Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1991Avoidance of substrate damage upon laser recrystallization of a SOI layer
Wel, W. van der; Seitz, S.; Weber, J.; Buchner, R.; Haberger, K.; Seegebrecht, P.
Journal Article
1991Suppression of grain boundary formation during laser recrystallization of thin Si-films using micro absorbers
Hu, B.; Wel, W. van der; Buchner, R.; Haberger, K.; Seidl, A.
Conference Paper
19903D CMOS devices in recrystallized silicon
Seitz, S.; Weber, J.; Seegebrecht, P.; Wel, W. van der; Buchner, R.; Haberger, K.
Journal Article
1990Investigation of laser recrystallization of thin Si films using numerical simulation
Hu, B.; Wel, W. van der; Buchner, R.; Haberger, K.; Seidl, A.
Journal Article
19893D - CMOS devices in recrystallized silicon
Buchner, R.; Haberger, K.; Seitz, D.; Weber, J.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989An advanced fabrication process for 3D-CMOS devices
Buchner, R.; Haberger, K.; Seitz, S.; Weber, J.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989Avoidance of substrate damage upon laser recrystallization of an SOI layer
Buchner, R.; Haberger, K.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989Laser recrystallization for three-dimensional integration
Buchner, R.; Haberger, K.; Seitz, S.; Weber, J.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989Process technology for 3D-CMOS devices
Buchner, R.; Haberger, K.; Seitz, S.; Weber, J.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989Substrate damage free laser recrystallization of polysilicon
Buchner, R.; Haberger, K.; Wel, W. van der; Seegebrecht, P.
Conference Paper
1989Substrate-damage-free laser recrystallization of polycrystalline silicon
Buchner, R.; Haberger, K.; Wel, W. van der; Seegebrecht, P.
Journal Article