Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Stability and residual stresses of sputtered wurtzite AlScN thin films
Österlund, Elmeri; Ross, Glenn; Caro, Miguel; Paulasto-Kröckel, Mervi; Hollmann, Andreas; Klaus, Manuela; Meixner, Matthias; Genzel, Christoph; Koppinen, Panu; Pensala, Tuomas; Zukauskaite, Agne; Trebala, Michael
Journal Article
2020Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics
Rogall, Olga; Feil, Niclas M.; Ding, Anli; Mayer, Elena; Pupyrev, Pavel D.; Lomonosov, Alexey M.; Zukauskaite, Agne; Ambacher, Oliver; Mayer, Andreas P.
Conference Paper
2020Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al₀.₇₇Sc₀.₂₃N (1120) thin films
Ding, Anli; Kirste, Lutz; Lu, Yuan; Driad, Rachid; Kurz, Nicolas; Lebedev, Vadim; Christoph, Tim; Feil, Niclas M.; Lozar, Roger; Metzger, Thomas; Ambacher, Oliver; Zukauskaite, Agne
Journal Article
2020In-Plane Oriented Stacks of c-AlScN/Mo (110) for BAW Resonators Grown by Magnetron Sputter Epitaxy
Sundarapandian, Balasubramanian; Kessel, Matthias; Zukauskaite, Agne; Kirste, Lutz; Sun, Cheng; Ambacher, Oliver
Conference Paper
2020Metal-organic chemical vapor deposition of aluminum scandium nitride
Leone, Stefano; Ligl, Jana; Manz, Christian; Kirste, Lutz; Fuchs, Theo; Menner, Hanspeter; Prescher, Mario; Wiegert, Joachim; Zukauskaite, Agne; Quay, Rüdiger; Ambacher, Oliver
Journal Article
2020Non-Polar a-plane AlScN(1120) Thin Film Based SAW Resonantors with Significantly Improved Electromechanical Coupling
Ding, Anli; Driad, Rachid; Lu, Yuan; Feil, Niclas M.; Kirste, Lutz; Christoph, Tim; Ambacher, Oliver; Zukauskaite, Agne
Conference Paper
2020Novel Method for Extracting Material Constants of Epitaxial Wurtzite AlScN Films on Sapphire Using Higher Order Surface Acoustic Wave Modes
Feil, Niclas M.; Mayer, Elena; Christian, Björn; Ding, Anli; Zukauskaite, Agne; Ambacher, Oliver
Conference Paper
2019Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators
Ding, Anli; Kurz, Nicolas; Driad, Rachid; Lu, Yuan; Lozar, Roger; Christoph, Tim; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Conference Paper
2019Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
Kurz, N.; Ding, Anli; Urban, F.D.; Lu, Yuan; Kirste, Lutz; Feil, N.M.; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2019Finite element analysis of SAW propagation characteristics in c-plane (0001) and a-plane (11-20) ALScN thin films
Feil, Niclas M.; Kurz, Nicolas; Urban, Daniel F.; Altayara, Abdullah; Bjoern, Christian; Ding, Anli; Zukauskaite, Agne; Ambacher, Oliver
Conference Paper
2019Formation of icosahedron twins during initial stages of heteroepitaxial diamond nucleation and growth
Lebedev, Vadim; Yoshikawa, Taro; Giese, Christian; Kirste, Lutz; Zukauskaite, Agne; Graff, Andreas; Meyer, Frank; Burmeister, Frank; Ambacher, Oliver
Journal Article
2019Optical constants and band gap of wurtzite Al₁₋ₓScₓN/Al₂O₃ prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
Baeumler, Martina; Lu, Yuan; Kurz, Nicolas; Kirste, Lutz; Prescher, Mario; Christoph, Tim; Wagner, Joachim; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2018Elastic modulus and coefficient of thermal expansion of piezoelectric Al1-xScxN (up to x = 0.41) thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Prescher, Mario; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Journal Article
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Conference Paper
2018Piezoelectric characterization of Sc0.26Al0.74N layers on Si (001) substrates
Sinusía Lozano, M.; Pérez-Campos, A.; Reusch, Markus; Kirste, Lutz; Fuchs, Theo; Zukauskaite, Agne; Chen, Z.; Iriarte, G.F.
Journal Article
2018Pulsed laser deposition of ferroelectric potassium tantalate-niobate optical waveguiding thin films
Jia, Yuechen; Winkler, Markus; Cheng, Chen; Chen, Feng; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Szabados, Jan; Breunig, Ingo; Buse, Karsten
Journal Article
2018Surface morphology and microstructure of pulsed DC magnetron sputtered piezoelectric AlN and AlScN thin films
Lu, Yuan; Reusch, Markus; Kurz, Nicolas; Ding, Anli; Christoph, Tim; Kirste, Lutz; Lebedev, Vadim; Zukauskaite, Agne
Journal Article
2018Temperature cross-sensitivity of AlN-based flexural plate wave sensors
Reusch, Markus; Holc, Katarzyna; Lebedev, Vadim; Kurz, Nicolas; Zukauskaite, Agne; Ambacher, Oliver
Journal Article
2018Temperature dependence of the pyroelectric coefficient of AlScN thin films
Kurz, Nicolas; Lu, Yuan; Kirste, Lutz; Reusch, Markus; Zukauskaite, Agne; Lebedev, Vadim; Ambacher, Oliver
Journal Article
2017Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus; Holc, Katarzyna; Zukauskaite, Agne; Lebedev, Vadim; Kurz, Nicolas; Ambacher, Oliver
Conference Paper
2017Nanodiamond resonators fabricated on 8'' Si substrates using adhesive wafer bonding
Lebedev, Vadim; Lisec, Thomas; Yoshikawa, Taro; Reusch, Markus; Iankov, Dimitre; Giese, Christian; Zukauskaite, Agne; Cimalla, Volker; Ambacher, Oliver
Journal Article
2017Potassium tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics
Jia, Yuechen; Winkler, Markus; Szabados, Jan; Breunig, Ingo; Kirste, Lutz; Cimalla, Volker; Zukauskaite, Agne; Buse, Karsten
Conference Paper
2017Potassium-tantalate-niobate mixed crystal thin films for applications in nonlinear integrated optics
Jia, Yuechen; Szabados, Jan; Winkler, Markus; Breunig, Ingo; Cimalla, Volker; Kirste, Lutz; Zukauskaite, Agne; Buse, Karsten
Conference Paper