Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2017Mask aligner lithography using laser illumination for versatile pattern generation
Weichelt, T.; Bourgin, Y.; Zeitner, U.D.
Journal Article
2016Advanced photomask fabrication by e-beam lithography for mask aligner applications
Weichelt, T.; Bourgin, Y.; Banasch, M.; Zeitner, U.D.
Conference Paper
2016Alternative high-resolution lithographic technologies for optical applications
Zeitner, U.D.; Weichelt, T.; Bourgin, Y.; Kinder, R.
Conference Paper
2016Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy
Puthankovilakam, K.; Scharf, T.; Kim, M.S.; Naqavi, A.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R.
Journal Article
2016Photomask displacement technology for continuous profile generation by mask aligner lithography
Weichelt, T.; Kinder, R.; Zeitner, U.D.
Journal Article
2015Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy
Puthankovilakam, K.; Scharf, T.; Herzig, H.P.; Weichelt, T.; Zeitner, U.; Vogler, U.; Voelkel, R.
Conference Paper
2015Mask Aligner Lithography for TSV-Structures using a Double-Sided (structured) Photomask
Weichelt, Tina; Stuerzebecher, Lorenz; Zeitner, Uwe Detlef
Conference Paper
2015Optimized lithography process for through-silicon vias-fabrication using a double-sided (structured) photomask for mask aligner lithography
Weichelt, Tina; Stürzebecher, Lorenz; Zeitner, Uwe D.
Journal Article
2014Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks
Weichelt, T.; Vogler, U.; Stuerzebecher, L.; Voelkel, R.; Zeitner, U.D.
Journal Article
2012Advanced mask aligner lithography (AMALITH)
Völkel, R.; Vogler, U.; Bramati, A.; Weichelt, T.; Stürzebecher, L.; Zeitner, U.D.; Motzek, K.; Erdmann, A.; Hornung, M.; Zoberbier, R.
Conference Paper
2012AMALITH: Advanced mask aligner lithography
Bramati, Arianna; Weichelt, Tina; Stürzebecher, Lorenz; Meliorisz, Balint; Vogler, Uwe; Voelkel, Reinhard
Conference Paper
2005Investigations of Automotive Components Regarding Vibrational Load
Schnitzer, R.; Weichelt, T.; Rümmler, N.
Conference Paper