Bauer, A.J.; Pichler, Peter
Konferenzbeitrag
2014High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.
Konferenzbeitrag, Zeitschriftenaufsatz
2014Impact of fabrication process on electrical properties and on interfacial density of states in 4H-SiC n-MOSFETs studied by hall effect
Ortiz, Guillermo; Mortet, Vincent; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena
Konferenzbeitrag
2014Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2014Investigation of trenched and high temperature annealed 4H-SiC
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
Vortrag
2014Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Vortrag
2014Methodology for creation a reference trajectory for energetic comparability of industrial robots in body shop
Todtermuschke, Marcel; Findeisen, Mathias; Bauer, Anna
Zeitschriftenaufsatz, Konferenzbeitrag
2014Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hušeková, Krístina; Dobročka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong
Zeitschriftenaufsatz
2014NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
Vortrag
2014NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
Vortrag
2014Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Zeitschriftenaufsatz
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
Poster
2014Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdman
Poster
2014Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Konferenzbeitrag
2014Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
Poster
2014Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2014Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2014Thickness mapping of high-k dielectrics at the nanoscale
Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike
Zeitschriftenaufsatz, Konferenzbeitrag
2013Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
Vortrag
2013Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2013Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.
Zeitschriftenaufsatz
2013Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2013Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2013Correlation of interface characteristics to electron mobility in channel-implanted 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Krieger, M.; Ryssel, H.
Konferenzbeitrag
2013Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz, Konferenzbeitrag
2013Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Zeitschriftenaufsatz
2013Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
2013Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.
Zeitschriftenaufsatz
2013Hall effect characterization of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.F.; Cristiano, F.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.
Konferenzbeitrag
2013Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2013Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp
Zeitschriftenaufsatz
2013Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.
Zeitschriftenaufsatz
2013Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
Vortrag
2013On the temperature dependence of the hall factor in n-channel 4H-SiC MOSFETs
Uhnevionak, V.; Burenkov, A.; Strenger, C.; Bauer, A.J.; Pichler, P.
Konferenzbeitrag
2013Optimierungsverfahren für die ressourceneffiziente Planung von Montageanlagen
Bauer, Anna
Diplomarbeit
2013Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
Poster
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
2013Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
Poster
2013Verification of near-interface traps models by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Konferenzbeitrag
20124H-SiC MOSFETs with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2012Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Konferenzbeitrag
2012Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Vortrag
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Zeitschriftenaufsatz
2012Comparative study of electrical and microstructural properties of 4H-SiC MOSFETs
Strenger, C.; Häublein, V.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Bedel-Pereira, E.; Lefebvre, M.; Cristiano, F.
Konferenzbeitrag
2012Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
Poster
2012Electrical characterization of nanostructured p-silicon electrodes for bioimpedance measurements on single cell level
Pliquett, Uwe; Westenthanner, Maximilian; Rommel, Mathias; Bauer, Anton J.; Beckmann, Dieter
Konferenzbeitrag
2012Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster
2012Fabrication and application of shielded probes for conductive AFM measurements
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Poster
2012Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2012Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, Tobias; Hürner A.; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
2012Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
2012Hall effect characterizations of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Cristiano, F.; Bauer, A.
Poster
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Konferenzbeitrag
2012Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Nano-analytical and electrical characterization of 4H-SiC MOSFETs
Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Lefebvre, M.; Bedel-Pereira, E.; Cristiano, F.; Strenger, C.; Häublein, V.; Bauer, A.J.
Konferenzbeitrag
2012Nanoscale characterization of TiO2 films grown by atomic layer deposition
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
Poster
2012Novel organic polymer for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Ohmic and rectifying contacts on bulk AlN for radiation detector applications
Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz, Konferenzbeitrag
2012Plasma-assisted atomic layer deposition of alumina at room temperature
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Poster
2012Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
Daves, W.; Kraus, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2012TiO2-based metal-insulator-metal structures for future DRAM storage capacitors
Fröhlich, K.; Hudec, B.; Tapajna, M.; Hueková, K.; Rosova, A.; Eliá, P.; Aarik, J.; Rammula, R.; Kasikov, A.; Arroval, T.; Aarik, L.; Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.
Konferenzbeitrag
2012Verification of near-interface traps by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Vortrag
20114H-SiC n-MOSFET logic circuits for high temperature operation
Le-Huu, M.; Grieb, M.; Schrey, F.F.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2011Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications
Daves, W.; Krauss, A.; Behnel, N.; Häublein, V.; Bauer, A.; Frey, L.
Zeitschriftenaufsatz
2011Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Comparative study on metallization and passivation materials for high temperature sensor applications
Daves, W.; Krauss, A.; Le-Huu, M.; Kronmüller, S.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2011A conceptual framework for automatic situation assessment
Fischer, Yvonne; Bauer, Alexander; Beyerer, Jürgen
Konferenzbeitrag
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, K.; Rommel, M.; Yanev, V.; Bauer, A.J.; Frey, L.
Poster
2011Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2011Dielectric layers suitable for high voltage integrated trench capacitors
Dorp, J. vom; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Effect of increased oxide hole trap density due to nitrogen incorporation at the SiO2/SiC interface on F-N current degradation
Strenger, C.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2011Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2011Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2011Experiments and simulation of the diffusion and activation of the n-Type dopants P, As, and Sb implanted into germanium
Koffel, S.; Kaiser, R.J.; Bauer, A.J.; Amon, B.; Pichler, P.; Lorenz, J.; Frey, L.; Scheiblin, P.; Mazzocchi, V.; Barnes, J.-P.; Claverie, A.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Gate oxide reliability at the nano-scale evaluated by combining cAFM and CVS
Erlbacher, T.; Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Germanium substrate loss during thermal processing
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz, Konferenzbeitrag
2011High pressure oxidation of 4H-SiC in nitric acid vapor
Kalai Selvi, K.; Sreenidhi, T.; Dasgupta, N.; Ryssel, H.; Bauer, A.
Zeitschriftenaufsatz
2011A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Murakami, M.; Rommel, M.; Yanev, V.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2011Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
Paskaleva, A.; Lemberger, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2011Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2011Investigation of the reliability of 4H-SiC MOS devices for high temperature applications
Le-Huu, M.; Schmitt, H.; Noll, S.; Grieb, M.; Schrey, F.F.; Bauer, A.J.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
2011Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Poster
2011Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2011Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Konferenzbeitrag
2011Novel polymers for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Poster
2011A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.
Zeitschriftenaufsatz
2011Oberflächenstrukturieren von metallischen Werkzeugeinsätzen: innovative Designoberflächen durch Laserumschmelzen
Bauer, A.
Zeitschriftenaufsatz
2011Object-event graph matching for complex activity recognition
Bauer, Alexander; Fischer, Yvonne
Konferenzbeitrag
2011Reliability of nitrided gate oxides for N- and P-type 4H-SiC(0001) metal-oxide-semiconductor devices
Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.
Zeitschriftenaufsatz
2011Run-time security traceability for evolving systems
Bauer, A.; Jürjens, J.; Yu, Y.
Zeitschriftenaufsatz
2011Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2011Task-oriented sensor management for wide-area surveillance
Fischer, Yvonne; Geisler, Jürgen; Bauer, Alexander
Konferenzbeitrag
2011Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Paskaleva, A.; Lemberger, M.; Atanassova, E.; Bauer, A.J.
Zeitschriftenaufsatz, Konferenzbeitrag
2011UV-enhanced substrate conformal imprint lithography using an epoxy based polymer
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.
Poster
2010Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
Hinz, J.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2010Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Comparison of the threshold-voltage stability of SiC MOSFETs with thermally grown and deposited gate oxides
Grieb, M.; Noborio, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Kimoto, T.; Ryssel, H.
Konferenzbeitrag
2010Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2010Context-aware retrieval of learning units
Mareth, N.; Streicher, A.; Bauer, A.; Roller, W.
Konferenzbeitrag
2010Dealing with uncertain feature assessments in interactive object recognition
Bauer, A.; Jürgens, V.; Angele, S.
Konferenzbeitrag
2010Detection and electrical characterization of defects at the SiO2/4H-SiC interface
Krieger, M.; Beljakow, S.; Zippelius, B.; Afanas´ev, V.V.; Bauer, A.J.; Nanen, Y.; Kimoto, T.; Pensl, G.
Konferenzbeitrag
2010Direct imprinting, post processing, and characterization of functional UV-curing materials
Schmitt, H.; Kett, F.; Fader, R.; Rommel, M.; Bauer, A.J.; Hornung, M.; Frey, L.
Poster
2010Effective work function tuning in high-kappa dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
2010Electrical and topographical characterization of aluminum implanted layers in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Aufsatz in Buch
2010Electrical characterization and reliability of nitrided-gate insulators for N- and P-type 4H-SiC MIS devices
Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.
Konferenzbeitrag
2010Electrical scanning probe microscopy techniques for the detailed characterization of high-k dielectric layers
Rommel, M.; Yanev, V.; Paskaleva, A.; Erlbacher, T.; Lemberger, M.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2010Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
Hinz, J.; Bauer, A.J.; Thiede, T.; Fischer, R.A.; Frey, L.
Zeitschriftenaufsatz
2010Exploiting context for assisted aerial image interpretation
Bauer, A.; Herschelmann, O.
Konferenzbeitrag
2010Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Full wafer microlens replication by UV imprint lithography
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Völkel, R.; Hornung, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2010Honeycomb voids due to ion implantation in germanium
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Claverie, A.; Benassayag, G.; Scheiblin, P.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminum implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Poster
2010Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.D.; Ebm, C.; Platzgummer, E.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Integrierbare Bauelemente zur Erhöhung der Betriebssicherheit elektronischer Systemkomponenten im Automobil
Dorp, J. vom; Erlbacher, T.; Lorentz, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2010Lanthanoid implantation for effective work function control in NMOS high-k/metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2010Lossless average inductor current sensor for CMOS integrated DC-DC converters operating at high frequencies
Lorentz, V.R.H.; Berberich, S.E.; März, M.; Bauer, A.J.; Ryssel, H.; Poure, P.; Braun, F.
Zeitschriftenaufsatz
2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Modeling of the effective work function instability in metal/high-kappa dielectric stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010NMOS logic circuits using 4H-SiC MOSFETs for high temperature applications
Le-Huu, M.; Schrey, F.F.; Grieb, M.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
2010Object-oriented sensor data fusion for wide maritime surveillance
Fischer, Y.; Bauer, A.
Konferenzbeitrag
2010Privacy-aware object representation for surveillance systems
Vagts, H.; Bauer, A.
Konferenzbeitrag
2010Probabilistic scene models for image interpretation
Bauer, A.
Konferenzbeitrag
2010Reduced on resistance in LDMOS devices by integrating trench gates into planar technology
Erlbacher, T.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2010Runtime verification of cryptographic protocols
Bauer, A.; Jürjens, J.
Zeitschriftenaufsatz
2010Silicon carbide and related materials 2009
: Bauer, A.J.; Friedrichs, P.; Krieger, M.; Pensl, G.; Rupp, R.; Seyller, T.
Tagungsband
2010Task-oriented situation recognition
Bauer, A.; Fischer, Y.
Konferenzbeitrag
2010Trainingsmaßnahme "Führungskraft als Lerncoach"
Bauer, Agnes; Hofmann, Josephine; Reiners, Dorothee
Buch
2010Trainingsmaßnahme "selbst ständig lernen mit META-LL"
Bauer, Agnes; Hofmann, Josephine; Reiners, Dorothee
Buch
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Poster
2010Trench gate integration into planar technology for reduced on-resistance in LDMOS devices
Erlbacher, T.; Rattmann, G.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2010Wettbewerbsfähigkeit durch Lernen
: Bauer, Agnes; Korge, Axel; Korge, Gabriele; Reiners, Dorothee
Buch
2009Advanced high-performance liquid chromatography method for highly polar nitroaromatic compounds in ground water samples from ammunition waste sites
Preiss, A.; Bauer, A.; Berstermann, H.-M.; Gerling, S.; Haas, R.; Joos, A.; Lehmann, A.; Schmalz, L.; Steinbach, K.
Zeitschriftenaufsatz
2009Analysis of the DC-arc behavior of a novel 3D-active fuse
Dorp, J. vom; Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Assisted interpretation of infrastructure facilities from aerial imagery
Bauer, A.
Konferenzbeitrag
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2009Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale
Yanev, V.; Erlbacher, T.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy
Weinreich, W.; Wilde, L.; Kücher, P.; Lemberger, M.; Yanev, V.; Rommel, M.; Bauer, A.J.; Erben, E.; Heitmann, J.; Schröder, U.; Oberbeck, L.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Decision support to facilitate cost-optimal response in time- and safety-critical situations
Ott, Jonathan; Hild, Jutta; Bauer, Alexander
Konferenzbeitrag
2009Deposition of niobium nitride thin films from Tert-Butylamido-Tris-(Diethylamido)-Niobium by a modified industrial MOCVD reactor
Thiede, T.B.; Parala, H.; Reuter, K.; Passing, G.; Kirchmeyer, S.; Hinz, J.; Lemberger, M.; Bauer, A.J.; Barreca, D.; Gasparotto, A.; Fischer, R.A.
Zeitschriftenaufsatz
2009Effective work function engineering by lanthanide ion implantation of metal-oxide semiconductor gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Electrical characterization of MOS structures with deposited oxides annealed in N2O or NO
Grieb, M.; Noborio, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Kimoto, T.; Ryssel, H.
Konferenzbeitrag
2009Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2008
: Bauer, A.; Flock, S.
Jahresbericht
2009Full wafer microlens replication by UV imprint lithography
Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Bich, A.; Eisner, M.; Voelkel, R.; Hornung, M.
Poster
2009Impact of interface variations on J-V and C-V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films
Weinreich, W.; Reiche, R.; Lemberger, M.; Jegert, G.; Müller, J.; Wilde, L.; Teichert, S.; Heitmann, J.; Erben, E.; Oberbeck, L.; Schröder, U.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.; Ebm, C.; Platzgummer, E.; Bauer, A.; Frey, L.
Poster, Konferenzbeitrag
2009Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers
Weinreich, W.; Ignatova, V.A.; Wilde, L.; Teichert, S.; Lemberger, M.; Bauer, A.J.; Reiche, R.; Erben, E.; Heitmann, J.; Oberbeck, L.; Schröder, U.
Zeitschriftenaufsatz
2009Influence of the amorphous/crystalline phase of Zr1-xAlxO2 high-k layers on the capacitance performance of metal insulator metal stacks
Pakaleva, A.; Lemberger, M.; Bauer, A.J.; Weinreich, W.; Heitmann, J.; Erben, E.; Schröder, U.; Oberbeck, L.
Zeitschriftenaufsatz
2009Influence of the oxidation temperature and atmosphere on the reliability of thick gate oxides on the 4H-SiC C(000-1) face
Grieb, M.; Peters, D.; Bauer, A.J.; Friedrichs, P.; Ryssel, H.
Konferenzbeitrag
2009Lanthanum implantation for threshold voltage control in metal/high-k devices
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Light-load efficiency increase in high-frequency integrated DC–DC converters by parallel dynamic width controlling
Lorentz, V.; Berberich, S.; März, M.; Bauer, A.; Ryssel, H.; Poure, P.; Braun, F.
Zeitschriftenaufsatz
2009Object-oriented world model for surveillance systems
Bauer, A.; Emter, T.; Vagts, H.; Beyerer, J.
Konferenzbeitrag
2009Privacy enforcement in surveillance systems
Vagts, H.; Bauer, A.; Emter, T.; Beyerer, J.
Konferenzbeitrag
2009Probabilistic reasoning on object occurrence in complex scenes
Bauer, A.
Konferenzbeitrag
2009Properties of TaN thin films produced using PVD linear dynamic deposition technique
Kozlowska, M.; Oechsner, R.; Pfeffer, M.; Bauer, A.J.; Meissner, E.; Pfitzner, L.; Ryssel, H.; Maass, W.; Langer, J.; Ocker, B.; Schmidbauer, S.; Gonchond, J.-P.
Zeitschriftenaufsatz, Konferenzbeitrag
2009Search for future high-k dielectrics, boundary conditions and examples
Bauer, A.J.; Lemberger, M.; Erlbacher, T.; Weinreich, W.
Konferenzbeitrag
2009Silicon based trench hole power capacitor
Berberich, S.E.; Dorp, J. vom; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2009Suppression of parasitic electron injection in SONOS-type memory cells using high-k capping layers
Erlbacher, T.; Graf, T.; DasGupta, N.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2009UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale
Schmitt, H.; Amon, B.; Beuer, S.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2008Custom-specific UV nanoimprint templates and life-time of antisticking layers
Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2008DC-arc behavior of a novel active fuse
Dorp, J. vom; Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2008Decision support for object recognition from multi-sensor data
Bauer, A.; Geisler, J.
Konferenzbeitrag
2008Detailed carrier lifetime analysis of iron-contaminated boron-doped silicon by comparison of simulation and measurement
Rommel, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2008Electrical AFM techniques for the advanced characterization of materials in semiconductor technology
Yanev, V.; Rommel, M.; Spoldi, G.; Beuer, S.; Amon, B.; Petersen, S.; Lugstein, A.; Steiger, A.; Bauer, A.J.; Ryssel, H.
Poster
2008Electrical and topographical characterization of aluminum implanted layers in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2008Evaluation of MOCVD grown niobium nitride films as gate electrode for advanced CMOS technology
Thiede, T.; Parala, H.; Reuter, K.; Passing, G.; Kirchmeyer, S.; Hinz, J.; Lemberger, M.; Bauer, A.J.; Fischer, R.A.
Konferenzbeitrag
2008Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Poster
2008Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2007
: Bauer, A.; Flock, S.
Jahresbericht
2008HfSiO/SiO2- and SiO2/HfSiO/SiO2-gate stacks for non-volatile memories
Erlbacher, T.; Jank, M.P.M.; Lemberger, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2008High-k: Latest developments and perspectives
Bauer, A.J.; Lemberger, M.; Erlbacher, T.; Weinreich, W.
Aufsatz in Buch
2008Hightech-Materialien für die Elektronik von morgen
Jank, M.P.; Bauer, A.J.; Fischer, B.; Slama, A.; Potinecke, T.
Aufsatz in Buch
2008Improved insight in charge trapping of high-k ZrO2/SiO2 stacks by use of tunneling atomic force microscopy
Paskaleva, A.; Yanev, V.; Rommel, M.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
2008Morphological skin ageing criteria by multiphoton laser scanning tomography
Koehler, M.J.; Hahn, S.; Preller, A.; Elsner, P.; Ziemer, M.; Bauer, A.; König, K.; Bückle, R.; Fluhr, J.W.; Kaatz, M.
Zeitschriftenaufsatz
2008N.E.S.T. - Network Enabled Surveillance and Tracking - Towards next generation surveillance systems
Bauer, A.; Eckel, S.; Emter, T.; Laubenheimer, A.; Monari, E.; Moßgraber, J.; Reinert, F.
Konferenzbeitrag
2008Recent improvements in the integration of field emitters into scanning probe microscopy sensors
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2008A semantic approach to the efficient integration of interactive and automatic target recognition systems for the analysis of complex infrastructure from aerial imagery
Bauer, A.; Peinsipp-Byma, E.
Konferenzbeitrag
2008SSRM characterisation of FIB induced damage in silicon
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2008Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
Yanev, V.; Rommel, M.; Lemberger, M.; Petersen, S.; Amon, B.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Paskalev, A.; Weinreich, W.; Fachmann, C.; Heitmann, J.; Schroeder, U.
Zeitschriftenaufsatz
2008UV nanoimprint lithography process optimization for electron device manufacturing on nanosized scale
Schmitt, H.; Amon, B.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
2007Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2007Chemical vapor deposition of tantalum nitride films for metal gate application using TBTDET and novel single-source MOCVD precursors
Lemberger, M.; Baunemann, A.; Bauer, A.J.
Zeitschriftenaufsatz
2007Custom-specific UV nanoimprint templates and life-time of antisticking layers
Schmitt, H.; Zeidler, M.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
2007Detailed photocurrent analysis of iron contaminated boron doped silicon by comparison of simulation and measurement
Rommel, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2007Electrical characterization of low dose focused ion beam induced damage in silicon by scanning spreading resistance microscopy
Beuer, S.; Yanev, V.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
2007Fate of extrahepatic human stem and precursor cells after transplantation into mouse livers
Brulport, M.; Schormann, W.; Bauer, A.; Hermes, M.; Elsner, C.; Hammersen, F.J.; Beerheide, W.; Spitkovsky, D.; Härtig, W.; Nussler, A.; Horn, L.C.; Edelmann, J.; Pelz-Ackermann, O.; Petersen, J.; Kamprad, M.; Mach, M. von; Lupp, A.; Zulewski, H.; Hengstler, J.G.
Zeitschriftenaufsatz
2007Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2006
: Bauer, A.; Flock, S.
Jahresbericht
2007Hafnium silicate as control oxide in non-volatile memories
Erlbacher, T.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2007High temperature implantation of aluminum in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2007High voltage 3D-capacitor
Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2007MOCVD of hafnium silicate films obtained from a single-source precursor on silicon and germanium for gate-dielectric applications
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Frey, L.; Ryssel, H.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.
Zeitschriftenaufsatz
2007MOCVD of TaN Using the All-Nitrogen-Coordinated Precursors [Ta(NEtMe)3(N-tBu)], [Ta(NEtMe)(N-tBu){C(N-iPr)2(NEtMe)}2] and [Ta(NMeEt)2(N-tBu){Me2N-N(SiMe3)}]
Baunemann, A.; Lemberger, M.; Bauer, A.J.; Parala, H.; Fischer, R.A.
Zeitschriftenaufsatz
2007MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications
Lemberger, M.; Thiemann, S.; Baunemann, A.; Parala, H.; Fischer, R.A.; Hinz, J.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2007Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
2007Quantitative oxide charge determination by photocurrent analysis
Rommel, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2007Recent improvements in the integration of field emitters into scanning probe microscopy sensors
Beuer, S.; Rommel, M.; Petersen, S.; Amon, B.; Sulzbach, T.; Engl, W.; Bauer, A.J.; Ryssel, H.
Poster
2007Stress induced leakage current mechanism in thin Hf-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
2007Thermal stability of thin ALD ZrO2 layers as dielectrics in deep trench DRAM devices annealed in N2 and NH3
Weinreich, W.; Lemberger, M.; Erben, E.; Heitmann, J.; Wilde, L.; Ignatova, V.A.; Teichert, S.; Schröder, U.; Oberbeck, L.; Bauer, A.J.; Ryssel, H.; Kücher, P.
Poster
2007Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique
Yanev, V.; Paskaleva, A.; Weinreich, W.; Lemberger, M.; Petersen, S.; Rommel, M.; Bauer, A.J.; Ryssel, H.
Poster
2006Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Poster
2006Active Fuse
Berberich, S.E.; März, M.; Bauer, A.J.; Beuer, S.; Ryssel, H.
Konferenzbeitrag
2006Correlation between defects, leakage currents and conduction mechanisms in thin high-k dielectric layers
Paskaleva, A.; Atanassova, E.; Lemberger, M.; Bauer, A.J.
Konferenzbeitrag
2006Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2006Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2005
: Bauer, A.; Flock, S.
Jahresbericht
2006High temperature implantation of aluminum in 4H silicon carbide
Rambach, M.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2006Mercury-free cure shrinkage and thermal expansion measurements
Chowdhury, Y.; Bauer, A.; Müller, J.; Bauer, M.
Konferenzbeitrag
2006Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers
Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Konferenzbeitrag
2006Systematic interpretation of microarray data using experiment annotations
Fellenberg, K.; Busold, C.H.; Witt, O.; Bauer, A.; Beckmann, B.; Hauser, N.C.; Frohme, M.; Winter, S.; Dippon, J.; Hoheisel, J.D.
Zeitschriftenaufsatz
2005Annealing of aluminum implanted 4H-SiC
Rambach, M.; Bauer, A.J.; Frey, L.; Friedrichs, P.; Ryssel, H.
Konferenzbeitrag
2005An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films
Paskaleva, A.; Bauer, A.J.; Lemberger, M.
Zeitschriftenaufsatz
2005Characterization of interface state densities by photocurrent analysis. Comparison of results for different insulator layers
Rommel, M.; Groß, M.; Ettinger, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Poster
2005Characterization of interface state densities by photocurrent analysis: Comparison of results for different insulator layers
Rommel, M.; Groß, M.; Ettinger, A.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2005Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren
Frey, L.; Bauer, A.; Ryssel, H.
Zeitschriftenaufsatz
2005Chemistry of mixed ligand all nitrogen coordinated Ta, Hf, and W precursors for metal nitride MOCVD
Baunemann, A.; Rische, D.; Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Fischer, R.A.
Poster
2005Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films
Paskaleva, A.; Bauer, A.; Lemberger, M.
Zeitschriftenaufsatz
2005Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz, Konferenzbeitrag
2005Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2004
: Bauer, A.; Flock, S.
Jahresbericht
2005High-k hafnium silicate films on silicon and germanium wafers by MOCVD using a single-source precursor
Lemberger, M.; Schön, F.; Dirnecker, T.; Jank, M.P.M.; Paskaleva, A.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag
2005Implantation and annealing of aluminum in 4H silicon carbide
Rambach, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2005Integration of GO annotations in correspondence analysis: Facilitating the interpretation of microarray data
Busold, C.H.; Winter, S.; Hauser, N.C.; Bauer, A.; Dippon, J.; Hoheisel, D.; Fellenberg, K.
Zeitschriftenaufsatz
2005MOCVD of conductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.
Konferenzbeitrag
2005MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.
Konferenzbeitrag
2005Thin Hf(x)Ti(y)Si(z)O films with varying Hf to Ti contents as candidates for high-k dielectrics
Bauer, A.J.; Paskaleva, A.; Lemberger, M.; Frey, L.; Ryssel, H.
Konferenzbeitrag
2005Triple trench gate IGBTs
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag
2005Wafer scale characterization of interface state densities without test structures by photocurrent analysis
Rommel, M.; Groß, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2004Different current conduction mechanisms through thin high-k Hf(x)Ti(y)Si(z)O films due to the varying Hf to Ti ratio
Paskaleva, A.; Bauer, A.J.; Lemberger, M.; Zurcher, S.
Zeitschriftenaufsatz
2004Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2004Electrical properties and conduction mechanisms in Hf(x)Ti(y)Si(z)O films obtained from novel MOCVD precursors
Paskaleva, A.; Lemberger, M.; Zürcher, S.; Bauer, A.J.
Konferenzbeitrag
2004Evaluation von Wissensbewertungsmethoden für lernende Softwareorganisationen
Bauer, A.
: Rombach, H.D.; Rech, J.
Bericht
2004Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2003
: Bauer, A.; Flock, S.
Jahresbericht
2004Investigation of rapid thermal annealed pn-junctions in SiC
Rambach, M.; Weiss, R.; Frey, L.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2003Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2003Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2002
: Bauer, A.; Loosen, P.; Flock, S.
Jahresbericht
2003Hafnium titanium silicate high-k dielectric films deposited by MOCVD using novel single source precursors
Zürcher, S.; Morstein, M.; Lemberger, M.; Bauer, A.J.
Konferenzbeitrag
2003Influence of antenna shape and resist patterns on charging damage during ion implantation
Dirnecker, T.; Bauer, A.J.; Beyer, A.; Frey, L.; Henke, D.; Ruf, A.; Ryssel, H.
Konferenzbeitrag
2003Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents
Jank, M.; Frey, L.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2003Surface properties and electrical characteristics of rapid thermal annealed 4H-SiC
Bauer, A.J.; Rambach, M.; Frey, L.; Weiss, R.; Rupp, R.; Friedrichs, P.; Schörner, R.; Peters, D.
Konferenzbeitrag
2003Trench sidewall doping for lateral power devices
Berberich, S.E.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag
2003Zirconium silicate films obtained from novel MOCVD precursors
Lemberger, M.; Paskaleva, A.; Zürcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.
Konferenzbeitrag, Zeitschriftenaufsatz
2002Effect of barium contamination on gate oxide integrity in high-k DRAM
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Bauer, A.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
2002Fraunhofer-Institut für Lasertechnik. Leistungen und Ergebnisse. Jahresbericht 2001
: Poprawe, R.; Bauer, A.; Croll, A.
Jahresbericht
2002Influence of photoresist pattern on charging damage during high current ion implantation
Dirnecker, T.; Ruf, A.; Frey, L.; Beyer, A.; Bauer, A.J.; Henke, D.; Ryssel, H.
Konferenzbeitrag
2002Lagermodellierung für logistische Netze: Das "modulare Knotenmodell" als Konzept zur dynamischen Abbildung von Lagern in Netzen
Bauer, A.
Dissertation
2002Long distance traffic networks
Bauer, A.
Zeitschriftenaufsatz
2002MOCVD of titanium dioxide on the basis of new precursors
Leistner, T.; Lehmbacher, K.; Härter, P.; Schmidt, C.; Bauer, A.J.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
2002New single-source precursors for the MOCVD of high-kappa dielectric zirconium silicates to replace SiO2 in semiconducting devices
Zürcher, S.; Morstein, M.; Spencer, N.D.; Lemberger, M.; Bauer, A.
Zeitschriftenaufsatz
2002Wie der richtige Standort gefunden wird, ohne die Folgekosten zu vergessen
Bauer, A.
Zeitschriftenaufsatz
20015. Workshop Föderierte Datenbanken (FDBS 2001) und GI-Arbeitstreffen "Konzepte des Data Warehousing". Proceedings
Bauer, A.; Busse, S.; Kutsche, R.-D.; Lehner, W.
Tagungsband
2001Barium, strontium and bismuth contamination in CMOS processes
Boubekeur, H.; Mikolajick, T.; Höpfner, J.; Dehm, C.; Pamler, W.; Steiner, J.; Kilian, G.; Kolbesen, B.O.; Bauer, A.; Frey, L.; Ryssel, H.
Konferenzbeitrag
2001Electrical reliability aspects of through the gate implanted MOS-structures with thin oxides
Jank, M.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
2001Hybrid polymer/silica vertical coupler switches
Keil, N.; Yao, H.H.; Zawadzki, C.; Lösch, K.; Satzke, K.; Wischmann, W.; Wirth, J. von; Schneider, J.; Bauer, A.; Bauer, J.; Bauer, M.
Konferenzbeitrag
2001Impact of platinum contamination on ferroelectric memories
Boubekeur, H.; Mikolajick, T.; Nagel, N.; Dehm, C.; Pamler, W.; Bauer, A.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
2001New precursors for MOCVD of high-k metal silicates as alternative to SiO2 in semiconducting devices
Zürcher, S.; Morstein, M.; Bauer, A.J.; Lemberger, M.
Poster
2001Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres
Beichele, M.; Bauer, A.J.; Herden, M.; Ryssel, H.
Zeitschriftenaufsatz
2001Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambient
Beichele, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2001Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode
Herden, M.; Bauer, A.J.; Beichele, M.; Ryssel, H.
Zeitschriftenaufsatz
2001Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices
Strobel, S.; Bauer, A.J.; Beichele, M.; Ryssel, H.
Zeitschriftenaufsatz
2000Mechanische Charakterisierung von Polymeren
Bauer, A.
Zeitschriftenaufsatz
2000Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres
Beichele, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2000Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode of PMOS devices
Herden, M.; Bauer, A.J.; Ryssel, H.
Zeitschriftenaufsatz
2000Triazine based Dendrimers
Dreyer, C.; Blume, A.; Bauer, A.; Bauer, M.; Neumann-Rodekirch, J.
Konferenzbeitrag
1999Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H.
Konferenzbeitrag
1999Einführung einer neuen Produktionstechnologie
Westkämper, E.; Bauer, A.; Zahn, A.
Zeitschriftenaufsatz
1999Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Konferenzbeitrag
1999Impact of nitrogen implantation into polysilicon to reduce boron penetration through the gate oxide
Bauer, A.J.; Mayer, P.; Frey, L.; Häublein, V.; Ryssel, H.
Konferenzbeitrag
1999Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.
Konferenzbeitrag
19984 nm gate dielectrics prepared by RTP low pressure oxidation in O2 and N2O atmosphere
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Zeitschriftenaufsatz
1998Contacting fine pitch SMT components with anisotropic or non-filled adhesives
Gesang, T.; Schäfer, H.; Hennemann, O.-D.; Harder, T.; Bornholdt, O.; Bauer, A.
Konferenzbeitrag
1998Flexible Cellulosefasern mit reduziertem Modul und vermindertem NMR-Ordnungsgrad und deren Herstellung
Weigel, P.; Gensrich, J.; Frigge, K.; Wagenknecht, W.; Bauer, A.
Patent
1998Die mechanische Charakterisierung von Polymeren und verstärkten Polymeren
Bauer, A.; Ganster, J.
Konferenzbeitrag
1998Schnelle thermische Niederdruckoxidation
Bauer, A.J.
Konferenzbeitrag
1997Characterization of oxide etching and wafer cleaning using vapor-phase anhydrous HF and ozone
Froeschle, B.; Deutschmann, L.; Bauer, A.J.; Burte, E.P.
Konferenzbeitrag
1997Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Zeitschriftenaufsatz
1997Cleaning process optimization in a gate oxide cluster tool using an in-line XPS module
Froeschle, B.; Glowacki, F.; Bauer, A.J.; Kasko, I.; Öchsner, R.; Schneider, C.
Konferenzbeitrag
1997Electrically conductive contacting fine-pinch devices with unfilled adhesive
Gesang, T.; Schäfer, H.; Hennemann, O.-D.; Bauer, A.; Bornholdt, O.; Harder, T.
Zeitschriftenaufsatz
1997Elektrisch leitfähiges Kontaktieren von Fine-Pinch-Bauelementen mit nicht-gefüllten Klebstoffen
Gesang, T.; Schäfer, H.; Hennemann, O.-D.; Bauer, A.; Bornhold, O.; Harder, T.
Zeitschriftenaufsatz
1997Elektrisch leitfähiges Kontaktieren von Fine-Pinch-Bauelementen mit nicht-gefüllten Klebstoffen
Gesang, T.; Schäfer, H.; Hennemann, O.-D.; Bauer, A.; Bornhold, O.; Harder, T.
Zeitschriftenaufsatz
1997Integrated vapor-phase cleaning and pure NO nitridation for gate stack formation
Glowacki, F.; Froeschle, B.; Deutschmann, L.; Sagnes, I.; Laviale, D.; Bensahel, D.; Galimaoui, A.; Martin, F.; Bauer, A.J.
Konferenzbeitrag
1997Laserresonator für Laser-Medien mit ringförmigem Querschnitt
Habich, U.; Du, K.; Bauer, A.; Plum, H.D.; Loosen, P.
Patent
1997Die mechanische Charakterisierung von Polymeren und Metall-Polymer-Verbunden, experimentelle Probleme und theoretische Hintergründe
Bauer, A.; Ganster, J.
Konferenzbeitrag
1997Möglichkeiten und Grenzen eines Virtual Reality (VR) Trainingssimulators für die chirurgische Ausbildung
Müller, W.K.; Bauer, A.; Soldner, E.H.; Ziegler, R.
Konferenzbeitrag
1997Präzisionsdispensen von Leitklebstoff: Erfahrungen im industriellen Umfeld
Bauer, A.; Novotny, M.; Schwaab, G.; Gramann, U.
Konferenzbeitrag
1997Vom Exoten zum Standardwerkzeug
Poprawe, R.; Loosen, P.; Gillner, A.; Bauer, A.
Zeitschriftenaufsatz
1996Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Zeitschriftenaufsatz
1996Grenzdehnung von Polymeren und mechanische Eigenschaften charakterisierender Strukturparameter
Bauer, A.
Konferenzbeitrag
1996High quality 4 nm gate dielectrics prepared at low pressure in oxygen oxide atmospheres
Bauer, A.J.; Burte, E.P.
Konferenzbeitrag
1996Das Mehrschichtverbundsystem Leiterplatte. Wichtige Einflußparameter auf die Anwendungseigenschaften. Teil 1. Einflüsse durch Klebstofftyp und Feuchte bei Lagerung
Bauer, A.; Bischof, C.
Zeitschriftenaufsatz
1996Das Mehrschichtverbundsystem Leiterplatte. Wichtige Einflußparameter auf die Anwendungseigenschaften. Teil 2
Bauer, A.; Bischof, C.
Zeitschriftenaufsatz
1996Virtual Reality in the surgical arthroscopic training
Bauer, A.; Soldner, E.H.; Ziegler, R.; Müller, W.K.
Konferenzbeitrag
1996Virtual Reality in the surgical arthroscopical training
Bauer, A.; Soldner, E.H.; Ziegler, R.; Müller, W.K.
Konferenzbeitrag
19954 nm gate dielectrics prepared by RTP low pressure oxidation in O2 and N2O atmosphere
Bauer, A.J.; Burte, E.P.; Ryssel, H.
Konferenzbeitrag
1995Schnelle thermische Prozessierung und Charakterisierung dünner nitridierter Oxide
Bauer, A.J.
Dissertation
1995Das Spannungs-Dehnungs-Verhalten der Polymerschichten im Metall-Polymer-Verbund
Bauer, A.
Konferenzbeitrag
1995Structural and electrical properties of thin SiO2 layers grown by RTP in a mixture of N2O and O2
Bauer, A.J.; Burte, E.P.
Zeitschriftenaufsatz
1995Virtual Reality in the surgical arthroscopical training
Bauer, A.; Soldner, E.H.; Ziegler, R.; Müller, W.K.
Konferenzbeitrag
1994Successful transfer of key technologies from research centres into industry
Bauer, A.
Konferenzbeitrag
1991Resonators for coaxial slow-flow-CO2 lasers
Habich, U.; Bauer, A.; Plum, H.-D.
Konferenzbeitrag
1990Multipass-resonators for compact CO2-lasers.
Bauer, A.; Märten, O.
Konferenzbeitrag
1989Endothelial cells are a major source of gastric mucosal PGE2-synthesis in Guinea pigs
Schwenk, M.; Bauer, A.; Pfaff, T.; Radziejowsky, I.; Sewing, K.-F.; Thiedemann, K.-U.
Konferenzbeitrag
1985Rationelle Datenverarbeitung mit Mikrocomputer auch in kleinen Betrieben
Bauer, A.; Kaempf, R.; Kuehnle, H.
Zeitschriftenaufsatz