Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales
Sheremet, E.; Meszmer, P.; Blaudeck, T.; Hartmann, S.; Wagner, C.; Ma, B.; Hermann, S.; Wunderle, B.; Schulz, S.E.; Hietschold, M.; Rodriguez, R.D.; Zahn, D.R.T.
Journal Article
2019Exchange bias and diffusion processes in laser annealed CoFeB/IrMn thin films
Sharma, A.; Hoffmann, M.A.; Matthes, P.; Busse, S.; Selyshchev, O.; Mack, P.; Exner, H.; Horn, A.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.
Journal Article
2019Iron(III) β-diketonates: CVD precursors for iron oxide film formation
Pousaneh, E.; Korb, M.; Assim, K.; Rüffer, T.; Dzhagan, V.; Noll, J.; Zahn, D.R.T.; Schulz, S.E.; Lang, H.
Journal Article
2019Magnetic tunnel junctions: Laser annealing versus oven annealing
Sharma, A.; Hoffmann, M.A.; Matthes, P.; Koehler, N.; Busse, S.; Mueller, M.; Exner, H.; Schulz, S.E.; Zahn, D.R.T.; Salvan, G.
Journal Article
2018β-Ketoiminato-based copper(II) complexes as CVD precursors for copper and copper oxide layer formation
Pousaneh, E.; Korb, M.; Dzhagan, V.; Weber, M.; Noll, J.; Mehring, M.; Zahn, D.R.T.; Schulz, S.E.; Lang, H.
Journal Article
2018Magnesium β-ketoiminates as CVD precursors for MgO formation
Pousaneh, E.; Rüffer, T.; Assim, K.; Dzhagan, V.; Noll, J.; Zahn, D.R.T.; Mertens, L.; Mehring, M.; Schulz, S.E.; Lang, H.
Journal Article
2018Magneto-optical spectroscopy and spectroscopic ellipsometry of Co60Fe20B20 thin films
Sharma, A.; Almeida, M.; Matthes, P.; Ecke, R.; Zahn, D.R.T.; Schulz, S.E.; Salvan, G.
Abstract
2017HED-TIE: A wafer-scale approach for fabricating hybrid electronic devices with trench isolated electrodes
Banerjee, S.; Bülz, D.; Solonenko, D.; Reuter, D.; Deibel, C.; Hiller, K.; Zahn, D.R.T.; Salvan, G.
Journal Article
2017Light-induced magnetoresistance in solution-processed planar hybrid devices measured under ambient conditions
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Zahn, D.R.T.; Salvan, G.
Journal Article
2016Effect of cleaning procedures on the electrical properties of carbon nanotube transistors - a statistical study
Tittmann-Otto, J.; Hermann, S.; Kalbacova, J.; Hartmann, M.; Toader, M.; Rodriguez, R.D.; Schulz, S.E.; Zahn, D.R.T.; Gessner, T.
Journal Article
2016Metal nanoparticles reveal the organization of single-walled carbon nanotubes in bundles
Rodriguez, R.D.; Blaudeck, T.; Kalbacova, J.; Sheremet, E.; Schulze, S.; Adner, D.; Hermann, S.; Hietschold, M.; Lang, H.; Schulz, S.E.; Zahn, D.R.T.
Journal Article
2016Tuning the reduction and conductivity of solution-processed graphene oxide by intense pulsed light
Al-Hamry, A.; Kang, H.; Sowade, E.; Dzhagan, V.; Rodriguez, R.D.; Müller, C.; Zahn, D.R.T.; Baumann, R.R.; Kanoun, O.
Journal Article
2015Back-end-of-line compatible contact materials for carbon nanotube based interconnects
Fiedler, H.; Toader, M.; Hermann, S.; Rennau, M.; Rodriguez, R.D.; Sheremet, E.; Hietschold, M.; Zahn, D.R.T.; Schulz, S.E.; Gessner, T.
Journal Article, Conference Paper
2015Integrated load detection sensor for lightweight structures based on quantum dots
Moebius, M.; Martin, J.; Poppitz, E.A.; Hartwig, M.; Dzhagan, D.; Gordan, O.D.; Lang, H.; Zahn, D.R.T.; Baumann, R.R.; Otto, T.; Gessner, T.
Conference Paper
2015Thermo-mechanical characterization of copper through-silicon vias (Cu-TSVs) using micro-Raman spectroscopy and atomic force microscopy
Bayat, P.; Vogel, D.; Rodriguez, R.D.; Sheremet, E.; Zahn, D.R.T.; Rzepka, S.; Michel, B.
Journal Article, Conference Paper
2015TSCuPc/Au hybrid trench devices. A comparative study of solution processed and thermally evaporated molecular channels
Banerjee, S.; Bülz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Salvan, G.; Zahn, D.R.T.
Abstract
2014ALD of Nickel Oxide and its Reduction to Nickel for Potential Applications in Interconnects and Spintronics
Wächtler, T.; Sharma, A.; Ahner, N.; Melzer, M.; Mueller, S.; Lehmann, D.; Schäfer, P.; Schulze, S.; Schulz, S.E.; Zahn, D.R.T.; Hietschold, M.; Gessner, T.
Conference Paper
2014ANAn UPS/IPS Study of Band Level Alignment Of a Quantum Dot Based Sensor
Tofighi, G.; Moebius, M.; Haidu, F.; Martin, J.; Dzhagan, V.M.; Spudat, C.; Otto, T.; Gessner, T.; Gordan, O.D.; Zahn, D.R.T.
Abstract
2014Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes
Fiedler, H.; Toader, M.; Hermann, S.; Rodriguez, R.D.; Sheremet, E.; Rennau, M.; Schulze, S.; Waechtler, T.; Hietschold, M.; Zahn, D.R.T.; Schulz, S.E.; Gessner, T.
Journal Article, Conference Paper
2014Flash lamp annealing of spray coated films containing oxidized or hydrogen terminated silicon nanoparticles
Seidel, F.; Toader, I.G.; Koth, S.; Fritzsche, R.; Schäfer, P.; Bülz, D.; Büchter, B.; Gordan, O.D; Freitag, H.; Jakob, A.; Buschbeck, R.; Hietschold, M.; Lang, H.; Mehring, M.; Baumann, R.R.; Zahn, D.R.T.
Journal Article
2014Optimizing quantum dot based sensor device structure by determining the band level alignment for better charge injection: a combined UPS/IPS study
Tofighi, G.; Moebius, M.; Haidu, F.; Gordan, O.D.; Martin, J.; Spudat, C.; Otto, T.; Gessner, T.; Zahn, D.R.T.
Conference Paper
2014Organic lateral trench devices fabricated by trench technology
Banerjee, S.; Richter, P.; Buelz, D.; Reuter, D.; Hiller, K.; Gessner, T.; Zahn, D.R.T.; Salvan, G.
Abstract
2014Stress analyses of high spatial Resolution on TSV and BEoL structures
Vogel, D.; Auerswald, E.; Auersperg, J.; Bayat, P.; Rodriguez, R.D.; Zahn, D.R.T.; Rzepka, S.; Michel, B.
Conference Paper, Journal Article
2014Structural health monitoring with quantum dots
Moebius, M.; Martin, J.; Poppitz, E.A.; Ueberfuhr, P.; Tofighi, G.; Gordan, O.D.; Dzhagan, V.M.; Lang, H.; Baumann, R.R.; Zahn, D.R.T.; Otto, T.; Gessner, T.; Kroll, L.
Conference Paper
2013Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications
Melzer, M.; Waechtler, T.; Müller, S.; Fiedler, H.; Hermann, S.; Rodriguez, R.D.; Villabona, A.; Sendzik, A.; Mothes, R.; Schulz, S.E.; Zahn, D.R.T.; Hietschold, M.; Lang, H.; Gessner, T.
Journal Article
2013Enhancement of the thermoelectric properties of PEDOT:PSS thin films by post-treatment
Luo, J.; Billep, D.; Waechtler, T.; Otto, T.; Toader, M.; Gordan, O.; Sheremet, E.; Martin, J.; Hietschold, M.; Zahn, D.R.T.; Gessner, T.
Journal Article
2013Laterally stacked organic devices fabricated by trench technology
Reuter, D.; Banerjee, S.; Fronk, M.; Salvan, G.; Hiller, K.; Zahn, D.R.T.; Gessner, T.
Conference Paper
2013Magneto-optical Kerr effect studies of Cu2O/nickel heterostructures
Salvan, G.; Robaschik, P.; Fronk, M.; Müller, S.; Waechtler, T.; Schulz, S.E.; Mothes, R.; Lang, H.; Schubert, C.; Thomas, S.; Albrecht, M.; Zahn, D.R.T.
Journal Article
2013Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments
Schondelmaier, G.; Hartmann, S.; May, D.; Shaporin, A.; Voigt, S.; Rodriguez, R.D.; Gordan, O.D.; Zahn, D.R.T.; Mehner, J.; Hiller, K.; Wunderle, B.
Conference Paper
2012Distinguishing between individual contributions to the via resistance in carbon nanotubes based interconnects
Fiedler, H.; Toader, M.; Hermann, S.; Rodriguez, R.D.; Sheremet, E.; Rennau, M.; Schulze, S.; Waechtler, T.; Hietschold, M.; Zahn, D.R.T.; Schulz, S.E.; Gessner, T.
Journal Article
2012Growth of carbon nanotube forests between a bi-metallic catalyst layer and a SiO2 substrate to form a self-assembled carbon-metal heterostructure
Hermann, S.; Schulze, S.; Ecke, R.; Liebig, A.; Schaefer, P.; Zahn, D.R.T.; Albrecht, M.; Hietschold, M.; Schulz, S.E.; Gessner, T.
Journal Article
2012Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2
Fronk, M.; Müller, S.; Waechtler, T.; Schulz, S.E.; Mothes, R.; Lang, H.; Zahn, D.R.T.; Salvan, G.
Journal Article, Conference Paper
2012Nanoscale optical and electrical characterization of horizontally aligned single-walled carbon nanotubes
Rodriguez, R.D.; Toader, M.; Hermann, S.; Sheremet, E.; Mueller, S.; Gordan, O.D.; Yu, H.; Schulz, S.E.; Hietschold, M.; Zahn, D.R.T.
Journal Article, Conference Paper
2011Atomic layer deposition of iridium thin films and their application in gold electrodeposition
Szeghalmi, A.; Arnold, M.; Berger, A.; Schammelt, N.; Füchsel, K.; Knez, M.; Kley, E.-B.; Zahn, D.R.T.; Tünnermann, A.
Conference Paper
2011Thermal ALD of Cu via reduction of CuxO films for the advanced metallization in spintronic and ULSI interconnect systems
Mueller, S.; Waechtler, T.; Tuchscherer, A.; Mothes, R.; Gordan, O.; Lehmann, D.; Haidu, F.; Ogiewa, M.; Gerlich, L.; Ding, S.-F.; Schulz, S.E.; Gessner, T.; Lang, H.; Zahn, D.R.T.; Qu, X.-P.
Conference Paper
2009Growth and characterization of thin films prepared from perfluoro-isopropyl-substituted perfluorophthalocyanines
Keil, C.; Tsaryova, O.; Lapok, L.; Himcinschi, C.; Wöhrle, D.; Hild, O.R.; Zahn, D.R.T.; Gorun, S.M.; Schlettwein, D.
Journal Article
2008Spectroscopic ellipsometry study of thin diffusion barriers of TaN and Ta for Cu interconnects in integrated circuits
Rudra, S.; Friedrich, M.; Louis, S.; Gordan, O.; Waechtler, T.; Zahn, D.R.T.
Conference Paper, Journal Article
2005Scaling down thickness of ULK materials for 65 nm node and below and its effect on electrical performance
Frühauf, S.; Himcinschi, C.; Rennau, M.; Schulze, K.; Schulz, S.E.; Friedrich, M.; Gessner, T.; Zahn, D.R.T.; Le, Q.T.; Caluwaerts, R.
Conference Paper, Journal Article
2004Contributions to the static dielectric constant of low-k xerogel films derived from ellipsometry and IR spectroscopy
Himcinschi, C.; Friedrich, M.; Frühauf, S.; Schulz, S.E.; Gessner, T.; Zahn, D.R.T.
Conference Paper, Journal Article
2001Silicon oxide in Si-Si bonded wafers
Himcinschi, C.; Milekhin, A.; Friedrich, M.; Hiller, K.; Wiemer, M; Gessner, T.; Schule, S.; Zahn, D.R.T.
Journal Article
1999Infrared and Raman studies of confined and interface optical phonons in short-period GaAs/AlAs superlattices with a grating coupler
Milekhin, A.G.; Rösch, M.; Batke, E.; Zahn, D.R.T.; Köhler, K.; Ganser, P.; Preobrazhenskij, V.; Semyagin, B.
Journal Article
1999Infrared study of the Si surfaces and bonded Si wafers
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T.
Journal Article
1999Infrared study of the Si surfaces and buried interfaces
Milekhin, A.; Friedrich, M.; Wiemer, M; Hiller, K.; Gessner, T.; Zahn, D.R.T.
Conference Paper
1999A study of the interface states in MIS-structures with thin SiO2 and SiOxNy layers using deep level transient spectroscopy
Beyer, R.; Burghardt, H.; Thomas, E.; Reich, R.; Zahn, D.R.T.; Gessner, T.
Journal Article
1994Assessment of clustering induced internal strain in AlInAs on InP grown by molecular beam epitaxy
Hase, A.; Kunzel, H.; Zahn, D.R.T.; Richter, W.
Journal Article