Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Electrostatic clamping with an EUVL mask chuck: Particle issues
Kalkowski, G.; Zeuske, J.R.; Risse, S.; Müller, S.; Peschel, T.; Rohde, M.
Journal Article, Conference Paper
2010Assessing the mask clamping ability of a low thermal expansion material chuck
Zeuske, J.R.; Vukkadala, P.; Engelstad, R.L.; Mikkelson, A.R.; Kalkowski, G.; Risse, S.; Müller, S.
Conference Paper, Journal Article
2010Determination of local electrostatic forces for EUVL mask chucks
Kalkowski, G.; Peschel, T.; Risse, S.; Müller, S.; Engelstad, R.L.; Zeuske, J.R.; Vukkadala, P.
Conference Paper, Journal Article