Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Optische Anordnung zur spektralen Zerlegung von Licht
Flügel-Paul, Thomas; Harzendorf, Torsten; Michaelis, Dirk; Zeitner, Uwe Detlef
Patent
2016Verfahren und Vorrichtung zur interferometrischen Prüfung
Beier, Matthias; Stumpf, Daniela; Gebhardt, Andreas; Risse, Stefan; Zeitner, Uwe Detlef
Patent
2015High-resolution proximity lithography for nano-optical components
Stürzebecher, Lorenz; Fuchs, Frank; Zeitner, Uwe Detlef; Tünnermann, Andreas
Journal Article
2015Mask Aligner Lithography for TSV-Structures using a Double-Sided (structured) Photomask
Weichelt, Tina; Stuerzebecher, Lorenz; Zeitner, Uwe Detlef
Conference Paper
2014250 nm period grating transferred by proximity i-line mask-aligner lithography
Bourgin, Yannick; Käsebier, Thomas; Zeitner, Uwe Detlef
Journal Article
2014Efficient fabrication of complex nano-optical structures by E-beam lithography based on charakter projection
Zeitner, Uwe Detlef; Harzendorf, Torsten; Fuchs, Frank; Banasch, Michael; Schmidt, Holger; Kley, Ernst-Bernhard
Conference Paper
2014Fast character projection electron beam lithography for diffractive optical elements
Harzendorf, Torsten; Fuchs, Frank; Banasch, Michael; Zeitner, Uwe Detlef
Conference Paper
2014High-refractive-index gratings for spectroscopic and laser applications
Zeitner, Uwe Detlef; Fuchs, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Conference Paper
2014Pulse compression grating fabrication by diffractive proximity photolithography
Stürzebecher, Lorenz; Fuchs, Frank; Harzendorf, Torsten; Zeitner, Uwe Detlef
Journal Article
2013Highly efficient broadband blazed grating in resonance domain
Oliva, Maria; Michaelis, Dirk; Fuchs, Frank; Tünnermann, Andreas; Zeitner, Uwe Detlef
Journal Article
2012Beugungsgitter und Verfahren zu dessen Herstellung
Fuchs, Frank; Zeitner, Uwe Detlef; Kley, E.-B.
Patent
2012Direct wafer bonding for encapsulation of fused silica optical gratings
Kalkowski, Gerhard; Zeitner, Uwe Detlef; Benkenstein, Tino; Fuchs, J. Hans-Jörg; Rothhardt, Carolin; Eberhardt, Ramona
Journal Article, Conference Paper
2012Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization
Burmeister, Frank; Steenhusen, Sönke; Houbertz, Ruth; Zeitner, Uwe Detlef; Nolte, Stefan; Tünnermann, Andreas
Journal Article
2012Novel gap alignment sensor for high-resolution proximity lithography
Harzendorf, Torsten; Stürzebecher, Lorenz; Zeitner, Uwe Detlef
Conference Paper
2012Reflexionsbeugungsgitter und Verfahren zu dessen Herstellung
Fuchs, Frank; Zeitner, Uwe Detlef
Patent
2012Twyman-Green-type integrated laser interferometer array for parallel MEMS testing
Oliva, Maria; Michaelis, Dirk; Dannberg, Peter; Józwik, Michal; Lizewski, Kamil; Kujawiñska, Malgorzata; Zeitner, Uwe Detlef
Journal Article