Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Journal Article, Conference Paper
2011Reactive HiPIMS of oxides for optical coatings
Vergöhl, M.; Bandorf, R.; Bräuer, G.; Bruns, S.; Werner, O.
Conference Paper
2010High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets
Bruns, S.; Vergöhl, M.; Werner, O.; Wallendorf, T.
Conference Paper
2009HiPIMS - Technologie und Anwendungsfelder
Bandorf, R.; Vergöhl, M.; Werner, O.; Sittinger, V.; Bräuer, G.
Journal Article
2009Optisch dünne Schichten mit kontrollierten Eigenschaften durch plasmaunterstütztes Magnetronsputtern
Werner, O.; Neumann, F.; Neubert, T.; Vergöhl, M.
Journal Article
2009Process control and thin film properties of Al2O3 layers deposited by high power impulse magnetron sputtering
Vergöhl, M.; Bruns, S.; Werner, O.
Conference Paper
2008HIPIMS/HPPMS process design with multi channel pulse pattern controller
Wallendorf, T.; Vergöhl, M.; Werner, O.; Bandorf, R.
Conference Paper
2008New developments in magnetron sputter processes for precision optics
Vergöhl, M.; Werner, O.; Bruns, S.
Conference Paper
2008Preparation of photocatalytically active TiOO2R layers on polycarbonate by reactive magnetron sputtering
Neubert, T.; Werner, O.; Neumann, F.; Vergöhl, M.
Conference Paper
2008Properties of ZrOO2R thin films deposited by plasma assisted pulsed reactive magnetron sputtering
Vergöhl, M.; Werner, O.; Bruns, S.
Conference Paper
2008Superimposed MF-HiPIMS processes for the deposition of ZrOO2R thin films
Vergöhl, M.; Werner, O.; Bruns, S.; Wallendorf, T.; Mark, G.
Conference Paper