Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Development of a multi channel piezoelectric flexural plate wave BioMEMS-sensor for rapid point-of-care diagnostics
Wiemann, Matthias; Walk, Christian; Greifendorf, Dieter; Weidenmüller, Jens; Jupe, Andreas; Seidl, Karsten
Conference Paper
2019Entwicklung eines BIOMEMS-Sensors für die Vor-Ort-Diagnose auf Basis der Detektion von Frequenzverschiebungen der Biegewellen von funktionalisierten Membranen
Walk, Christian; Wiemann, Matthias; Görtz, Michael; Weidenmüller, Jens; Jupe, Andreas; Seidl, Karsten
Conference Paper
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Conference Paper
2019A piezoelectric flexural plate wave (FPW) Bio-MEMS sensor with improved molecular mass detection for point-of-care diagnostics
Walk, Christian; Wiemann, Matthias; Görtz, Michael; Weidenmüller, Jens; Jupe, Andreas; Seidl, Karsten
Journal Article
2018Development of a MEMS technology for the monolithic post-CMOS integration of capacitive pressure sensors
Walk, Christian
: Vogt, Holger (Erstgutachter); Mokwa, Wilfried
Dissertation
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2018A high-precision and high-bandwidth MEMS-based capacitive accelerometer
Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer
Journal Article
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Conference Paper
2017A high precision MEMS based capacitive accelerometer for seismic measurements
Utz, Alexander; Walk, Christian; Stanitzki, Alexander; Mokhtari, Mir; Kraft, Michael; Kokozinski, Rainer
Conference Paper
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Conference Paper
2017Telemetric multi-sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article
2017An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS
Utz, Alexander; Walk, Christian; Haas, Norbert; Fedtschenko, Tatjana; Stanitzki, Alexander; Mokhtari, Mehran; Görtz, Michael; Kraft, Michael; Kokozinski, Rainer
Journal Article
2016Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H.
Conference Paper
2016Development of a system concept for miniaturized cardiovascular multi sensor implants
Dogan, Özgü; Walk, Christian; Weidenmüller, Jens; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Journal Article, Conference Paper
2016Telemetric multi sensor system for medical applications - the approach
Weidenmüller, Jens; Walk, Christian; Dogan, Özgü; Gembaczka, Pierre; Stanitzki, Alexander; Görtz, Michael
Abstract
2015Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor
Walk, Christian; Goehlich, Andreas; Giese, Andre; Görtz, Michael; Vogt, Holger; Kraft, Michael
Conference Paper
2015Optimierung von Polysilicium Membranen eines absolut messenden, kapazitiven MEMS Drucksensors
Walk, Christian; Giese, Andre; Weidenmüller, Jens; Görtz, Michael
Conference Paper