Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018A double-stream Xe:He jet plasma emission in the vicinity of 6.7 nm
Chkhalo, N.I.; Garakhin, S.A.; Golubev, S.V.; Lopatin, A.Y.; Nechay, A.N.; Pestov, A.E.; Salashchenko, N.N.; Toropov, M.N.; Tsybin, N.N.; Vodopyanov, A.V.; Yulin, S.
Journal Article
2017Optical properties and oxidation resistance of different transition metals for soft X-ray and EUV applications
Müller, R.; Yulin, S.; Naujok, P.; Kaiser, N.; Tünnermann, A.
Journal Article
2017Spiegel zur Reflexion von EUV-Strahlung in Strahlung im Spektralbereich zwischen 6 nm und 10 nm und optische Anordnung mit dem Spiegel
Naujok, Philipp; Yulin, Sergiy; Kaiser, Norbert; Wezyk, Alexander von; Bergmann, Klaus
Patent
2017Spiegel zur Reflexion von EUV-Strahlung mit Spannungskompensation und Verfahren zu dessen Herstellung
Kaiser, Norbert; Murray, Kevin; Naujok, Philipp; Yulin, Sergiy
Patent
2017Thermal stability of B-based multilayer mirrors for next generation lithography
Naujok, P.; Murray, K.; Yulin, S.; Patzig, C.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Interface characterization in B-based multilayer mirrors for next generation lithography
Naujok, P.; Yulin, S.; Müller, R.; Kaiser, N.; Tünnermann, A.
Journal Article
2016Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering
Trost, M.; Schröder, S.; Yulin, S.; Duparre, A.
Conference Paper
2015Advanced coatings for next generation lithography
Naujok, Philipp; Yulin, Sergiy A.; Kaiser, Norbert; Tünnermann, Andreas
Conference Paper
2015La/B4C multilayer mirrors with an additional wavelength suppression
Naujok, Philipp; Yulin, Sergiy; Bianco, Anna; Mahne, Nicola; Kaiser, Norbert; Tünnermann, Andreas
Journal Article
2014Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser
Bleiner, David; Yulin, Sergiy; Martynczuk, Julia; Ruiz-Lopez, Mabel; Arbelo, Yunieski; Balmer, Jürg E.; Günther, Detlef
Journal Article
2014Optical properties of unprotected and protected sputtered silver films: Surface morphology versus UV/VIS reflectance
Jobst, Paul Johannes; Stenzel, Olaf; Modsching, N.; Yulin, Sergiy; Wilbrandt, Steffen; Schürmann, Mark; Gäbler, Dieter; Kaiser, Norbert; Tünnerman, Andreas
Journal Article
2013A compact laboratory transmission X-ray microscope for the water window
Legall, H.; Stiel, H.; Blobel, G.; Seim, C.; Baumann, J.; Yulin, S.; Esser, D.; Hoefer, M.; Wiesemann, U.; Wirtz, M.; Schneider, G.; Rehbein, S.; Hertz, H.M.
Journal Article, Conference Paper
2013Lifetime and refurbishment of multilayer LPP collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Kaiser, Norbert; Tünnerman, Andreas; Böwering, Nobert R.; Ershov, Alex I.; Dea, Silvia de; Hoffmann, Kay; Fontaine, Bruno la; Fomenkov, Igor V.; Brandt, David
Conference Paper
2013Multilayer-Spiegel für den EUV-Spektralbereich
Yulin, Sergiy; Nesterenko, Viatcheslav; Kaiser, Norbert
Patent
2012Compact x-ray microscope for the water window based on a high brightness laser plasma source
Legall, H.; Blobel, G.; Stiel, H.; Sandner, W.; Seim, C.; Takman, P.; Martz, D.H.; Selin, M.; Vogt, U.; Hertz, H.M.; Esser, D.; Sipma, H.; Luttmann, J.; Höfer, M.; Hoffmann, H.D.; Yulin, S.; Feigl, T.; Rehbein, S.; Guttmann, P.; Schneider, G.; Wiesemann, U.; Wirtz, M.; Diete, W.
Journal Article
2012Optical and structural properties of Nb2O5-SiO2 mixtures in thin films
Janicki, V.; Sancho-Parramon, J.; Yulin, S.; Flemming, M.; Chuvilin, A.
Journal Article
2012Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D.
Conference Paper
2012Optical reflector coatings for astronomical applications from EUV to IR
Schürmann, Mark; Jobst, Paul Johannes; Yulin, Sergiy; Feigl, Torsten; Heiße, Hanno; Wilbrandt, Steffen; Stenzel, Olaf; Gebhardt, Andreas; Risse, Stefan; Kaiser, Norbert
Conference Paper
2012Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks
Filatova, E.O.; Kozhevnikov, I.V.; Sokolov, A.A.; Ubyivovk, E.V.; Yulin, S.; Gorgoi, M.; Schäfers, F.
Journal Article
2011Optics contamination studies in support of high-throughput EUV lithography tools
Hill, S.B.; Faradzhev, N.S.; Richter, L.J.; Grantham, S.; Tarrio, C.; Lucatorto, T.B.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Feigl, T.
Conference Paper
2011Plasma ion assisted deposition of hafnium dioxide using argon and xenon as process gases
Stenzel, O.; Wilbrandt, S.; Yulin, S.; Kaiser, N.; Held, M.; Tünnermann, A.; Biskupek, J.; Kaiser, U.
Journal Article
2011Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W.
Journal Article
2011Study on the lifetime of Mo/Si multilayer optics with pulsed EUV-source at the ETS
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C.
Conference Paper
2010Beschichtungen für die EUV-Lithografie
Feigl, T.; Perske, M.; Pauer, H.; Yulin, S.; Schürmann, M.; Nesterenko, V.; Schröder, S.; Trost, M.; Duparré, A.; Kaiser, N.
Conference Paper
2010A journey from ancient China bronze mirrors to picometer shaped interference coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Yulin, S.
Journal Article
2010Kollektorbeschichtungen für die EUV-Lithographie
Perske, M.; Pauer, H.; Yulin, S.; Trost, M.; Schröder, S.; Duparre, A.; Feigl, T.; Kaiser, N.
Journal Article
2010Laterally graded Mo/Si multilayer for a 5 steradian EUV collector
Perske, M.; Pauer, H.; Yulin, S.; Nesterenko, V.; Schürmann, M.; Feigl, T.; Kaiser, N.
Conference Paper
2010Multi-technique study of carbon contamination and cleaning of Mo/Si multilayer optics exposed to pulsed EUV radiation
Schürmann, M.; Yulin, S.; Nesterenko, V.; Feigl, T.; Kaiser, N.; Tkachenko, B.; Schürmann, M.C.
Conference Paper
2009Atomic ordering in TiO2 thin films studied by X-ray reflection spectroscopy
Filatova, E.; Taracheva, E.; Shevchenko, G.; Sokolov, A.; Kozhevnikov, I.; Yulin, S.; Schaefers, F.; Braun, W.
Journal Article
2009Multilayer interference coatings for EUVL
Yulin, S.
Book Article
2008Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments
Hill, S.B.; Faradzhev, N.S.; Tarrio, C.; Lucatorto, T.B.; Madey, T.E.; Yakshinskiy, B.V.; Loginova, E.; Yulin, S.
Conference Paper
2008Effect of anomalous transmittance in EUV multilayer optics
Kozhevnikov, I.; Yulin, S.; Feigl, T.; Kaiser, N.
Journal Article
2008Enhanced reflectivity and stability of high-temperature LPP collector mirrors
Feigl, T.; Yulin, S.; Perske, M.; Pauer, H.; Schürmann, M.; Kaiser, N.; Böwering, N.R.; Khodykin, O.V.; Fomenkov, I.V.; Brandt, D.C.
Conference Paper
2008Extreme-ultraviolet-induced oxidation of Mo/Si multilayers
Benoit, N.; Schroeder, S.; Yulin, S.; Feigl, T.; Duparre, A.; Kaiser, N.; Tünnermann, A.
Journal Article
2008High-performance EUV multilayer optics
Kaiser, N.; Yulin, S.; Perske, M.; Feigl, T.
Conference Paper
2008Hochreflektierende EUV/Röntgen-Mehrschichtspiegel
Yulin, S.; Feigl, T.; Benoit, N.; Perske, M.; Taracheva, E.; Schröder, S.; Nesterenko, V.; Kaiser, N.
Journal Article
2008Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.; Fang, M.; Chandhok, M.
Conference Paper
2008Structure and stressed state of molybdenum layers in Mo/Si multilayers
Pinegyn, V.; Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2008The structure of Mo/Si multilayers prepared in the conditions of ionic assistance
Zubarev, E.N.; Kondratenko, V.V.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2007EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A.
Conference Paper
2007High-performance multilayer coatings for 106 nm
Taracheva, E.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2007The structure, diffusion and phase formation in Mo/Si multilayers with stressed Mo layers
Zubarev, E.N.; Zhurba, A.V.; Kondratenko, V.V.; Pinegyn, V.I.; Sevryukova, V.A.; Yulin, S.A.; Feigl, T.; Kaiser, N.
Journal Article
2007Thermisch stabiler Multilayer-Spiegel fuer den EUV-Spektralbereich
Benoit, N.; Feigl, T.; Yulin, S.; Kaiser, N.
Patent
2006EUV multilayer mirrors with enhanced stability
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Conference Paper, Journal Article
2006High-reflectivity Cr/Sc multilayer condenser for compact soft x-ray microscopy
Stollberg, H.; Yulin, S.; Takman, P.A.C.; Hertz, H.M.
Journal Article
2006High-temperature LPP collector mirror
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.; Böwering, N.; Ershov, A.; Khodykin, O.; Viatella, J.; Bruzzone, K.; Fomenkov, I.; Myers, D.; Brandt, D.
Conference Paper
2006Im EUV-Spektralbereich reflektierender Spiegel
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S.
Patent
2006Interface-engineered EUV multilayer mirrors
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2006Transmissionsfilter fuer den EUV-Spektralbereich
Kozhevnikov, I.; Kaiser, N.; Yulin, S.; Feigl, T.
Patent
2005EUV/soft x-ray multilayer optics
Yulin, S.; Feigl, T.; Benoit, N.; Kaiser, N.
Conference Paper
2005High-performnace Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005High-temperature multilayers
Yulin, S.; Benoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Interface-engineered multilayer mirrors
Yulin, S.; Bernoit, N.; Feigl, T.; Kaiser, N.
Conference Paper
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Journal Article
2005New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2005Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2005Reflektierende Schichtenfolge mit Barriereschichten
Yulin, S.; Kaiser, N.; Feigl, T.
Patent
2004Enhanced reflectivity and stability of Sc/Si multilayers
Yulin, S.; Schäfers, S.; Feigl, T.; Kaiser, N.
Conference Paper
2004EUV and soft X-ray multilayer optics
Kaiser, N.; Yulin, S.; Feigl, T.; Bernitzki, H.; Lauth, H.
Conference Paper
2004High-performance Cr/Sc multilayers for the soft X-ray range
Yulin, S.; Schäfers, F.; Feigl, T.; Kaiser, N.
Conference Paper
2004Structural characterization of ultrathin Cr and Sc films for soft X-ray mirrors
Gorelik, T.; Kaiser, U.; Kuhlmann, T.; Yulin, S.; Richter, W.
Journal Article
2003At-wavelength metrology on Sc-based multilayers for the VUV and water window
Schäfers, F.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2003Monochromatorspiegel fuer den EUV-Spektralbereich
Feigl, T.; Kaiser, N.; Kuhlmann, T.; Yulin, S.
Patent
2003Multilayer coatings for EUV/Soft x-ray mirrors
Yulin, S.
Book Article
2003Spectral reflectance tuning of EUV mirrors for metrology applications
Yulin, S.A.; Kuhlmann, T.; Feigl, T.; Kaiser, N.
Conference Paper
2003Verfahren zur Herstellung eines thermisch stabilen Schichtsystems zur Reflexion von Strahlung im extremen ultravioletten Spektralbereich (EUV)
Yulin, S.; Feigl, T.; Kaiser, N.
Patent
2002Chromium-scandium multilayer mirrors for the nitrogen K(alpha) line in the water window region
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.; Gorelik, T.; Kaiser, U.; Richter, W.
Journal Article
2002Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Journal Article
2002Design and fabrication of broadband EUV multilayer mirrors
Kuhlmann, T.; Yulin, S.A.; Feigl, T.; Kaiser, N.; Bernitzki, H.; Lauth, H.
Conference Paper
2002EUV multilayer mirrors with tailored spectral reflectivity
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2002High-performance 6-inch EUV mask blanks produced under real production conditions by ion-beam sputter deposition
Becker, H.W.; Sobel, F.; Aschke, L.; Renno, M.; Krieger, J.; Buttgereit, U.; Hess, G.; Lenzen, F.; Knapp, K.; Yulin, S.A.; Feigl, T.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2002Interlayer transition zones in Mo/Si superlattices
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N.; Fedorenko, A.I.; Kondratenko, V.V.; Poltseva, O.V.; Sevryukova, V.A.; Zolotaryov, A.Y.; Zubarev, E, N.
Journal Article
2002Thermal stability of Cr/Sc multilayers for the soft x-ray range
Yulin, S.; Kuhlmann, T.; Feigl, T.; Kaiser, N.
Conference Paper
2002Verfahren zur Herstellung eigenspannungsfreier reflektierender optischer Schichtsysteme auf Substraten
Yulin, S.; Feigl, T.; Kuhlmann, T.; Kaiser, N.
Patent
2001Cr/Sc multilayer mirrors for the nitrogen K(alpha)-line in the water window
Kuhlmann, T.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper
2001Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2001Damage resistant and low-stress Si-based multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Conference Paper
2001Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N.
Journal Article
2001Verfahren zur Herstellung eines Duennschichtsystems
Feigl, T.; Yulin, S.; Stoeckl, W.; Kaiser, N.
Patent
2000Magnetron sputtered EUV mirrors with high thermal stability
Feigl, T.; Yulin, S.; Kaiser, N.; Thielsch, R.
Conference Paper
2000Si-based multilayers with high thermal stability
Kaiser, N.; Yulin, S.; Feigl, T.
Conference Paper