Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019New approaches for the detection of invasive fungal diseases in patients following liver transplantation - results of an observational clinical pilot study
Decker, Sebastian O.; Krüger, Albert; Wilk, Henryk; Grumaz, Silke; Vainshtein, Yevhen; Schmitt, Felix C.F.; Uhle, Florian; Bruckner, Thomas; Zimmermann, Stefan; Mehrabi, Arianeb; Mieth, Markus; Weiss, Karl Heinz; Weigand, Markus A.; Hofer, Stefan; Sohn, Kai; Brenner, Thorsten
Journal Article
2018Application of quantum cascade laser absorption spectroscopy for correlation studies in plasma etching processes in the semiconductor industry
Lang, N.; Zimmermann, S.; Zimmermann, H.; Macherius, U.; Uhlig, B.; Schaller, M.; Schulz, S.E.; Röpcke, J.; Helden, J.H. van
Conference Paper
2018Reactive bonding with oxide based reactive multilayers
Vogel, K.; Roscher, F.; Wiemer, M.; Zimmermann, S.; Otto, T.
Conference Paper
2018The role of plasma analytics in leading-edge semiconductor technologies
Zimmermann, S.; Haase, M.; Lang, N.; Röpcke, J.; Schulz, S.E.; Otto, T.
Journal Article, Conference Paper
2017Immune-response patterns and next generation sequencing diagnostics for the detection of mycoses in patients with septic shock - results of a combined clinical and experimental investigation
Decker, S.O.; Sigl, A.; Grumaz, C.; Stevens, P.; Vainshtein, Y.; Zimmermann, S.; Weigand, M.A.; Hofer, S.; Sohn, K.; Brenner, T.
Journal Article
2016CF3Br plasma cryo etching of low-k porous dielectric
Clemente, I.; Koehler, N.; Miakonkikh, A.; Zimmermann, S.; Schulz, S.E.; Rudenko, K.
Journal Article, Conference Paper
2016Comparison Of COPD related breath VOCs assessed by a compact high-resolution closed-loop GC-IMS and by standard GC-MS
Holz, O.; Allers, M.; Gaida, A.; Schuchardt, S.; Hohlfeld, J.M.; Zimmermann, S.
Abstract
2016A dual center study to compare breath volatile organic compounds from smokers and non-smokers with and without COPD
Gaida, Arne; Holz, Olaf; Nell, Christoph; Schuchardt, Sven; Lavae-Mokhtari, Bianca; Kruse, Lena; Boas, Ursula; Langejuergen, Jens; Allers, Maria; Zimmermann, Stefan
Journal Article
2016Measurement of exhaled volatile organic compounds from patients with chronic obstructive pulmonary disease (COPD) using closed gas loop GC-IMS and GC-APCI-MS
Allers, Maria; Langejuergen, Jens; Gaida, Arne; Holz, Olaf; Schuchardt, Sven; Hohlfeld, Jens M.; Zimmermann, Stefan
Journal Article
2016A plasma assisted in situ restoration process for sidewall damaged ULK dielectrics
Koehler, N.; Fischer, T.; Zimmermann, S.; Schulz, S.E.
Journal Article
2016Rating the value of COPD related breath VOCs in models created by linear discriminant analysis
Holz, O.; Gaida, A.; Nell, C.; Allers, M.; Schuchardt, S.; Zimmermann, S.; Koczulla, R.; Hohlfeld, J.M.
Abstract
2016Review of percolating and neck-based underfills with thermal conductivities up to 3 W/m-K
Brunschwiler, T.; Zürcher, J.; Zimmermann, S.; Burg, B.R.; Schlottig, G.; Chen, X.; Sinha, T.; Baum, M.; Hofmann, C.; Pantou, R.; Achen, A.; Zschenderlein, U.; Kumar, S.; Wunderle, B.; Haupt, M.; Schindler-Saefkow, F.; Strässle, R.
Conference Paper
2015Experimental and Theoretical Investigations on an in situ k-restore Process with Plasma Enhanced Fragmentation for Damaged ULK Materials
Foerster, A.; Koehler, N.; Zimmermann, S.; Fischer, T.; Wagner, C.; Schuster, J.; Gemming, S.; Schulz, S.E.; Gessner, T.
Abstract
2015Experimental investigations on a plasma assisted in situ restoration process for sidewall damaged ultra low-k dielectrics
Köhler, N.; Fischer, T.; Zimmermann, S.; Schulz, S.E.
Conference Paper
2015A high-efficiency hybrid high-concentration photovoltaic system
Zimmermann, S.; Helmers, H.; Tiwari, M.K.; Paredes, S.; Michel, B.; Wiesenfarth, M.; Bett, A.W.; Poulikakos, D.
Journal Article
2015On treatment of ultra-low-k SiCOH in CF4 plasmas: Correlation between the concentration of etching products and etching rate
Lang, N.; Zimmermann, S.; Zimmermann, H.; Macherius, U.; Uhlig, B.; Schaller, M.; Schulz, S.E.; Röpcke, J.
Journal Article
2015Quantum cascade laser based monitoring of CF2 radical concentration as a diagnostic tool of dielectric etching plasma processes
Hübner, M.; Lang, N.; Zimmermann, S.; Schulz, S.E.; Buchholtz, W.; Röpcke, J.; Helden, J.H. van
Journal Article
2015Self-assembly of micro- and nano-particles by centrifugal forces and capillary bridging for 3D thermal interconnects
Hofmann, C.; Baum, M.; Bodny, F.; Wiemer, M.; Gessner, T.; Brunschwiler, T.; Zürcher, J.; Burg, B.R.; Zimmermann, S.
Conference Paper
2015Wake up MEMS for inertial sensors
Stoeckel, C.; Billep, D.; Konietzka, S.; Zimmermann, S.; Otto, T.
Conference Paper
2015Wetting behavior of plasma etch residue removal solutions on plasma damaged and repaired porous ULK dielectrics
Ahner, N.; Zimmermann, S.; Köhler, N.; Krüger, S.; Schulz, S.E.
Conference Paper
2014Adsorptionskinetik von zeolithbeschichteten Faserstrukturen
Velte, A.; Herrmann, R.; Zimmermann, S.; Andersen, O.
Conference Paper
2014Challenges of current and future advanced interconnect systems for integrated circuits
Schulz, S.E.; Ahner, N.; Fischer, T.; Koerner, H.; Oszinda, T.; Schulze, K.; Zimmermann, S.
Book Article
2014Characterization of particle beds in percolating thermal underfills based on centrifugation
Zimmermann, S.; Brunschwiler, T.; Zuercher, J.; Burg, B.; Hong, G.; Poulikakos, D.; Baum, M.; Hofmann, C.
Conference Paper
2014The dielectric response of low-k interlayer dielectric material characterized by electron energy loss spectroscopy
Singh, P.K.; Knaup, J.M.; Zimmermann, S.; Schulze, S.; Schulz, S.E.; Frauenheim, T.; Hietschold, M.
Journal Article
2014The effect of flow rate on the level of volatile organic compounds (voc) in exhaled breath
Holz, Olaf; Gaida, Arne; Schuchardt, Sven; Langejuergen, Jens; Zimmermann, Stefan; Hohlfeld, Jens Michael
Abstract
2014Influence of porosity and methyl doping inside silica network
Singh, P.K.; Knaup, J.M.; Zimmermann, S.; Schulze, S.; Schulz, S.E.; Frauenheim, T.; Hietschold, M.
Journal Article
2014Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy
Singh, P.K.; Zimmermann, S.; Waechtler, T.; Schulze, Steffen; Schulz, S.E.; Hietschold, Michael
Conference Paper
2013Advanced liquid cooling in HCPVT systems to achieve higher energy efficiencies
Zimmermann, S.; Helmers, H.; Tiwari, M.K.; Escher, W.; Paredes, S.; Neves, P.; Poulikakos, D.; Wiesenfarth, M.; Bett, A.W.; Michel, B.
Conference Paper
2013Determination of surface energy characteristics of plasma processed ultra low-k dielectrics for optimized wetting in wet chemical plasma etch residue removal
Ahner, N.; Zimmermann, S.; Schaller, M.; Schulz, S.E.
Conference Paper
2012Determination of phthalic acid diesters in human milk at low ppb levels
Zimmermann, Simone; Gruber, Ludwig; Schlummer, Martin; Smolic, Sonja; Fromme, Hermann
Journal Article
2012Improved adhesion at titanium surfaces via laser-induced surface oxidation and roughening
Zimmermann, S.; Specht, U.; Spiess, L.; Romanus, H.; Krischok, S.; Himmerlich, M.; Ihde, J.
Journal Article
2012Influence of thermal cycles on the silylation process for recovering k-value and chemical structure of plasma damaged ultra-low-k materials
Fischer, T.; Ahner, N.; Zimmermann, S.; Schaller, M.; Schulz, S.E.
Journal Article, Conference Paper
2012A less damaging patterning regime for a successful integration of ultra low-k materials in modern nanoelectronic devices
Zimmermann, S.; Ahner, N.; Fischer, T.; Schaller, M.; Schulz, S.E.; Gessner, T.
Conference Paper
2012A Low Damage Patterning Scheme for Ultra Low-k Dielectrics
Zimmermann, S.; Ahner, N.; Fischer,T.; Oszinda,T.; Uhlig, B.; Schulz, S.E.; Gessner,T.
Journal Article
2012Oberflächenvorbehandlung von CFK-Aluminium-Übergangsstrukturen
Specht, U.; Zimmermann, S.; Clausen, J.; Ihde, J.; Mayer, B.
Conference Paper
2012Optimized wetting behavior of water-based cleaning solutions for plasma etch residue removal by application of surfactants
Ahner, N.; Zimmermann, S.; Schaller, M.; Schulz, S.E.
Conference Paper
2011Influence of the additives argon, O-2, C4F8, H-2, N-2 and CO on plasma conditions and process results during the etch of SiCOH in CF4 plasma
Zimmermann, S.; Ahner, N.; Blaschta, F.; Schaller, M.; Zimmermann, H.; Rülke, H.; Lang, N.; Röpcke, J.; Schulz, S.E.; Geßner, T.
Conference Paper, Journal Article
2011Influence of thermal cycles on the silylation process for recovering k-value and chemical structure of plasma damaged ultra-low-k materials
Fischer, T.; Ahner, N.; Zimmermann, S.; Schaller, M.; Schulz, S.E.
Conference Paper
2011Phthalates and their metabolites in breast milk - results from the Bavarian Monitoring of Breast Milk (BAMBI)
Fromme, H.; Gruber, L.; Seckin, E.; Raab, U.; Zimmermann, S.; Kiranoglu, M.; Schlummer, M.; Schwegler, U.; Smolic, S.; Völkel, W.
Journal Article
2011Prediction of wafer homogeneity maps using a virtual metrology scheme consisting of time resolved OES measurements and a neural network
Zimmermann, S.; Reich, R.; Zacher, M.; Schulz, S.E.; Gessner, T.
Conference Paper
2010Analysis of the impact of different additives during etch processes of dense and porous low-k with OES and QMS
Zimmermann, S.; Ahner, N.; Blaschta, F.; Schaller, M.; Rülke, H.; Schulz, S.E.; Gessner, T.
Conference Paper
2010Optimized wetting behavior of water-based cleaning solutions for plasma etch residue removal by application of surfactants
Ahner, N.; Zimmermann, S.; Schaller, M.; Schulz, S.E.
Conference Paper
2009Improvement of etch processes for SiCOH materials with novel in situ diagnostic and evaluation methods
Zimmermann, S.; Ahner, N.; Blaschta, F.; Schaller, M.; Zimmermann, H.; Rülke, H.; Lang, N.; Röpcke, J.; Schulz, S.E.; Gessner, T.
Conference Paper
2008Generation and evaluation of movement protein-specific single-chain antibodies for delaying symptoms of Tomato spotted wilt virus infection in tobacco
Zhang, M.Y.; Zimmermann, S.; Fischer, R.; Schillberg, S.
Journal Article
2008Investigation of etch processes of dense and porous low-k dielectrics using OES and QMS as in situ diagnostic methods
Zimmermann, S.; Blaschta, F.; Schaller, M.; Rülke, H.; Schulz, S.E.; Gessner, T.
Conference Paper
2008Plantibody-mediated inhibition of the potato leafroll virus P1 protein reduces virus accumulation
Nickel, H.; Kawchuk, L.; Twyman, R.M.; Zimmermann, S.; Junghans, H.; Winter, S.; Fischer, R.; Prüfer, D.
Journal Article
2007Characterization of sputtered Ta and TaN films by spectroscopic ellipsometry
Waechtler, T.; Gruska, B.; Zimmermann, S.; Schulz, S.E.; Gessner, T.
Conference Paper
2007Entwicklung einer Technologie zur Herstellung eines neuartigen Substrates mit strukturierten vergrabenen Kobaltdisilizidschichten für die gemeinsame Integration bipolarer und unipolarer Bauteile auf einem SOI-Wafer
Zimmermann, S.
Dissertation
2007Influence of barrier crystallization on CV characteristics of MIS structures
Ecke, R.; Rennau, M.; Zimmermann, S.; Schulz, S.E.; Gessner, T.
Conference Paper
2007Roughness improvement of the COSi2/Si-interface for an application as buried silicide
Zimmermann, S.; Zhao, Q.T.; Höhnemann, H.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2006Different approaches to integrate patterned buried CoSi2 layers in SOI substrates
Zimmermann, S.; Zhao, Q.T.; Höhnemann, H.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2006Plantibody-based disease resistance in plants
Zimmermann, S.; Emans, N.; Fischer, R.; Schillberg, S.
Book Article
2006Thermal stability of CoSi2 layers implemented in a silicon-on-insulator substrate
Zhao, Q.T.; Bay, H.L.; Zimmermann, S.; Wiemer, M.; Kaufmann, C.; Trui, B.; Höhnemann, H.; Dudek, V.; Mantl, S.
Journal Article
2005Characterization of WC-VC-Co thermal spray powders and coatings
Luyckx, S.; Machio, C.N.; Hermann, M.; Zimmermann, S.; Keller, H.
Conference Paper
2005Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications
Zimmermann, S.; Zhao, Q.T.; Trui, B.; Wiemer, M.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper, Journal Article
2005Fabrication of SOI substrates with buried silicide layers for BiCMOS applications
Wiemer, M.; Zimmermann, S.; Zhao, Q.T.; Trui, B.; Kaufmann, C.; Mantl, S.; Dudek, V.; Gessner, T.
Conference Paper
2004Control of low frequency enclosed, harmonic sound fields with active absorbers
Zimmermann, S.; Joseph, P.; Leistner, P.
Conference Paper
2004Tribological behavior of HVOF-sprayed Cr3C2-NiCr and TiC-based coatings under high-temperature dry sliding conditions
Berger, L.-M.; Woydt, M.; Zimmermann, S.; Keller, H.; Schwier, G.; Enzl, R.
Conference Paper
2003Control performance of active absorbers in enclosed, harmonic sound fields
Zimmermann, S.
Dissertation
2003Microstructure and properties of HVOF-sprayed TiC-based coatings
Berger, L.-M.; Zimmermann, S.; Keller, H.; Schwier, G.; Scholl, R.; Thiele, S.; Nebelung, M.; Enzl, R.
Conference Paper
2003Schalldaempferkulisse
Jauer, A.; Zimmermann, S.; Brandstaett, P.; Leistner, P.; Fuchs, H.V.
Patent
2003Verfahren und Vorrichtung zur Schallfeld-Audiometrie
Leistner, P.; Zickmantel, F.; Fuchs, H.V.; Leistner, M.; Bay, K.; Zimmermann, S.
Patent
2002The potato granule bound starch synthase chloroplast transit peptide directs recombinant proteins to plastids
Hoppmann, V.; Fiore, S. di; Zimmermann, S.; Emans, N.; Rademacher, T.; Fischer, R.; Schillberg, S.
Journal Article
2002Uptake of a fluorescent marker in plant cells is sensitive to brefeldin A and wortmannin
Emans, N.; Zimmermann, S.; Fischer, R.
Journal Article
2002Zuluftelement
Leistner, P.; Leistner, M.; Zimmermann, S.
Patent
2001Antibody-based resistance to plant pathogens
Schillberg, S.; Zimmermann, S.; Zhang, M.Y.; Fischer, R.
Journal Article
2001Compact and self-contained active resonance silencers
Leistner, P.; Ng, C.F.; Zimmermann, S.; Leistner, M.
Conference Paper
2001GST fusion proteins cause false positives during selection of viral movement protein specific single chain antibodies
Zhang, M.Y.; Schillberg, S.; Zimmermann, S.; Liao, Y.C.; Breuer, G.; Fischer, R.
Journal Article
2000Plasma membrane display of anti-viral single chain Fv fragments confers resistance to tobacco mosaic virus
Schillberg, S.; Zimmermann, S.; Findley, K.; Fischer, R.
Journal Article
1999Advanced silicon bulk micromachining for angular rate sensor
Wiemer, M.; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W.
Conference Paper
1999Apoplastic and cytosolic expression of full-size antibodies and antibody fragments in Nicotiana tabacum
Schillberg, S.; Zimmermann, S.; Voss, A.; Fischer, R.
Journal Article
1999µCORS - a bulk micromachined gyroscope based on coupled resonators
Breng, U.; Gutmann, W.; Leinfelder, P.; Ryrko, B.; Zimmermann, S.; Billep, D.; Gessner, T.; Hiller, K.; Wiemer, M.
Conference Paper
1999Engineering and expression of bispecific single chain Fv fragments in transgenic tobacco plants
Fischer, R.; Schumann, D.; Zimmermann, S.; Drossard, J.; Sack, M.; Schillberg, S.
Journal Article
1999Expression and characterization of bispecific single chain Fv fragments produced in transgenic plants
Fischer, R.; Schumann, D.; Zimmermann, S.; Drossard, J.; Sack, M.; Schillberg, S.
Journal Article
1999Kapazitiver Drehratensensor auf der Basis einer Stimmgabel mit gekoppeltem Resonator
Wiemer, M; Hiller, K.; Gessner, T.; Billep, D.; Ryrko, B.; Breng, U.; Zimmermann, S.; Gutmann, W.
Conference Paper
1998Active absorbers in small rooms
Krüger, J.; Leistner, P.; Zimmermann, S.
Conference Paper

 

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