Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2006High rate deposition of tin-doped indium oxide films by reactive magnetron sputtering with unipolar pulsing and plasma emission feedback systems
Ohno, S.; Kawaguchi, Y.; Miyamura, A.; Sato, Y.; Song, P.K.; Yoshikawa, M.; Frach, P.; Shigesato, Y.
Journal Article
2006Photocatalytic TiO2 films deposited by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems
Ohno, S.; Takasawa, N.; Sato, Y.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Journal Article, Conference Paper, Journal Article
2006Silicon nitride thin film with low absorption deposited by high rate reactive pulse magnetron sputtering
Shoji, H.; Fukagawa, T.; Kato, Y.; Bartzsch, H.; Suzuki, K.; Ohno, S.; Takasawa, N.; Sato, Y.; Yoshikawa, M.
Conference Paper
2004Photocatalytic properties of TiO2 films deposited by reactive sputtering in mid-frequency mode with dual cathodes
Ohno, S.; Sato, D.; Kon, M.; Sato, Y.; Yoshikawa, M.; Frach, P.; Shigesato, Y.
Journal Article
2004Resonant Raman scattering from N-doped and Si-doped diamondlike amorphous carbon films
Yoshikawa, M.; Iwagami, K.; Matsunobe, T.; Morita, N.; Yamaguchi, Y.; Izumi, Y.; Wagner, J.
Journal Article
2004Ultra high-rate deposition of photocatalytic TiO2 films by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems
Takasawa, N.; Ohno, S.; Sato, D.; Song, P.K.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Conference Paper
2003High Quality Photocatalytic TiO2 Films Deposited by Reactive Sputtering in Mid-Frequency Mode with Dual Cathodes
Ohno, S.; Sato, D.; Kon, M.; Song, P.K.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Conference Paper
2003Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films
Ohno, S.; Sato, D.; Kon, M.; Song, P.K.; Yoshikawa, M.; Suzuki, K.; Frach, P.; Shigesato, Y.
Conference Paper, Journal Article
2000Resonant Raman scattering from buried Al(x)Ga(1-x)N (x < = 0.17) layers in (Al,Ga,In)N heterostructures
Yoshikawa, M.; Wagner, J.; Obloh, H.; Kunzer, M.; Maier, M.
Journal Article
1999Band-gap renormalization and band filling in Si-doped GaN films studied by photoluminescence spectroscopy
Yoshikawa, M.; Kunzer, M.; Wagner, J.; Obloh, H.; Schlotter, P.; Schmidt, R.; Herres, N.; Kaufmann, U.
Journal Article