Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019AlScN: A III-V semiconductor based ferroelectric
Fichtner, S.; Wolff, N.; Lofink, F.; Kienle, L.; Wagner, B.
Journal Article
2018An advanced control concept for modular multilevel converter using capacitor voltage estimation
Ruccius, B.; Preller, B.; März, M.; Wagner, B.
Conference Paper
2018Analysis of the mechanical vibration and acoustic behavior of a piezoelectric MEMS microspeaker
Männchen, A.; Beer, D.; Niekiel, F.; Nowak, J.; Stoppel, F.; Wagner, B.
Conference Paper
2018Fusing LiDAR and radar data to perform SLAM in harsh environments
Fritsche, P.; Kueppers, S.; Briese, G.; Wagner, B.
Conference Paper
2018In-Ear Headphone System with Piezoelectric MEMs Driver
Männchen, Andreas; Stoppel, Fabian; Beer, Daniel; Niekiel, Florian; Wagner, Bernhard
Conference Paper
2018Magnetic films for electromagnetic actuation in MEMS switches
Oliveira Hansen, R. de; Matefi-Tempfli, M.; Safonovs, R.; Adam, J.; Chemnitz, S.; Reimer, T.; Wagner, B.; Benecke, W.; Matefi-Tempfli, S.
Journal Article
2018Micro-cantilevers for optical sensing of biogenic amines
Wang, Y.; Costa, C.A.B.; Sobolewska, E.K.; Fiutowski, J.; Brehm, R.; Albers, J.; Nebling, E.; Lofink, F.; Wagner, B.; Benecke, W.; Rubahn, H.-G.; Oliveira Hansen, R. de
Journal Article
2018New integrated full-range MEMS speaker for in-ear applications
Stoppel, Fabian; Männchen, Andreas; Niekiel, Florian; Beer, Daniel; Giese, Thorsten; Wagner, Bernhard
Conference Paper
2018Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
Stoppel, F.; Niekiel, F.; Giese, T.; Gu-Stoppel, S.; Männchen, A.; Nowak, J.; Beer, D.; Wagner, B.
Conference Paper
2018Representative road selection and route planning for commercial vehicle development
Speckert, M.; Lübke, M.; Wagner, B.; Anstötz, T.; Haupt, C.
Conference Paper
2018Zwei-Wege-Lautsprecher basierend auf MEMS-Technologie
Männchen, Andreas; Stoppel, Fabian; Beer, Daniel; Niekiel, Florian; Nowak, Johannes; Wagner, Bernhard
Conference Paper
2017Concept for a common operational picture in a guidance vehicle
Wagner, Boris; Eck, Ralf; Maier, Sebastian
Conference Paper
2017High temperature investigation on a nickel-tin transient liquid-phase wafer bonding up to 600 °C
Budhiman, N.; Jensen, B.; Chemnitz, S.; Wagner, B.
Journal Article
2017Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems
Fichtner, S.; Wolff, N.; Krishnamurthy, G.; Petraru, A.; Bohse, S.; Lofink, F.; Chemnitz, S.; Kohlstedt, H.; Kienle, L.; Wagner, B.
Journal Article
2017The image-interpretation-workstation of the future: Lessons learned
Maier, Sebastian; Camp, Florian van de; Hafermann, J.; Wagner, Boris; Peinsipp-Byma, Elisabeth; Beyerer, Jürgen
Conference Paper
2017Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets
Lofink, F.; Tolstrup, V.; Lisec, T.; Reimer, T.; Piorra, A.; Meyners, D.; Quandt, E.; Wagner, B.
Conference Paper
2017MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material
Lisec, T.; Stoppel, F.; Kaden, D.; Heinrich, F.; Neumann, A.; Wagner, B.
Conference Paper
2017Novel membrane-less two-way MEMS loudspeaker based on piezoelectric dual-concentric actuators
Stoppel, F.; Eisermann, C.; Gu-Stoppel, S.; Kaden, D.; Giese, T.; Wagner, B.
Conference Paper
2017A novel technology for MEMS based on the agglomeration of powder by atomic layer deposition
Lisec, T.; Chemnitz, S.; Lofink, F.; Reimer, T.; Kulkarni, A.; Piechotta, G.; Wagner, B.
Conference Paper
2017Standardized acquisition, storing and provision of 3D enabled spatial data
Wagner, Boris; Maier, Sebastian; Peinsipp-Byma, Elisabeth
Conference Paper
2016Estimation of the excitation current and the rotor resistance of an externally excited synchronous machine with an inductively supplied excitation coil
Köhler, S.; Wagner, B.; Endres, S.
Conference Paper
2016Functionalizing micro-cantilevers for meat degradation measurements
Wang, Y.; Sobolewska, E.K.; Fiutowski, J.; Rubahn, H.-G.; Hansen, R.D.O.; Albers, J.; Nebling, E.; Wagner, B.; Benecke, W.
Conference Paper
2016Increased microcirculation detected by dynamic contrast-enhanced magnetic resonance imaging is of prognostic significance in asymptomatic myeloma
Hillengass, J.; Ritsch, J.; Merz, M.; Wagner, B.; Kunz, C.; Hielscher, T.; Laue, H.; Bäuerle, T.; Zechmann, C.M.; Ho, A.D.; Schlemmer, H.-P.; Goldschmidt, H.; Moehler, T.M.; Delorme, S.
Journal Article
2016Interactive analysis of geodata based intelligence
Wagner, Boris; Eck, Ralf; Unmuessig, Gabriel; Peinsipp-Byma, Elisabeth
Conference Paper
2016Mikromechanische piezoelektrische Aktuatoren zur Realisierung hoher Kräfte und Auslenkungen
Stoppel, Fabian; Wagner, Bernhard
Patent
2016Multimode delta-E effect magnetic field sensors with adapted electrodes
Zabel, S.; Reermann, J.; Fichtner, S.; Kirchhof, C.; Quandt, E.; Wagner, B.; Schmidt, G.; Faupel, F.
Journal Article
2016New designs for MEMS-micromirrors and micromirror packaging with electrostatic and piezoelectric drive
Gu-Stoppel, S.; Stenchly, V.; Kaden, D.; Quenzer, H.J.; Wagner, B.; Hofinann, U.; Dudde, R.
Conference Paper
2016Prognostic significance of increased bone marrow microcirculation in newly diagnosed multiple myeloma: Results of a prospective DCE-MRI study
Merz, M.; Moehler, T.M.; Ritsch, J.; Bäuerle, T.; Zechmann, C.M.; Wagner, B.; Jauch, A.; Hose, D.; Kunz, C.; Hielscher, T.; Laue, H.; Goldschmidt, H.; Delorme, S.; Hillengass, J.
Journal Article
2016Radar and LiDAR sensorfusion in low visibility environments
Fritsche, P.; Kueppers, S.; Briese, G.; Wagner, B.
Conference Paper
2016Temperature-stable NdFeB micromagnets with high-energy density compatible with CMOS back end of line technology
Reimer, T.; Lofink, F.; Lisec, T.; Thede, C.; Chemnitz, S.; Wagner, B.
Journal Article
2016Transmission electron microscopy study for investigating high-temperature reliability of Ti10W90-based and Ta-based diffusion barriers up to 600°C
Budhiman, N.; Schürmann, U.; Jensen, B.; Chemnitz, S.; Kienle, L.; Wagner, B.
Journal Article
2015Bidirectionally actuated ohmic switches allowing sequential dual-contact operation for improved reliability
Stoppel, F.; Lisec, T.; Wagner, B.; Benecke, W.
Journal Article, Conference Paper
2015Herstellung und Integration von piezoelektrischen Pb(ZrxTi1-x)O3-Schichten außerordentlicher Schichtdicke für die Erschließung neuer Anwendungsgebiete
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Kößler, D.; Sichelschmidt, J.; Jakob, A.; Jung, T.; Tiefensee, F.
Conference Paper
2015High temperature reliability of Ta-based and TiW-based diffusion barriers
Budhiman, N.; Schürmann, U.; Jensen, B.; Chemnitz, S.; Kienle, L.; Wagner, B.
Conference Paper
2015Hochauflösende Magnetfeld-Positionssensoren
Paul, J.; Knoll, H.; Lenkl, A.; Tide, R.; Theis, M.; Saumer, M.; Vetter, C.; Piorra, A.; Meyners, D.; Lofink, F.; Fichtner, S.; Wagner, B.; Zoschke, K.
Conference Paper
2015Novel piezoelectric ohmic switches featuring fast switching and high contact forces
Stoppel, F.; Lisec, T.; Wagner, B.
Conference Paper
2015Piezoelektrische ohmsche MEMS-Schalter mit bidirektionalem Antrieb und geringen Schaltzeiten
Stoppel, F.; Lisec, T.; Wagner, B.; Benecke, W.
Conference Paper
2015Stress controlled pulsed direct current co-sputtered Al1-xScxN as piezoelectric phase for micromechanical sensor applications
Fichtner, S.; Reimer, T.; Chemnitz, S.; Lofink, F.; Wagner, B.
Journal Article
2015Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride
Hrkac, V.; Kobler, A.; Marauska, S.; Petraru, A.; Schürmann, U.; Chakravadhanula, V.S.K.; Duppel, V.; Kohlstedt, H.; Wagner, B.; Lotsch, B.V.; Kübel, C.; Kienle, L.
Journal Article
2014Analysis of capacitive sensing for 2D-MEMS scanner laser projection
Wantoch, T. von; Mallas, C.; Hofmann, U.; Janes, J.; Wagner, B.; Benecke, W.
Conference Paper
2014Characterization of multilayer structures in fiber reinforced polymer employing synchrotron and laboratory X-Ray CT
Wirjadi, O.; Godehardt, M.; Schladitz, K.; Wagner, B.; Rack, A.; Gurka, M.; Nissle, S.; Noll, A.
Journal Article
2014Microelectromechanical magnetic field sensor based on ΔE effect
Jahns, R.; Zabel, S.; Marauska, S.; Gojdka, B.; Wagner, B.; Knöchel, R.; Adelung, R.; Faupel, F.
Journal Article
2014Novel design concepts for piezoelectrically driven ohmic switches
Stoppel, F.; Lisec, T.; Wagner, B.
Journal Article, Conference Paper
2014Precision micro-optical elements for manufacturing of gas sensors using IR-absorption
Quenzer, H.-J.; Stenchly, V.; Schwarzelbach, S.; Kampmann, M.; Wagner, B.; Dudde, R.
Conference Paper
2014Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Hofmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Hagge, J.; Quenzer, H.-J.; Weiss, M.; Wantoch, T. von; Mallas, C.; Wagner, B.; Benecke, W.
Journal Article
2013Automatic creation of role dependent situation views for different devices
Wagner, Boris
Conference Paper
2013Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners
Gu-Stoppel, S.; Janes, J.; Quenzer, H.J.; Hofmann, U.; Kaden, D.; Wagner, B.; Benecke, W.
Conference Paper
2013Der Einsatz von Infrarot-Technik zur Dokumentation von Wasserzeichen aus Blockbüchern
Meinlschmidt, P.; Kämmerer, C.; Märgner, V.; Wagner, B.
Conference Paper
2013Giant magnetoelectric effect in vacuum
Kirchhof, C.; Krantz, M.; Teliban, I.; Jahns, R.; Marauska, S.; Wagner, B.; Knöchel, R.; Gerken, M.; Meyners, D.; Quandt, E.
Journal Article
2013Heterogeneous teams of unmanned ground and aerial robots for reconnaissance and surveillance - a field experiment
Langerwisch, M.; Wittmann, T.; Thamke, S.; Remmersmann, T.; Tiderko, A.; Wagner, B.
Conference Paper
2013Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites
Marauska, S.; Jahns, R.; Kirchhof, C.; Claus, M.; Quandt, E.; Knöchel, R.; Wagner, B.
Journal Article
2013Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging
Marauska, S.; Claus, M.; Lisec, T.; Wagner, B.
Journal Article
2013Mehrachsiger piezoelektrischer Aktuator für optische Komponenten
Kampmann, M.; Stoppel, F.; Quenzer, H.-J.; Kaden, D.; Janes, J.; Wagner, B.
Conference Paper
2013MEMS based magnetoelectric field sensor characteristics under vacuum and after heat treatment
Lofink, F.; Marauska, S.; Jahns, R.; Kirchhof, C.; Claus, M.; Knöchel, R.; Quandt, E.; Wagner, B.
Conference Paper
2013Resonant biaxial 7-mm MEMSm mirror for omnidirectional scanning
Hoffmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Weiss, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.
Conference Paper
2013Stand-off detection, remote sensing, hyperspectral target detection, quantum cascade lasers, infrared spectroscopy
Wagner, Boris
Conference Paper
2013Ultra-high aspect ratio Ni nanowires in single-crystalline InP membranes as multiferroic composite
Gerngross, M.-D.; Chemnitz, S.; Wagner, B.; Carstensen, J.; Föll, H.
Journal Article
2012Analysing rare books with digital technologies
Wagner, B.; Brantl, M.; Meinlschmidt, P.
Journal Article
2012Coherent visualization of spatial data adapted to roles, tasks, and hardware
Wagner, Boris; Peinsipp-Byma, Elisabeth
Conference Paper
2012Digitizing and archiving of all information taken from rare blockbooks
Meinlschmidt, P.; Brantl, M.; Schäfer, I.; Wagner, B.; Bacher, R.; Märgner, V.
Conference Paper
2012Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool
Kaden, D.; Quenzer, H.-J.; Kratzer, M.; Castaldi, L.; Wagner, B.; Heinz, B.; Mamazza, R.
Conference Paper
2012MEMS magnetic field sensor based on magnetoelectric composites
Marauska, S.; Jahns, R.; Greve, H.; Quandt, E.; Knöchel, R.; Wagner, B.
Journal Article
2012Note: Micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy
Sebastian, A.; Shamsudhin, N.; Rothuizen, H.; Drechsler, U.; Koelmans, W.W.; Bhaskaran, H.; Quenzer, H.J.; Wagner, B.; Despont, M.
Journal Article
2012Optimised piezoelectric PZT thin film production on 8 silicon wafers for micromechanical applications
Kaden, D.; Gu-Stoppel, S.; Quenzer, H.-J.; Kaltenbacher, D.; Wagner, B.; Dudde, R.
Conference Paper
2012Realization of an autonomous team of unmanned ground and aerial vehicles
Langerwisch, M.; Ax, M.; Thamke, S.; Remmersmann, T.; Tiderko, A.; Kuhnert, K.-D.; Wagner, B.
Conference Paper
2012Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material
Marauska, S.; Hrkac, V.; Dankwort, T.; Jahns, R.; Quenzer, H.J.; Knöchel, R.; Kienle, L.; Wagner, B.
Journal Article
2011AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting
Stoppel, F.; Schröder, C.; Senger, F.; Wagner, B.; Benecke, W.
Conference Paper
2011Detektion künstlicher maritimer Objekte in TerraSAR-X-Bildern
Saur, Günther; Teutsch, Michael; Wagner, Boris
Report
2011Entwicklung und Integration eines Hochratensputterprozesses für Blei-Zirkonat-Titanat-Dünnschichten
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.; Jakob, A.; Tiefensee, F.
Conference Paper
2011Fabrication of conducting AFM cantilevers with AlN-based piezoelectric actuators
Quenzer, H.J.; Drechsler, U.; Sebastian, A.; Marauska, S.; Wagner, B.; Despont, M.
Conference Paper
2011Fused generic geospatial- and meta-information for situation- and crisis-management using OGC- and STANAG-services
Wagner, Boris; Peinsipp-Byma, Elisabeth
Conference Paper
2011In-situ large scale deposition of PZT films by RF magnetron sputtering
Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2011Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.
Conference Paper
2011MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
Hofmann, U.; Eisermann, C.; Quenzer, H.-J.; Janes, J.; Schroeder, C.; Schwarzelbach, O.; Jensen, B.; Ratzmann, L.; Giese, T.; Senger, F.; Hagge, J.; Weiss, M.; Wagner, B.; Benecke, W.
Conference Paper
2011A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window
Hofmann, U.; Quenzer, H.J.; Eisermann, C.; Janes, J.; Schroeder, C.; Jensen, B.; Hagge, J.; Soerensen, F.; Senger, F.; Vick, D.; Schwarzelbach, O.; Ratzmann, L.; Giese, T.; Wagner, B.; Benecke, W.
Conference Paper
2011Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration
Marauska, S.; Dankwort, T.; Quenzer, H.J.; Wagner, B.
Conference Paper
2010Giant magnetoelectric coefficients in (Fe90Co10)(78)Si12B10-AlN thin film composites
Greve, H.; Woltermann, E.; Quenzer, H.-J.; Wagner, B.; Quandt, E.
Journal Article
2010High-rate sputtering of thick PZT thin films for MEMS
Jacobsen, H.; Prume, K.; Wagner, B.; Ortner, K.; Jung, T.
Journal Article
2010Low damping resonant magnetoelectric sensors
Greve, H.; Woltermann, E.; Jahns, R.; Marauska, S.; Wagner, B.; Knöchel, R.; Wuttig, M.; Quandt, E.
Journal Article
2010Preparation of functional PZT Films on 6 and 8 silicon wafers by high rate sputtering
Dudde, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2010Softwarekonzepte für die Verarbeitung und Analyse von Volumenbildern
Wagner, B.
Book Article
2009MEMS Foundry
Merz, P.; Wagner, B.; Dudde, R.; Benecke, W.
Conference Paper
2009Parallel volume image segmentation with watershed transformation
Wagner, B.; Dinges, A.; Müller, P.; Haase, G.
Conference Paper
2009Waferlevel Vacuum Packaged Microscanners
Oldsen, M.; Hofmann, U.; Janes, J.; Quenzer, J.; Wagner, B.
Journal Article
2009Waferlevel-Vakuum gekapselte 2D-Mikrospiegel-Scanner für kompakte Laserprojektions-Displays im Automobil
Hofmann, U.; Baumann, S.; Oldsen, M.; Janes, J.; Wagner, B.
Conference Paper
2008Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
Quenzer, H.-J.; Dudde, R.; Jacobsen, H.; Wagner, B.; Föll, H.
Conference Paper
2008Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb
Hofmann, U.; Oldsen, M.; Wagner, B.
Patent
2008A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Janes, J.; Stolte, C.; Gruber, K.; Ites, M.; Sörensen, F.; Wagner, B.
Conference Paper
2008Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays
Hofmann, U.; Oldsen, M.; Quenzer, H.-J.; Janes, J.; Heller, M.; Weiss, M.; Fakas, G.; Ratzmann, L.; Marchetti, E.; D'Ascoli, F.; Melani, M.; Bacciarelli, L.; Volpi, E.; Battini, F.; Mostardini, L.; Sechi, F.; Marinis, M. de; Wagner, B.
Conference Paper
2008Waferlevel vacuum packaging: Essential for microscanners in mobile applications
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Reinert, W.; Wagner, B.
Conference Paper, Journal Article
2007Dataflow orchestration of image processing algorithms using high-level petri nets
Wagner, B.; Dinges, A.; Müller, P.
Conference Paper
2007Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering
Jacobsen, H.; Jung, T.; Ortner, K.; Schiffmann, K.I.; Quenzer, H.-J.; Wagner, B.
Journal Article
2007Dynamic overlay networks for image processing grids
Dinges, A.; Wagner, B.; Mueller, P.
Conference Paper
2007Mikroaktoranordnung
Quenzer, H.; Wagner, B.
Patent
2007A novel fabrication technology for waferlevel vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Wagner, B.
Conference Paper
2007Thick PZT layers deposited by gas flow sputtering
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper, Journal Article
20063D mapping with semantic knowledge
Nüchter, A.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Surmann, H.
Conference Paper
2006Bistabiler Mikroantrieb mit gekoppelten Membranen
Wagner, B.; Quenzer, H.J.
Patent
2006A high-performance imaging and control system for a micromirror-based laser-scanning endoscope device
Papageorgas, P.G.; Maroulis, D.; Anagnostopoulos, G.; Albrecht, H.; Wagner, B.; Iakovidis, D.K.; Theofanous, N.G.
Journal Article
2006High-rate sputtering of thick PZT layers for MEMS actuators
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.
Conference Paper
2006Mikroaktorbauteil und Verfahren zur Herstellung
Hofmann, U.; Witt, M.; Wagner, B.; Muehlmann, S.
Patent
2006The RoboCup Rescue Team Deutschland 1
Nüchter, A.; Surmann, H.; Pervölz, K.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Christaller, T.
Journal Article
2006RoboCupRescue2006 - Robot League, Deutschland1 (Germany)
Lingemann, K.; Nüchter, A.; Hertzberg, J.; Wulf, O.; Wagner, B.; Pervölz, K.; Surmann, H.; Christaller, T.
Conference Paper
2006Structure and characterization of an enhanced laser-scanning endoscope based on microelectromechanical mirrors
Albrecht, H.; Papageorgas, P.G.; Maroulis, D.; Theofanous, N.; Karkanis, S.; Wagner, B.; Schurr, M.; Depeursinge, C.; Menciassi, A.
Journal Article
2006Verfahren und Projektor zur Bildprojektion
Hofmann, U.; Fakas, G.; Janes, J.; Blicharski, P.; Wagner, B.
Patent
20053D mapping with semantic knowledge
Nüchter, A.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Surmann, H.
Conference Paper
2005Integration aspects of RF-MEMS technologies
Lisec, T.; Wagner, B.
Conference Paper
2005PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensors
Merz, P.; Reinert, W.; Reimer, K.; Wagner, B.
Conference Paper
2005RoboCupRescue - Robot League, Team Deutschland1 (Germany)
Surmann, H.; Lingemann, K.; Nüchter, A.; Hennig, M.; Pervölz, K.; Wulf, O.; Hertzberg, J.; Wagner, B.; Christaller, T.
Conference Paper
2005Surface-micromachined capacitive RF switches and varactors
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2005Verfahren zur Strukturierung eines aus glasartigem Material bestehenden Flaechensubstrats
Quenzer, H.; Schulz, A.V.; Wagner, B.; Merz, P.
Patent
2004ANORDNUNG MIT VARIABLER KAPAZITAET
Quenzer, H.; Wagner, B.; Wenk, B.
Patent
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B.
Conference Paper
2004DURCHSTIMMBARER HOCHFREQUENZ-KONDENSATOR
Tuo, X.; Wagner, B.; Quenzer, J.
Patent
2004Entwicklung eines Ansatzes zum hochperformanten Zugriff auf große, verteilte n-dimensionale Bilddaten am Beispiel zweier Kernalgorithmen aus der 3D-Bildanalyse
Wagner, B.
Thesis
2004Lagestabile Positionierung aktiv beweglicher Einzeller
Lucas, K.; Fuhr, G.; Mueller, T.; Reimer, K.; Wagner, B.
Patent
2004Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Lisec, T.; Huth, C.; Shakhray, M.; Wagner, B.; Combi, C.
Conference Paper
2003Mikromechanische Pumpe
Lisec, T.; Wagner, B.
Patent
2003A novel micromachining technology for structuring borosilicate glass substrates
Merz, P.; Quenzer, H.J.; Bernt, H.; Wagner, B.; Zoberbier, M.
Conference Paper
2002The data-acquisition, processing and control system of a micromirror-based laser-scanning endoscope
Papageorgas, P.G.; Maroulis, D.; Albrecht, H.; Wagner, B.; Anagnostopoulos, G.; Schurr, M.; Theofanous, N.G.; Menciassi, A.; Depeursinge, C.
Conference Paper
2002The electronics of a control system for micromirrors in a laser-scanning device
Anagnostopoulos, G.P.; Wagner, B.; Papageorgas, P.G.; Hofmann, U.; Maroulis, D.; Theofanous, N.G.
Conference Paper
2001Mikrosensor zur Positionsmessung von Fluessigkeiten in Kapillaren
Lisec, T.; Quenzer, H.; Wagner, B.
Patent
2001Phloretin-induced changes of lipophilic ion transport across the plasma membrane of mammalian cells
Sukhorukov, V.; Kürschner, M.; Dilky, S.; Lisec, T.; Wagner, B.; Schenk, W.A.; Benz, R.; Zimmermann, U.
Journal Article
2001Vorrichtung zur endoskopischen Diagnose und Behandlung von Gewebe
Duetting, K.; Schurr, M.; Buess, G.; Mueller, G.; Wagner, B.
Patent
2000Customer support and design service for physical measurement systems
Wenk, B.; Wagner, B.; Jensen, G.; Orsier, E.
Journal Article
2000Design service by Fraunhofer-ISIT
Wagner, B.; Wenk, B.
Journal Article
2000Dielektrischer Motor mit einer oder mehreren Zentralelektroden
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R.
Patent
1999Adhaesionssteuerbare ultraminiaturisierte Oberflaechenstruktur
Fuhr, G.; Voigt, A.; Hagedorn, R.; Lisec, T.; Mueller, T.; Wagner, B.
Patent
1999Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope
Hofmann, U.; Mühlmann, S.; Schütz, R.; Dörschel, K.; Wagner, B.; Witt, M.
Conference Paper
1999Kryokonservierung und Tieftemperaturbearbeitung von biologischen Objekten
Fuhr, G.; Hornung, J.; Hagedorn, R.; Mueller, T.; Howitz, S.; Wagner, B.; Hofman, U.
Patent
1999Mikrochip-Aktuatoren in der Medizintechnik
Wagner, B.
Book Article
1999Mikroventilanordnung, insbesondere fuer pneumatische Steuerungen
Lisec, T.; Wagner, B.; Kreutzer, M.
Patent
1999OPTIMIERTER RANDABSCHLUSS VON HALBLEITER-BAUELEMENTEN
Sittig, R.; Nagel, D.; Dudde, R.; Wagner, B.; Reimer, K.
Patent
1999Progress in gray-tone lithography and replication techniques for different materials
Reimer, K.; Engelke, R.; Hofmann, U.; Merz, P.; Kohlmann van Platen, K.T.; Wagner, B.
Conference Paper
1998FORMEN VON MIKROPARTIKELN IN ELKTRISCHEN FELDKAEFIGEN
Fuhr, G.; Voigt, A.; Hagedorn, R.; Schnelle, T.; Hornung, J.; Mueller, T.; Fiedler, S.; Glasser, H.; Wagner, B.
Patent
1998Free 3D shaping with grey-tone lithography and multidose e-beam writing
Kalus, M.; Frey, M.; Buchmann, L.-M.; Reimer, K.; Wagner, B.
Conference Paper
1998Impact of diffusion length distributions on the performance of mc-silicon solar cells
Warta, W.; Sutter, J.; Wagner, B.F.; Schindler, R.
Conference Paper
1998Mikroreliefoberflächen. Herstellung mit Grauton-Lithographie
Hofmann, U.; Wagner, B.; Reimer, K.; Quenzer, H.J.
Journal Article
1998One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Hofmann, U.; Merz, P.; Wagner, B.
Book Article
19973D structures using gray tone lithography
Reimer, K.; Wagner, B.; Kalus, M.; Frey, M.; Buchmann, L.
Conference Paper
1997Erzeugung von Mikrorelief-Oberflächen mit Grauton-Lithographie
Wagner, B.; Reimer, K.; Hofmann, U.; Quenzer, H.J.; Jürss, M.; Pilz, W.
Conference Paper
1997Fabrication of microrelief surfaces using a one-step lithography process
Reimer, K.; Hofmann, U.; Jürss, M.; Pilz, W.; Quenzer, H.J.; Wagner, B.
Conference Paper
1997Handling and investigation of adherently growing cells and viruses of medical relevance in three-dimensional microstructures
Fuhr, G.; Müller, T.; Schnelle, T.; Glasser, H.; Gimsa, J.; Hofmann, U.; Wagner, B.
Conference Paper
1997Infrared micromirror array with large pixel size and large deflection angle
Wagner, B.; Reimer, K.; Maciossek, A.; Hofmann, U.
Conference Paper
1997Micro-optic fabrication using one-level gray-tone lithography
Reimer, K.; Quenzer, H.J.; Jürss, M.; Wagner, B.
Conference Paper
1997Mikroventil
Lisec, T.; Quenzer, H.J.; Wagner, B.
Patent
1997A resonant, dielectric micro-motor driven by low ac-voltages
Müller, T.; Gimsa, J.; Wagner, B.; Fuhr, G.
Journal Article
1996Adhesion-inhibited surfaces
Schnelle, T.; Müller, T.; Voigt, A.; Reimer, K.; Wagner, B.; Fuhr, G.
Journal Article
1996Bistable microvalve with pneumatically coupled membranes
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M.
Conference Paper
1996Bistable microvalves for implantable drug delivery systems
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M.
Conference Paper
1996A bistable pneumatic microswitch for driving fluidic components 2
Lisec, T.; Kreutzer, M.; Wagner, B.
Conference Paper
1996Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Conference Paper
1996One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Quenzer, H.J.; Pilz, W.; Wagner, B.
Conference Paper
1996One-level gray-tone lithography - mask data preparation and pattern transfer
Reimer, K.; Quenzer, H.J.; Demmeler, R.; Wagner, B.
Conference Paper
1996One-level gray-tone lithography for micro optical components
Reimer, K.; Henke, W.; Quenzer, H.J.; Demmeler, R.; Wagner, B.
Conference Paper
1996Silicon-silicon anodic bonding with intermediate glass layers using spin-on glasses
Quenzer, H.J.; Dell, C.; Wagner, B.
Conference Paper
1996Surface micromachined piezoresistive pressure sensors with step-type and flat membrane structures
Lisec, T.; Kreutzer, M.; Wagner, B.
Journal Article
1996Thermally driven microvalve with buckling behaviour of pneumatic applications 2
Lisec, T.; Quenzer, H.J.; Kreutzer, M.; Hoerschelmann, S.; Wagner, B.; Benecke, W.
Journal Article
1996Trapping of viruses in high-frequency electrical field cages
Schnelle, T.; Müller, T.; Shirley, S.G.; Ludwig, K.; Herrmann, A.; Fuhr, G.; Wagner, B.; Zimmermann, U.
Journal Article
1996UV-depth lithography and galvanoforming for micro machining
Löchel, B.; Maciossek, A.; Wagner, B.; Quenzer, H.J.
Journal Article
1996VERFAHREN ZUR HANDHABUNG MIKROSKOPISCH KLEINER, DIELEKTRISCHER TEILCHEN UND VORRICHTUNG ZUR DURCHFUEHRUNG DES VERFAHRENS
Benecke, W.; Wagner, B.; Fuhr, G.; Hagedorn, R.; Mueller, T.
Patent
1996Verfahren zur Trennung von Gemischen mikroskopisch kleiner, in einer Fluessigkeit oder einem Gel suspendierter dielektrischer Teilchen und Vorrichtung zur Durchfuehrung des Verfahrens
Benecke, W.; Wagner, B.; Hagedorn, R.; Fuhr, G.; Mueller, T.
Patent
1995A bistable pneumatic microswitch for driving fluidic components
Lisec, T.; Kreutzer, M.; Wagner, B.
Conference Paper
1995Chemical microsensor systems for medical applications in catheters
Hintsche, R.; Kruse, C.; Uhlig, A.; Paeschke, M.; Lisec, T.; Schnakenberg, U.; Wagner, B.
Journal Article
1995A combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
Lisec, T.; Kreutzer, M.; Wenk, B.; Wagner, B.
Conference Paper
1995Diffusional electrotitration - generation of pH-gradients over arrays of ultramicroelectrodes detected by fluorescence
Fiedler, S.; Hagedorn, R.; Schnelle, T.; Richter, E.; Wagner, B.; Fuhr, G.
Journal Article
1995Dünnschichtsolarzellen aus rekristallisiertem Silicium
Wagner, B.
Dissertation
1995Electric field mediated cell manipulation, characterisation and cultivation in highly conductive media
Fuhr, G.; Wagner, B.
Conference Paper
1995Electrocasting - formation and structuring of suspended microbodies using A.C. generated field cages
Fiedler, S.; Schnelle, T.; Wagner, B.; Fuhr, G.
Journal Article
1995Fabrication of relief-topographic surfaces with one-step UV-lithographic
Quenzer, H.J.; Henke, W.; Hoppe, W.; Pilz, W.; Reimer, K.; Wagner, B.
Journal Article
1995Galvanoplating and sacrificial layers for surface micromachining
Maciossek, A.; Löchel, B.; Wagner, B.; Schulze, W.; Noetzel, J.; Quenzer, H.J.
Conference Paper
1995Microfabrication of complex surface topographies using gray-tone lithography
Wagner, B.; Quenzer, H.J.; Henke, W.; Hoppe, W.; Pilz, W.
Journal Article
1995Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Conference Paper
1995Positioning and manipulation of cells and microparticles using miniaturized electric field traps and travelling waves
Fuhr, G.; Schnelle, T.; Müller, T.; Glasser, H.; Lisec, T.; Wagner, B.
Journal Article
1995Principles of development and design of microsystems
Wagner, B.
Journal Article
1995Quantenausbeute hocheffizienter texturierter Silicium-Solarzellen
Schumacher, J.; Sterk, S.; Wagner, B.; Warta, W.
Abstract
1995Quantum efficiency analysis of high-efficiency solar cells with textured surfaces
Schumacher, J.; Sterk, S.; Wagner, B.; Warta, W.
Conference Paper
1995Simulation assisted design of processes for gray-tone lithography
Henke, W.; Hoppe, W.; Staudt-Fischbach, P.; Wagner, B.; Quenzer, H.J.
Conference Paper
1995A stacked multichannel amperometric detection system
Paeschke, M.; Wollenberger, U.; Uhlig, A.; Schnakenberg, U.; Wagner, B.; Hintsche, R.
Conference Paper
1995Surface micromachined metallic microactuator with buckling characteristics
Quenzer, H.J.; Maciossek, A.; Wagner, B.; Pott, H.
Conference Paper
1995A surface micromachined piezoresistive pressure sensor with high sensitivity
Lisec, T.; Kreutzer, M.; Wagner, B.
Conference Paper
1995Surface-micromachined piezoresistive pressure sensor
Lisec, T.; Stauch, H.; Wagner, B.
Conference Paper
1995UV-depth lithography and galvanoforming for micro machining
Löchel, B.; Maciossek, A.; Wagner, B.; Quenzer, H.J.
Conference Paper
1994Design of asynchronous dielectric micromotors
Hagedorn, R.; Fuhr, G.; Müller, T.; Schnelle, T.; Schnakenberg, U.; Wagner, B.
Journal Article
1994Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R.
Patent
1994Electric field mediated inhibition of cell and microparticle adhesion - a new way to create biocompatible surfaces
Fuhr, G.; Voigt, A.; Wagner, B.
Conference Paper
1994Electric-field mediated cell manipulation in highly conductive media
Fuhr, G.; Wagner, B.
Conference Paper
1994Electroplated electromagnetic components for actuators
Löchel, B.; Maciossek, A.; König, M.; Wagner, B.; Quenzer, H.J.
Conference Paper
1994Fabrication of electrode arrays in the quarter micron regime for biotechnical applications
Reimer, K.; Hintsche, R.; Köhler, C.; Lisec, T.; Schnakenberg, U.; Wagner, B.; Fuhr, G.
Conference Paper
1994A fast switching silicon valve for pneumatic control systems
Lisec, T.; Hoerschelmann, S.; Quenzer, H.J.; Wagner, B.
Conference Paper
1994Magnetically driven microstructures fabricated with multilayer electroplating
Löchel, B.; Maciossek, A.; Wagner, B.; Engelmann, G.; Quenzer, H.J.
Conference Paper
1994Micro electrode arrays and application to biosensing devices
Hintsche, R.; Paeschke, M.; Wollenberger, U.; Schnakenberg, U.; Wagner, B.; Lisec, T.
Journal Article
1994Particle micromanipulator consisting of two orthogonal channels with travelling-wave electrode structures
Fuhr, G.; Fiedler, S.; Müller, T.; Schnelle, T.; Glasser, H.; Lisec, T.; Wagner, B.
Journal Article
1994Radio-frequency microtools for particle and live cell manipulation
Fuhr, G.; Müller, T.; Schnelle, T.; Hagedorn, R.; Voigt, A.; Fiedler, S.; Arnold, W.M.; Zimmermann, U.; Wagner, B.; Heuberger, A.
Journal Article
1994Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
Henke, W.; Hoppe, W.; Quenzer, H.J.; Staudt-Fischbach, P.; Wagner, B.
Conference Paper
1994Thermally driven microvalve with buckling behaviour of pneumatic applications
Lisec, T.; Hoerschelmann, S.; Quenzer, H.J.; Wagner, B.; Benecke, W.
Conference Paper
1994Towards high efficiency silicon solar cells by rapid thermal processing
Hartiti, B.; Schindler, R.; Slaoui, A.; Wagner, B.; Muller, J.C.; Reis, I.; Eyer, A.; Siffert, P.
Journal Article
1994Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
Fuhr, G.; Schnelle, T.; Wagner, B.
Journal Article
1994VORRICHTUNG ZUR MESSUNG MECHANISCHER KRAEFTE UND KRAFTWIRKUNGEN
Wagner, B.; Benecke, W.; Riethmueller, W.; Schnakenberg, U.
Patent
1993Crystalline thin film silicon solar cells -CTFSSC-
Wagner, B.; Friedrich, F.; Schillinger, N.; Eyer, A.
Conference Paper
1993Fluid-filled dielectric induction micromotor with Al-SiO2 rotor
Wagner, B.; Fuhr, G.; Müller, T.; Schnelle, T.; Benecke, W.
Conference Paper
1993Medizinische Anwendungen der Mikrosystemtechnik
Wagner, B.
Conference Paper
1993Optical thermal processing for silicon solar cells
Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P.; Wagner, B.; Schindler, R.; Eyer, A.; Räuber, A.
Conference Paper
1993Permanent magnet micromotors on silicon substrates
Wagner, B.; Kreutzer, M.; Benecke, W.
Journal Article
1993Rapid optical thermal processing of silicon solar cells
Schindler, R.; Reis, I.; Wagner, B.; Eyer, A.; Lautenschlager, H.; Schetter, C.; Warta, W.; Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P.
Conference Paper
1993Surface charge induction micromotors with two aluminium rotors isolated by SiO2
Fuhr, G.; Wagner, B.
Conference Paper
1992Asynchronous traveling-wave induced linear motion of living cells
Fuhr, G.; Hagedorn, R.; Müller, T.; Wagner, B.; Grimsa, J.; Benecke, W.
Journal Article
1992Dielectric induction micromotors - field levitation and torque-frequency characteristics
Fuhr, G.; Hagedorn, R.; Müller, T.; Schnakenberg, U.; Wagner, B.; Benecke, W.
Journal Article
1992Levitation holding and rotation of cells within traps made by high-frequency fields
Fuhr, G.; Arnold, W.M.; Hagedorn, R.; Müller, T.; Wagner, B.; Zimmermann, U.; Benecke, W.
Journal Article
1992Linear and rotational magnetic micromotors fabricated using silicon technology
Wagner, B.; Kreutzer, M.; Benecke, W.
Conference Paper
1992Microactuators with moving magnets for linear, torsional or multiaxial motion
Wagner, B.; Engelmann, G.; Simon, J.; Benecke, W.
Conference Paper
1992Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B.
Journal Article
1992Pumping of water solutions in microfabricated electrohydrodynamic systems
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B.
Conference Paper
1992A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W.
Conference Paper
1991Development of commercial CMOS process-based technologies for the fabrication of smart accelerometers
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W.
Conference Paper
1991Dielektrischer Motor mit gesteuerter Laufrichtung und wahlweise kontinuierlichem oder diskontinuierlichem Lauf
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R.
Patent
1991Electromagnetic microactuators with multiple degrees of freedom
Wagner, B.; Kreutzer, M.; Benecke, W.
Conference Paper
1991Linear motion of dielectric particles and living cells in microfabricated structures induced by travelling electric fields
Fuhr, G.; Benecke, W.; Hagedorn, R.; Wagner, B.
Conference Paper
1991Microfabricated actuator with moving permanent magnet
Wagner, B.; Benecke, W.
Conference Paper
1991Multiaxial electromagnetic microactuators
Wagner, B.; Benecke, W.
Conference Paper
1990Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R.
Patent
1990Dielektrisches mikromechanisches Element
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R.
Patent
1990Experimental study on optically activated silicon resonators
Wagner, B.; Benecke, W.; Wölfelschneider, H.; Ramakrishnan, S.; Kist, R.
Conference Paper
1990Magnetically driven microactuators - design considerations
Wagner, B.; Benecke, W.
Conference Paper
1989Faseroptische Sensoren mit mikromechanischen Wandlerelementen
Wagner, B.
Conference Paper
1989Miniaturized accelerometers based on silicon micromachining techniques
Benecke, W.; Riethmüller, W.; Schnakenberg, U.; Wagner, B.
Conference Paper
1988The implementation of AMIGO distribution lists
Benford, S.; Onions, J.; Bogen, M.; Wagner, B.
Conference Paper