Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging
Gorecki, C.; Lullin, J.; Perrin, S.; Bargiel, S.; Albero, J.; Gaiffe, O.; Rutkovvski, J.; Cote, J.M.; Krauter, J.; Osten, W.; Wang, W.-S.; Weimer, M.; Froemel, J.
Zeitschriftenaufsatz
2016Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection
Passilly, N.; Perrin, S.; Lullin, J.; Albero, J.; Bargiel, S.; Froehly, L.; Gorecki, C.; Krauter, J.; Osten, W.; Wang, W.-S.; Wiemer, M.
Konferenzbeitrag
2016Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding
Wang, W.-S.; Wiemer, M.; Froemel, J.; Enderlein, T.; Gessner, T.; Lullin, J.; Bargiel, S.; Passilly, N.; Albero, J.; Gorecki, C.
Konferenzbeitrag
2012Micromachined array-type mirau interferometer for MEMS metrology
Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Kujawinska, M.; Zeitner, U.D.
Konferenzbeitrag
2011Micromachined array-type Mirau interferometer for MEMS metrology
Gorecki, C.; Bargiel, S.; Albero, J.; Passilly, N.; Rousselot, C.; Zeitner, U.; Gastinger, K.
Konferenzbeitrag
2011Micromachined array-type Mirau interferometer for parallel inspection of MEMS
Albero, J.; Bargiel, S.; Passilly, N.; Dannberg, P.; Stumpf, M.; Zeitner, U.D.; Rousselot, C.; Gastinger, K.; Gorecki, C.
Zeitschriftenaufsatz
2010SMARTIEHS - A European project for parallel testing of M(O)EMS
Michael, S.; Gastinger, K.; Kujawinska, M.; Zeitner, U.; Albero, J.; Beer, S.; Moosburger, R.; Pizzi, M.
Konferenzbeitrag
2009Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
Gastinger, K.; Haugholt, K.H.; Røyset, A.; Albero, J.; Zeitner, U.; Gorecki, C.
Konferenzbeitrag