Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Device and method for coating substrates with planar or shaped surfaces by magnetron sputtering
Vergöhl, Michael; Pflug, Andreas; Bruns, Stefan; Kaiser, André; Melzig, Thomas; Zickenrott, Tobias
Patent
2020Vorrichtung und Verfahren zur Herstellung von Schichten mit verbesserter Uniformität bei Beschichtungsanlagen mit horizontal rotierender Substratführung
Vergöhl, Michael; Pflug, Andreas; Bruns, Stefan; Zickenrott, Tobias
Patent
2019Simulation assisted deposition of optical filters onto 3D substrates by magnetron-sputtering
Pflug, Andreas; Bruns, Stefan; Zickenrott, T.; Britze, Chris; Vergöhl, Michael
Conference Paper
2016Deposition of abrasion resistant single films and antireflective coatings on sapphire
Bruns, S.; Vergöhl, M.; Zickenrott, T.; Bräuer, G.
Journal Article
2016Magnetron sputtering of precision optical coatings enabled by process stability of rotatable cathodes
Bruns, S.; Vergöhl, M.; Zickenrott, T.
Conference Paper
2015Deposition of abrasion resistant single films and antireflective coatings on sapphire
Bruns, S.; Vergöhl, M.; Zickenrott, T.; Bräuer, G.
Conference Paper
2015Recent developments in precision optical coatings prepared by cylindrical magnetron sputtering
Bruns, S.; Vergöhl, M.; Zickenrott, T.
Conference Paper
2015Verfahren und Vorrichtung zur Herstellung unformer Schichten auf bewegten Substraten und derart hergestellten Schichten
Vergöhl, Michael; Rademacher, Daniel; Zickenrott, Tobias
Patent
2014Numerical optimization of baffles for sputtering optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article
2014Verfahren und Vorrichtung zur Beeinflussung der Schichtdickenverteilung auf Substraten sowie derart beschichtete Substrate
Vergöhl, Michael; Rademacher, Daniel; Zickenrott, Tobias
Patent
2013Numerical shaper optimization for sputtered optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article
2013Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Journal Article
2012Computational optimization of the thickness uniformity of magnetron-sputtered optical layers by means of particle in cell plasma simulations
Vergöhl, M.; Pflug, A.; Rademacher, D.; Zickenrott, T.
Conference Paper
2012Manufacturing of high-precision optical coatings using a novel sputtering system
Rademacher, D.; Kreher, S.; Rudin, M.; Vergöhl, M.; Zickenrott, T.
Conference Paper
2011New sputtering concept for optical precision coatings
Rademacher, D.; Bräuer, G.; Vergöhl, M.; Fritz, B.; Zickenrott, T.
Conference Paper