Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays
Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M.
Journal Article
2019Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Dörfler, Susanne; Althues, Holger; Metzner, Christoph
Journal Article
2019Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass
Fahland, Matthias; Zywitzki, Olaf; Modes, Thomas; Vondkar, Komal; Werner, Torsten; Ottermann, Clemens; Berendt, Markus; Pollak, Gerd
Journal Article
2019Synthesis of Porous Thin Films as Silicon Anodes for Lithium-Ion Batteries
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph
Journal Article
2018Influence of rf substrate bias on density and mechanical properties of sputtered SiO2 thin films for SAW applications
Täschner, Kerstin; Hildisch, Jahn; Bartzsch, Hagen; Modes, Thomas; Zywitzki, Olaf
Conference Paper
2018Porous silicon thin films as anodes for lithium ion batteries deposited by co-evaporation of silicon and zinc
Saager, Stefan; Scheffel, Bert; Zywitzki, Olaf; Modes, Thomas; Piwko, Markus; Doerfler, Susanne; Althues, Holger; Metzner, Christoph
Conference Paper
2018Roll-to-roll sputtering of oxide layers into ultrathin flexible glass
Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker
Conference Paper
2017Close spaced sublimation deposition of CdTe layers with process gas oxygen for thin film solar cells
Krishnakumar, V.; Späth, B.; Drost, C.; Kraft, C.; Siepchen, B.; Delahoy, A.; Tan, X.; Chin, K.; Peng, S.; Hirsch, D.; Zywitzki, O.; Modes, T.; Morgner, H.
Journal Article
2017Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Zywitzki, Olaf; Modes, Thomas; Barth, Stephan; Bartzsch, Hagen; Frach, Peter
Journal Article
2017Plasma-assisted reactive high-rate vapor deposition of yttria-stabilized zirconia using electron beam evaporation and spotless vacuum arc
Scheffel, Bert; Zywitzki, Olaf; Metzner, Christoph
Journal Article
2017Structure and properties of magnetron-sputtered manganese ferrite films
Fietzke, Fred; Zywitzki, Olaf
Journal Article, Conference Paper
2017Verfahren zum Abscheiden einer CdTe-Schicht auf einem Substrat
Morgner, Henry; Metzner, Christoph; Hirsch, Daniel; Zywitzki, Olaf; Decker, Ludwig
Patent
2016The impact of oxygen inlet during close-spaced sublimation process on the as-deposited and chlorine treated microstructure of CdTe layers
Hirsch, D.; Zywitzki, O.; Modes, T.; Morgner, H.; Späth, B.; Siepchen, B.; Drost, C.; Kraft, C.; Krishnakumar, V.; Metzner, C.
Conference Paper
2016Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald
Journal Article
2016Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons
Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V.
Conference Paper
2015Activation of CdTe-based thin films with zinc chloride and tetrachlorozincates
Drost, C.; Siepchen, B.; Krishnakumar, V.; Späth, B.; Kraft, C.; Modes, T.; Zywitzki, O.
Journal Article, Conference Paper
2015Effect of microstructure on chlorine activation of CdTe thin film solar cells
Zywitzki, Olaf; Modes, Thomas; Dienel, M.; Morgner, Henry; Metzner, Christoph; Schwuchow, Eric
Conference Paper
2015Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald
Conference Paper
2014Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1-XN films deposited by pulsed magnetron sputtering
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Zywitzki, Olaf; Herzog, Thomas; Walter, Susan; Heuer, Henning
Conference Paper
2014Improved Activation Treatment for CdTe Solar Cells
Späth, B.; Drost, C.; Krishnakumar, V.; Kraft, C.; Siepchen, B.; Modes, T.; Zywitzki, O.; Peng, S.
Conference Paper
2014Influence of HCl-activation on the performance of low and high temperature grown CdTe solar cells
Schwuchow, Eric; Morgner, Henry; Zywitzki, Olaf; Metzner, Christoph; Modes, Thomas
Conference Paper
2014Neue, ökologisch nachhaltige Vakuumbeschichtungen auf metallischen Platten und Bändern
Metzner, C.; Scheffel, B.; Morgner, H.; Zywitzki, O.
Journal Article
2013Effect of chlorine activation treatment on electron beam induced current signal distribution of cadmium telluride thin film solar cells
Zywitzki, Olaf; Modes, Thomas; Morgner, Henry; Metzner, Christoph; Siepchen, Bastian; Späth, Bettina; Drost, Christian; Krishnakumar, Velappan; Frauenstein, Sven
Journal Article
2013Thin film CdTe solar cells by close spaced sublimation: Recent results from pilot line
Siepchen, B.; Drost, C.; Späth, B.; Krishnakumar, V.; Richter, H.; Harr, M.; Bossert, S.; Grimm, M.; Häfner, K.; Modes, T.; Zywitzki, O.; Morgner, H.
Journal Article
2012Elektrionenstrahlgestütztes Verfahren und Vorrichtung zur Herstellung von Kontakten
Mattausch, Gösta; Graffel, Benjamin; Winckler, Falk; Zywitzki, Olaf; Böhme, Rico
Patent
2012High resolution EBIC and TEM investigations on CdTe solar cells
Zywitzki, O.; Modes, T.
Conference Paper
2012Influence of different TCO-systems on microstructure and performance of CdTe-solar cells in superstrate configuration
Morgner, H.; Preussner, T.; Häfner, K.; Zywitzki, O.; Modes, T.; Kopte, T.; Siepchen, S.; Späth, B.; Drost, C.
Conference Paper
2012Influence of substrate temperature and activation treatment on CdTe solar cells
Morgner, H.; Häfner, K.; Zywitzki, O.; Modes, T.; Metzner, C.; Siepchen, B.; Drost, C.
Conference Paper
2012Untersuchung der Mg-Zn-Phasenbildung in feuerverzinktem Stahlblech
Zywitzki, O.; Modes, T.; Scheffel, B.; Metzner, C.
Journal Article
201112% efficient CdTe/CdS thin film solar cells deposited by low-temperature close space sublimation
Schaffner, J.; Motzko, M.; Tueschen, A.; Swirschuk, A.; Schimper, H.-J.; Klein, A.; Modes, T.; Zywitzki, O.; Jaegermann, W.
Journal Article
2011Characterization of microstructure and interfaces in cadmium telluride thin film cells
Zywitzki, O.; Modes, T.; Morgner, H.; Siepchen, B.; Späth, B.; Drost, C.; Grimm, M.
Conference Paper
2011CSS deposition of CdTe solar cells: Latest results from Roth&Rau's pilot line
Siepchen, B.; Späth, B.; Drost, C.; Frigge, S.; Häfner, K.; Preußner, T.; Zywitzki, O.; Grimm, M.
Conference Paper
2011Functional and decorative coatings onto stainless steel sheets and strips deposited by high-rate physical vapour deposition
Scheffel, B.; Metzner, C.; Modes, T.; Zywitzki, O.; Morgner, H.
Conference Paper
2011Influence of evaporation rate, substrate temperature and process chamber pressure on the microstructure of CdTe layers
Häfner, K.; Morgner, H.; Modes, T.; Zywitzki, O.; Metzner, C.; Siepchen, B.; Drost, C.; Späth, B.; Grimm, M.
Conference Paper
2011Structure and properties of TiCx and W-C:H layers deposited by plasma activated high rate electron beam evaporation
Heinß, J.-P.; Zywitzki, O.; Modes, T.
Conference Paper
2011Transparentes leitfähiges TiO2:Nb - ein TCO-Material der Zukunft?
Junghähnel, M.; Kopte, T.; Zywitzki, O.
Journal Article
2010Fotokatalytische Schichten
Zywitzki, O.
Book Article
2010Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputtering
Junghähnel, M.; Heimke, B.; Hartung, U.; Kopte, T.; Zywitzki, O.
Conference Paper
2010Untersuchungen der MgZn-Phasenbildung in feuerverzinktem Stahlblech
Zywitzki, O.; Scheffel, B.; Metzner, C.; Modes, T.
Conference Paper
2009Zr-Nb-N hard coatings deposited by high power pulsed sputtering using different pulse modes
Klostermann, H.; Fietzke, F.; Labitzke, R.; Modes, T.; Zywitzki, O.
Conference Paper, Journal Article
2008Characterisation of baroque tin amalgam mirrors of the historical Green Vault in Dresden
Zywitzki, O.; Nedon, W.; Kopte, T.; Modes, T.
Journal Article, Conference Paper
2008Effect of structure and morphology on photocatalytic properties of TiO2 layers
Zywitzki, O.; Modes, T.; Frach, P.; Glöß, D.
Conference Paper, Journal Article
2008Electron beam devices for materials processing and analysis
Bluhm, H.; Han, B.; Chmielewski, A.G.; Dobeneck, D. von; Gohs, U.; Gstöttner, J.; Mattausch, G.; Morgner, H.; Reichmann, A.; Röder, O.; Zywitzki, O.; Koops, H.W.P.; Schulz, S.W.; Wenzel, B.
Book Article
2007Effect of annealing procedure on phase formation in zinc magnesium alloy coatings on steel sheets
Scheffel, B.; Zywitzki, O.; Metzner, C.
Conference Paper
2007High rate deposition of nanofunctionalized transparent coatings on metal and glass substrates by hollow cathode arc activated reactive evaporation
Morgner, H.; Metzner, C.; Zywitzki, O.
Journal Article
2007Rekonstruktion von Barockspiegeln des Historischen Grünen Gewölbes im Dresdener Schloss
Nedon, W.; Zywitzki, O.; Kopte, T.
Journal Article
2007Verfahren zum Abscheiden von photokatalytischen Titanoxid-Schichten
Scheffel, B.; Metzner, C.; Zywitzki, O.; Kirchhoff, V.; Modes, T.
Patent
2007Zr-Al-N nanocomposite coatings deposited by pulse magnetron sputtering
Klostermann, H.; Fietzke, F.; Modes, T.; Zywitzki, O.
Journal Article
2006Decomposition ability and bioactivity of photocatalytic TiO2 based layers prepared by reactive pulse magnetron sputtering
Frach, P.; Glöß, D.; Zywitzki, O.; Vergöhl, M.; Neumann, F.; Hund-Rinke, K.; Trick, I.
Conference Paper
2006Deposition of photocatalytic TiO2 layers by pulse magnetron sputtering and by plasma-activated evaporation
Frach, P.; Glöß, D.; Metzner, C.; Modes, T.; Scheffel, B.; Zywitzki, O.
Conference Paper, Journal Article
2006Elektrode fuer elektrochemische Farbstoffzelle und Verfahren zum Herstellen derselben
Frach, P.; Gloess, D.; Klinkenberg, S.; Kopte, T.; Fahland, M.; Metzner, C.; Zywitzki, O.; Scheffel, B.
Patent
2006Structure of superhard nanocrystalline (Ti,Al)N layers deposited by reactive pulsed magnetron sputtering
Zywitzki, O.; Klostermann, H.; Fietzke, F.; Modes, T.
Journal Article, Conference Paper, Journal Article
2006VERFAHREN ZUR HERSTELLUNG EINES PVD AL2O3 BESCHICHTETEN SCHNEIDWERKZEUGS
Schiller, S.; Goedicke, K.; Fietzke, F.; Zywitzki, O.; Sjoestrand, M.; Ljungberg, B.
Patent
2005Abscheidung transparenter abriebfester Schichten auf Kunststoff- und Metallsubstraten durch plasmaaktivierte PVD-Hochratebeschichtung
Morgner, H.; Metzner, C.; Rögner, F.-H.; Zywitzki, O.
Conference Paper
2005Easy-to-clean coatings produced by high-rate pulse magnetron sputtering and plasma-activated evaporation
Glöß, D.; Frach, P.; Metzner, C.; Modes, T.; Zywitzki, O.; Scheffel, B.
Conference Paper
2005Nanocomposite oxide and nitride hard coatings produced by pulse magnetron sputtering
Klostermann, H.; Böcher, B.; Fietzke, F.; Modes, T.; Zywitzki, O.
Journal Article, Conference Paper
2005Photocatalytic titanium dioxide thin films prepared by reactive pulse magnetron sputtering at low temperature
Glöß, D.; Frach, P.; Zywitzki, O.; Modes, T.; Klinkenberg, S.; Gottfried, C.
Journal Article
2005Structure and properties of titanium oxide layers deposited by reactive plasma activated electron beam evaporation
Modes, T.; Scheffel, B.; Metzner, C.; Zywitzki, O.; Reinhold, E.
Journal Article, Conference Paper
2004Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering
Zywitzki, O.; Modes, T.; Sahm, H.; Frach, P.; Goedicke, K.; Gloss, D.
Conference Paper, Journal Article
2004Verbundkoerper mit einer verschleissmindernden Oberflaechenschicht und Verfahren zu seiner Herstellung
Klostermann, H.; Fietzke, F.; Zywitzki, O.; Goedicke, K.
Patent
2003Effect of pulse mode in reactive magnetron sputtering on structure and properties of titanium dioxide films
Frach, P.; Glöß, D.; Goedicke, K.; Zywitzki, O.; Sahm, H.; Modes, T.
Conference Paper
2003Effect of pulse mode in reactive magnetron sputtering on structure and properties of titanium dioxide films
Frach, P.; Zywitzki, O.; Goedicke, K.; Boecher, B.; Glöß, D.; Gottfried, C.
Conference Paper
2002High density pulsed plasma for the deposition of hard coatings on three-dimensional substrates
Klostermann, T.; Fietzke, F.; Zywitzki, O.; Goedicke, K.
Conference Paper
2002Rutile and anatase phase TiO2 films obtained on unheated substrates by matched pulse mode and pulse parameters in reactive magnetron sputtering
Frach, P.; Zywitzki, O.; Goedicke, K.; Gottfried, C.; Klinkenberg, S.; Sahm, H.; Modes, T.
Conference Paper
2002Structure and properties of Al2O3 layers deposited by plasma activated electron beam evaporation
Zywitzki, O.; Goedicke, K.; Morgner, H.
Conference Paper
2001High-rate physical vapour deposition in combination with plasma processes for metal strip coating
Scheffel, B.; Metzner, C.; Zywitzki, O.; Faber, J.
Conference Paper
2000Comparison of structure and properties of SiOx coatings deposited by reactive pulsed magnetron sputtering (PMS) and by hollow cathode activated EB evaporation (HAD)
Zywitzki, O.; Sahm, H.; Krug, M.; Morgner, H.; Neumann, M.
Conference Paper
2000Influence of process parameters on the structure and the properties of ZrO2 coatings deposited by reactive pulsed magnetron sputtering (PMS)
Goedicke, K.; Liebig, J.-S.; Zywitzki, O.; Sahm, H.
Journal Article, Conference Paper
2000New coatings on metal sheets and strips produced using EB PVD technologies
Schiller, S.; Metzner, C.; Zywitzki, O.
Conference Paper
1999Rod cathode arc-activated deposition (RAD). A new plasma-activated electron beam PVD process
Scheffel, B.; Metzner, C.; Goedicke, K.; Heinss, J.P.; Zywitzki, O.
Conference Paper
1999Rod cathode arc-activated deposition (RAD). A new plasma-activated electron beam PVD process
Scheffel, B.; Metzner, C.; Goedicke, K.; Heinß, J.-P.; Zywitzki, O.
Journal Article
1998Vakuumbeschichteter Verbundkoerper und Verfahren zu seiner Herstellung
Goedicke, K.; Hoetzsch, G.; Fietzke, F.; Zywitzki, O.; Schiller, S.; Reschke, J.; Hempel, W.
Patent
1998Verbundkoerper aus vakuumbeschichtetem Sinterwerkstoff und Verfahren zu seiner Herstellung
Goedicke, K.; Hoetzsch, G.; Fietzke, F.; Zywitzki, O.; Schiller, S.; Reschke, J.; Hempel, W.
Patent
1997Correlation between structure and properties of reactively deposited Al2O3 coatings by pulsed magnetron sputtering
Zywitzki, O.; Hötzsch, G.
Conference Paper
1997Einfluß von Substrattemperatur und Plasmaaktivierung auf Struktur und Eigenschaften von PVD-Al2O3-Schichten
Zywitzki, O.
Dissertation
1997Structure, properties and applications for PVD Al2O3 layers - a comparison of deposition technologies
Hoetzsch, G.; Zywitzki, O.; Sahm, H.
Conference Paper
1996Effect of the substrate temperature on the structure and properties of Al2O3 layers reactively deposited by pulsed magnetron sputtering
Zywitzki, O.; Hoetzsch, G.; Fietzke, F.; Goedicke, K.
Journal Article
1996Influence of coating parameters on the structure and properties of Al2O3 layers reactively deposited by means of pulsed magnetron sputtering
Zywitzki, O.; Hoetzsch, G.
Conference Paper
1996Transparente kristalline Aluminiumoxidschichten eröffnen neue Anwendungsfelder
Schiller, S.; Goedicke, K.; Hötzsch, G.; Fietzke, F.; Zywitzki, O.
Book Article
1995Effect of plasma activation on the phase transformations of aluminium oxide
Zywitzki, O.; Hötzsch, G.
Conference Paper
1995Plasma-activated high rate EB deposition of metals and oxides onto strip steel
Schiller, S.; Goedicke, K.; Zywitzki, O.; Hötzsch, G.
Conference Paper
1994Plasma-activated high-rate evaporation using a low-voltage EB system
Schiller, S.; Hötzsch, G.; Neumann, M.; Morgner, H.; Zywitzki, O.
Conference Paper
1993Ultramikrohärte und Struktur von gesputterten und aufgedampften Al2O3-Schichten
Hötzsch, G.; Oettel, M.; Wiedemann, R.; Wiswesser, A.; Zywitzki, O.
Conference Paper