Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
|---|
| 2020 | BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms
Wehring, Bettina; Hoffmann, R.; Gerlich, Lukas; Czernohorsky, Malte; Uhlig, B.; Seidel, R.; Barchewitz, T.; Schlaphof, F.; Meinshausen, L.; Leyens, C. | Conference Paper |
| 2019 | Analysis of CMOS Metallization Trenches using Angle-Resolved XPS
Wehring, Bettina; Gerlich, Lukas; Wislicenus, Marcus | Poster |
| 2014 | Metal-organic frameworks as humidity sensor
Schlechte, Laura; Wehring, Bettina; Klein, Nicole; Beese, Harald; Grählert, Wulf; Kaskel, Stefan | Conference Paper |