Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2011Prediction of wafer homogeneity maps using a virtual metrology scheme consisting of time resolved OES measurements and a neural network
Zimmermann, S.; Reich, R.; Zacher, M.; Schulz, S.E.; Gessner, T.
Conference Paper
2009Surfactants as an additive to wet cleaning solutions for plasma etch residue removal: Compatibility to a porous CVD-SiCOH ultra low-k dielectric material
Ahner, N.; Schulz, S.E.; Zacher, M.
Conference Paper
2004Große und komplexe Teile zuverlässig erfassen
Bauer, N.; Notni, G.; Zacher, M.
Journal Article
2004Integration eines optischen 3D-Sensors in ein Koordinatenmessgerät für die Digitalisierung komplexer Oberflächen
Zacher, M.
Dissertation
2003New integrated approach for repairing and redesigning heavy forming tools
Bichmann, S.; Zacher, M.; Glaser, U.; Pfeifer, T.
Conference Paper
2003New method for confocal microscopy and its endoscopic application
Krohne, I.; Pfeifer, T.; Bitte, F.; Zacher, M.; Meier, R.
Conference Paper
2003Rundum 3D-Messsysteme für große und komplexe Teile
Bauer, N.; Notni, G.; Zacher, M.
Journal Article
2002InterChip via technology by using copper for vertical system integration
Ramm, P.; Bonfert, D.; Ecke, R.; Iberl, F.; Klumpp, A.; Riedel, S.; Schulz, S.E.; Wieland, R.; Zacher, M.; Gessner, T.
Conference Paper
2002New concept for the development of a confocal endomicroscope
Krohne, I.; Pfeifer, T.; Zacher, M.; Depiereux, F.; Stepp, H.
Conference Paper, Journal Article
2002Object digitalization using a scanning fringe projection system
Zacher, M.; Krohne, I.; Glaser, U.; Pfeifer, T.
Conference Paper