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| 2013 | Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites
Marauska, S.; Jahns, R.; Kirchhof, C.; Claus, M.; Quandt, E.; Knöchel, R.; Wagner, B. | Journal Article |
| 2012 | Analysing rare books with digital technologies
Wagner, B.; Brantl, M.; Meinlschmidt, P. | Journal Article |
| 2012 | Coherent visualization of spatial data adapted to roles, tasks, and hardware
Wagner, Boris; Peinsipp-Byma, Elisabeth | Conference Paper |
| 2012 | Digitizing and archiving of all information taken from rare blockbooks
Meinlschmidt, P.; Brantl, M.; Schäfer, I.; Wagner, B.; Bacher, R.; Märgner, V. | Conference Paper |
| 2012 | Influence of platinum bottom electrodes on the piezoelectric performance of PZT thin films hot sputtered in a high volume production tool
Kaden, D.; Quenzer, H.-J.; Kratzer, M.; Castaldi, L.; Wagner, B.; Heinz, B.; Mamazza, R. | Conference Paper |
| 2012 | MEMS magnetic field sensor based on magnetoelectric composites
Marauska, S.; Jahns, R.; Greve, H.; Quandt, E.; Knöchel, R.; Wagner, B. | Journal Article |
| 2012 | Note: Micro-cantilevers with AlN actuators and PtSi tips for multi-frequency atomic force microscopy
Sebastian, A.; Shamsudhin, N.; Rothuizen, H.; Drechsler, U.; Koelmans, W.W.; Bhaskaran, H.; Quenzer, H.J.; Wagner, B.; Despont, M. | Journal Article |
| 2012 | Realization of an autonomous team of unmanned ground and aerial vehicles
Langerwisch, M.; Ax, M.; Thamke, S.; Remmersmann, T.; Tiderko, A.; Kuhnert, K.-D.; Wagner, B. | Conference Paper |
| 2012 | Sputtered thin film piezoelectric aluminum nitride as a functional MEMS material
Marauska, S.; Hrkac, V.; Dankwort, T.; Jahns, R.; Quenzer, H.J.; Knöchel, R.; Kienle, L.; Wagner, B. | Journal Article |
| 2011 | AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting
Stoppel, F.; Schröder, C.; Senger, F.; Wagner, B.; Benecke, W. | Conference Paper |
| 2011 | Entwicklung und Integration eines Hochratensputterprozesses für Blei-Zirkonat-Titanat-Dünnschichten
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.; Jakob, A.; Tiefensee, F. | Conference Paper |
| 2011 | Fabrication of conducting AFM cantilevers with AlN-based piezoelectric actuators
Quenzer, H.J.; Drechsler, U.; Sebastian, A.; Marauska, S.; Wagner, B.; Despont, M. | Conference Paper |
| 2011 | Fused generic geospatial- and meta-information for situation- and crisis-management using OGC- and STANAG-services
Wagner, Boris; Peinsipp-Byma, Elisabeth | Conference Paper |
| 2011 | In-situ large scale deposition of PZT films by RF magnetron sputtering
Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B. | Conference Paper |
| 2011 | Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films
Kaden, D.; Quenzer, H.-J.; Wagner, B.; Kratzer, M.; Castaldi, L.; Heinz, B.; Mamazza, R. | Conference Paper |
| 2011 | MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators
Hofmann, U.; Eisermann, C.; Quenzer, H.-J.; Janes, J.; Schroeder, C.; Schwarzelbach, O.; Jensen, B.; Ratzmann, L.; Giese, T.; Senger, F.; Hagge, J.; Weiss, M.; Wagner, B.; Benecke, W. | Conference Paper |
| 2011 | A novel vacuum-packaged low-power scanning mirror with inclined 3D-shaped window
Hofmann, U.; Quenzer, H.J.; Eisermann, C.; Janes, J.; Schroeder, C.; Jensen, B.; Hagge, J.; Soerensen, F.; Senger, F.; Vick, D.; Schwarzelbach, O.; Ratzmann, L.; Giese, T.; Wagner, B.; Benecke, W. | Conference Paper |
| 2011 | Sputtered thin film piezoelectric aluminium nitride as a functional MEMS material and CMOS compatible process integration
Marauska, S.; Dankwort, T.; Quenzer, H.J.; Wagner, B. | Conference Paper |
| 2010 | Giant magnetoelectric coefficients in (Fe90Co10)(78)Si12B10-AlN thin film composites
Greve, H.; Woltermann, E.; Quenzer, H.-J.; Wagner, B.; Quandt, E. | Journal Article |
| 2010 | High-rate sputtering of thick PZT thin films for MEMS
Jacobsen, H.; Prume, K.; Wagner, B.; Ortner, K.; Jung, T. | Journal Article |
| 2010 | Low damping resonant magnetoelectric sensors
Greve, H.; Woltermann, E.; Jahns, R.; Marauska, S.; Wagner, B.; Knöchel, R.; Wuttig, M.; Quandt, E. | Journal Article |
| 2010 | Preparation of functional PZT Films on 6 and 8 silicon wafers by high rate sputtering
Dudde, R.; Kaden, D.; Quenzer, H.-J.; Wagner, B. | Conference Paper |
| 2010 | Softwarekonzepte für die Verarbeitung und Analyse von Volumenbildern
Wagner, B. | Book Article |
| 2009 | MEMS Foundry
Merz, P.; Wagner, B.; Dudde, R.; Benecke, W. | Conference Paper |
| 2009 | Parallel volume image segmentation with watershed transformation
Wagner, B.; Dinges, A.; Müller, P.; Haase, G. | Conference Paper |
| 2009 | Waferlevel Vacuum Packaged Microscanners
Oldsen, M.; Hofmann, U.; Janes, J.; Quenzer, J.; Wagner, B. | Journal Article |
| 2009 | Waferlevel-Vakuum gekapselte 2D-Mikrospiegel-Scanner für kompakte Laserprojektions-Displays im Automobil
Hofmann, U.; Baumann, S.; Oldsen, M.; Janes, J.; Wagner, B. | Conference Paper |
| 2008 | Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering
Quenzer, H.-J.; Dudde, R.; Jacobsen, H.; Wagner, B.; Föll, H. | Conference Paper |
| 2008 | Mikromechanischer Aktuator mit elektrostatischem Kamm-Antrieb
Hofmann, U.; Oldsen, M.; Wagner, B. | Patent |
| 2008 | A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Janes, J.; Stolte, C.; Gruber, K.; Ites, M.; Sörensen, F.; Wagner, B. | Conference Paper |
| 2008 | Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays
Hofmann, U.; Oldsen, M.; Quenzer, H.-J.; Janes, J.; Heller, M.; Weiss, M.; Fakas, G.; Ratzmann, L.; Marchetti, E.; D'Ascoli, F.; Melani, M.; Bacciarelli, L.; Volpi, E.; Battini, F.; Mostardini, L.; Sechi, F.; Marinis, M. de; Wagner, B. | Conference Paper |
| 2008 | Waferlevel vacuum packaging: Essential for microscanners in mobile applications
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Reinert, W.; Wagner, B. | Conference Paper, Journal Article |
| 2007 | Dataflow orchestration of image processing algorithms using high-level petri nets
Wagner, B.; Dinges, A.; Müller, P. | Conference Paper |
| 2007 | Development of a piezoelectric lead titanate thin film process on silicon substrates by high rate gas flow sputtering
Jacobsen, H.; Jung, T.; Ortner, K.; Schiffmann, K.I.; Quenzer, H.-J.; Wagner, B. | Journal Article |
| 2007 | Dynamic overlay networks for image processing grids
Dinges, A.; Wagner, B.; Mueller, P. | Conference Paper |
| 2007 | Mikroaktoranordnung
Quenzer, H.; Wagner, B. | Patent |
| 2007 | A novel fabrication technology for waferlevel vacuum packaged microscanning mirrors
Oldsen, M.; Hofmann, U.; Quenzer, H.-J.; Wagner, B. | Conference Paper |
| 2007 | Thick PZT layers deposited by gas flow sputtering
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T. | Conference Paper, Journal Article |
| 2006 | 3D mapping with semantic knowledge
Nüchter, A.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Surmann, H. | Conference Paper |
| 2006 | Bistabiler Mikroantrieb mit gekoppelten Membranen
Wagner, B.; Quenzer, H.J. | Patent |
| 2006 | A high-performance imaging and control system for a micromirror-based laser-scanning endoscope device
Papageorgas, P.G.; Maroulis, D.; Anagnostopoulos, G.; Albrecht, H.; Wagner, B.; Iakovidis, D.K.; Theofanous, N.G. | Journal Article |
| 2006 | High-rate sputtering of thick PZT layers for MEMS actuators
Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T. | Conference Paper |
| 2006 | Mikroaktorbauteil und Verfahren zur Herstellung
Hofmann, U.; Witt, M.; Wagner, B.; Muehlmann, S. | Patent |
| 2006 | The RoboCup Rescue Team Deutschland 1
Nüchter, A.; Surmann, H.; Pervölz, K.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Christaller, T. | Journal Article |
| 2006 | RoboCupRescue2006 - Robot League, Deutschland1 (Germany)
Lingemann, K.; Nüchter, A.; Hertzberg, J.; Wulf, O.; Wagner, B.; Pervölz, K.; Surmann, H.; Christaller, T. | Conference Paper |
| 2006 | Structure and characterization of an enhanced laser-scanning endoscope based on microelectromechanical mirrors
Albrecht, H.; Papageorgas, P.G.; Maroulis, D.; Theofanous, N.; Karkanis, S.; Wagner, B.; Schurr, M.; Depeursinge, C.; Menciassi, A. | Journal Article |
| 2006 | Verfahren und Projektor zur Bildprojektion
Hofmann, U.; Fakas, G.; Janes, J.; Blicharski, P.; Wagner, B. | Patent |
| 2005 | 3D mapping with semantic knowledge
Nüchter, A.; Lingemann, K.; Hertzberg, J.; Wulf, O.; Wagner, B.; Surmann, H. | Conference Paper |
| 2005 | Integration aspects of RF-MEMS technologies
Lisec, T.; Wagner, B. | Conference Paper |
| 2005 | PSM-X2: Polysilicon surface micromachining process platform for vacuum-packaged sensors
Merz, P.; Reinert, W.; Reimer, K.; Wagner, B. | Conference Paper |
| 2005 | RoboCupRescue - Robot League, Team Deutschland1 (Germany)
Surmann, H.; Lingemann, K.; Nüchter, A.; Hennig, M.; Pervölz, K.; Wulf, O.; Hertzberg, J.; Wagner, B.; Christaller, T. | Conference Paper |
| 2005 | Surface-micromachined capacitive RF switches and varactors
Lisec, T.; Huth, C.; Wagner, B. | Conference Paper |
| 2005 | Verfahren zur Strukturierung eines aus glasartigem Material bestehenden Flaechensubstrats
Quenzer, H.; Schulz, A.V.; Wagner, B.; Merz, P. | Patent |
| 2004 | ANORDNUNG MIT VARIABLER KAPAZITAET
Quenzer, H.; Wagner, B.; Wenk, B. | Patent |
| 2004 | Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B. | Conference Paper |
| 2004 | Dielectric material impact on capacitive RF MEMS reliability
Lisec, T.; Huth, C.; Wagner, B. | Conference Paper |
| 2004 | DURCHSTIMMBARER HOCHFREQUENZ-KONDENSATOR
Tuo, X.; Wagner, B.; Quenzer, J. | Patent |
| 2004 | Entwicklung eines Ansatzes zum hochperformanten Zugriff auf große, verteilte n-dimensionale Bilddaten am Beispiel zweier Kernalgorithmen aus der 3D-Bildanalyse
Wagner, B. | Thesis |
| 2004 | Lagestabile Positionierung aktiv beweglicher Einzeller
Lucas, K.; Fuhr, G.; Mueller, T.; Reimer, K.; Wagner, B. | Patent |
| 2004 | Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Lisec, T.; Huth, C.; Shakhray, M.; Wagner, B.; Combi, C. | Conference Paper |
| 2003 | Mikromechanische Pumpe
Lisec, T.; Wagner, B. | Patent |
| 2003 | A novel micromachining technology for structuring borosilicate glass substrates
Merz, P.; Quenzer, H.J.; Bernt, H.; Wagner, B.; Zoberbier, M. | Conference Paper |
| 2002 | The data-acquisition, processing and control system of a micromirror-based laser-scanning endoscope
Papageorgas, P.G.; Maroulis, D.; Albrecht, H.; Wagner, B.; Anagnostopoulos, G.; Schurr, M.; Theofanous, N.G.; Menciassi, A.; Depeursinge, C. | Conference Paper |
| 2002 | The electronics of a control system for micromirrors in a laser-scanning device
Anagnostopoulos, G.P.; Wagner, B.; Papageorgas, P.G.; Hofmann, U.; Maroulis, D.; Theofanous, N.G. | Conference Paper |
| 2001 | Mikrosensor zur Positionsmessung von Fluessigkeiten in Kapillaren
Lisec, T.; Quenzer, H.; Wagner, B. | Patent |
| 2001 | Phloretin-induced changes of lipophilic ion transport across the plasma membrane of mammalian cells
Sukhorukov, V.; Kürschner, M.; Dilky, S.; Lisec, T.; Wagner, B.; Schenk, W.A.; Benz, R.; Zimmermann, U. | Journal Article |
| 2001 | Vorrichtung zur endoskopischen Diagnose und Behandlung von Gewebe
Duetting, K.; Schurr, M.; Buess, G.; Mueller, G.; Wagner, B. | Patent |
| 2000 | Customer support and design service for physical measurement systems
Wenk, B.; Wagner, B.; Jensen, G.; Orsier, E. | Journal Article |
| 2000 | Design service by Fraunhofer-ISIT
Wagner, B.; Wenk, B. | Journal Article |
| 2000 | Dielektrischer Motor mit einer oder mehreren Zentralelektroden
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1999 | Adhaesionssteuerbare ultraminiaturisierte Oberflaechenstruktur
Fuhr, G.; Voigt, A.; Hagedorn, R.; Lisec, T.; Mueller, T.; Wagner, B. | Patent |
| 1999 | Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope
Hofmann, U.; Mühlmann, S.; Schütz, R.; Dörschel, K.; Wagner, B.; Witt, M. | Conference Paper |
| 1999 | Kryokonservierung und Tieftemperaturbearbeitung von biologischen Objekten
Fuhr, G.; Hornung, J.; Hagedorn, R.; Mueller, T.; Howitz, S.; Wagner, B.; Hofman, U. | Patent |
| 1999 | Mikrochip-Aktuatoren in der Medizintechnik
Wagner, B. | Book Article |
| 1999 | Mikroventilanordnung, insbesondere fuer pneumatische Steuerungen
Lisec, T.; Wagner, B.; Kreutzer, M. | Patent |
| 1999 | OPTIMIERTER RANDABSCHLUSS VON HALBLEITER-BAUELEMENTEN
Sittig, R.; Nagel, D.; Dudde, R.; Wagner, B.; Reimer, K. | Patent |
| 1999 | Progress in gray-tone lithography and replication techniques for different materials
Reimer, K.; Engelke, R.; Hofmann, U.; Merz, P.; Kohlmann van Platen, K.T.; Wagner, B. | Conference Paper |
| 1998 | FORMEN VON MIKROPARTIKELN IN ELKTRISCHEN FELDKAEFIGEN
Fuhr, G.; Voigt, A.; Hagedorn, R.; Schnelle, T.; Hornung, J.; Mueller, T.; Fiedler, S.; Glasser, H.; Wagner, B. | Patent |
| 1998 | Free 3D shaping with grey-tone lithography and multidose e-beam writing
Kalus, M.; Frey, M.; Buchmann, L.-M.; Reimer, K.; Wagner, B. | Conference Paper |
| 1998 | Impact of diffusion length distributions on the performance of mc-silicon solar cells
Warta, W.; Sutter, J.; Wagner, B.F.; Schindler, R. | Conference Paper |
| 1998 | Mikroreliefoberflächen. Herstellung mit Grauton-Lithographie
Hofmann, U.; Wagner, B.; Reimer, K.; Quenzer, H.J. | Journal Article |
| 1998 | One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Hofmann, U.; Merz, P.; Wagner, B. | Book Article |
| 1997 | 3D structures using gray tone lithography
Reimer, K.; Wagner, B.; Kalus, M.; Frey, M.; Buchmann, L. | Conference Paper |
| 1997 | Erzeugung von Mikrorelief-Oberflächen mit Grauton-Lithographie
Wagner, B.; Reimer, K.; Hofmann, U.; Quenzer, H.J.; Jürss, M.; Pilz, W. | Conference Paper |
| 1997 | Fabrication of microrelief surfaces using a one-step lithography process
Reimer, K.; Hofmann, U.; Jürss, M.; Pilz, W.; Quenzer, H.J.; Wagner, B. | Conference Paper |
| 1997 | Handling and investigation of adherently growing cells and viruses of medical relevance in three-dimensional microstructures
Fuhr, G.; Müller, T.; Schnelle, T.; Glasser, H.; Gimsa, J.; Hofmann, U.; Wagner, B. | Conference Paper |
| 1997 | Infrared micromirror array with large pixel size and large deflection angle
Wagner, B.; Reimer, K.; Maciossek, A.; Hofmann, U. | Conference Paper |
| 1997 | Micro-optic fabrication using one-level gray-tone lithography
Reimer, K.; Quenzer, H.J.; Jürss, M.; Wagner, B. | Conference Paper |
| 1997 | Mikroventil
Lisec, T.; Quenzer, H.J.; Wagner, B. | Patent |
| 1997 | A resonant, dielectric micro-motor driven by low ac-voltages
Müller, T.; Gimsa, J.; Wagner, B.; Fuhr, G. | Journal Article |
| 1996 | Adhesion-inhibited surfaces
Schnelle, T.; Müller, T.; Voigt, A.; Reimer, K.; Wagner, B.; Fuhr, G. | Journal Article |
| 1996 | Bistable microvalve with pneumatically coupled membranes
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M. | Conference Paper |
| 1996 | Bistable microvalves for implantable drug delivery systems
Wagner, B.; Quenzer, H.J.; Hoerschelmann, S.; Lisec, T.; Jürss, M. | Conference Paper |
| 1996 | A bistable pneumatic microswitch for driving fluidic components 2
Lisec, T.; Kreutzer, M.; Wagner, B. | Conference Paper |
| 1996 | Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B. | Conference Paper |
| 1996 | One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Quenzer, H.J.; Pilz, W.; Wagner, B. | Conference Paper |
| 1996 | One-level gray-tone lithography - mask data preparation and pattern transfer
Reimer, K.; Quenzer, H.J.; Demmeler, R.; Wagner, B. | Conference Paper |
| 1996 | One-level gray-tone lithography for micro optical components
Reimer, K.; Henke, W.; Quenzer, H.J.; Demmeler, R.; Wagner, B. | Conference Paper |
| 1996 | Silicon-silicon anodic bonding with intermediate glass layers using spin-on glasses
Quenzer, H.J.; Dell, C.; Wagner, B. | Conference Paper |
| 1996 | Surface micromachined piezoresistive pressure sensors with step-type and flat membrane structures
Lisec, T.; Kreutzer, M.; Wagner, B. | Journal Article |
| 1996 | Thermally driven microvalve with buckling behaviour of pneumatic applications 2
Lisec, T.; Quenzer, H.J.; Kreutzer, M.; Hoerschelmann, S.; Wagner, B.; Benecke, W. | Journal Article |
| 1996 | Trapping of viruses in high-frequency electrical field cages
Schnelle, T.; Müller, T.; Shirley, S.G.; Ludwig, K.; Herrmann, A.; Fuhr, G.; Wagner, B.; Zimmermann, U. | Journal Article |
| 1996 | UV-depth lithography and galvanoforming for micro machining
Löchel, B.; Maciossek, A.; Wagner, B.; Quenzer, H.J. | Journal Article |
| 1996 | VERFAHREN ZUR HANDHABUNG MIKROSKOPISCH KLEINER, DIELEKTRISCHER TEILCHEN UND VORRICHTUNG ZUR DURCHFUEHRUNG DES VERFAHRENS
Benecke, W.; Wagner, B.; Fuhr, G.; Hagedorn, R.; Mueller, T. | Patent |
| 1996 | Verfahren zur Trennung von Gemischen mikroskopisch kleiner, in einer Fluessigkeit oder einem Gel suspendierter dielektrischer Teilchen und Vorrichtung zur Durchfuehrung des Verfahrens
Benecke, W.; Wagner, B.; Hagedorn, R.; Fuhr, G.; Mueller, T. | Patent |
| 1995 | A bistable pneumatic microswitch for driving fluidic components
Lisec, T.; Kreutzer, M.; Wagner, B. | Conference Paper |
| 1995 | Chemical microsensor systems for medical applications in catheters
Hintsche, R.; Kruse, C.; Uhlig, A.; Paeschke, M.; Lisec, T.; Schnakenberg, U.; Wagner, B. | Journal Article |
| 1995 | A combined TMAH and HF sacrificial layer etching technique for surface micromachined devices
Lisec, T.; Kreutzer, M.; Wenk, B.; Wagner, B. | Conference Paper |
| 1995 | Diffusional electrotitration - generation of pH-gradients over arrays of ultramicroelectrodes detected by fluorescence
Fiedler, S.; Hagedorn, R.; Schnelle, T.; Richter, E.; Wagner, B.; Fuhr, G. | Journal Article |
| 1995 | Dünnschichtsolarzellen aus rekristallisiertem Silicium
Wagner, B. | Dissertation |
| 1995 | Electric field mediated cell manipulation, characterisation and cultivation in highly conductive media
Fuhr, G.; Wagner, B. | Conference Paper |
| 1995 | Electrocasting - formation and structuring of suspended microbodies using A.C. generated field cages
Fiedler, S.; Schnelle, T.; Wagner, B.; Fuhr, G. | Journal Article |
| 1995 | Fabrication of relief-topographic surfaces with one-step UV-lithographic
Quenzer, H.J.; Henke, W.; Hoppe, W.; Pilz, W.; Reimer, K.; Wagner, B. | Journal Article |
| 1995 | Galvanoplating and sacrificial layers for surface micromachining
Maciossek, A.; Löchel, B.; Wagner, B.; Schulze, W.; Noetzel, J.; Quenzer, H.J. | Conference Paper |
| 1995 | Microfabrication of complex surface topographies using gray-tone lithography
Wagner, B.; Quenzer, H.J.; Henke, W.; Hoppe, W.; Pilz, W. | Journal Article |
| 1995 | Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B. | Conference Paper |
| 1995 | Positioning and manipulation of cells and microparticles using miniaturized electric field traps and travelling waves
Fuhr, G.; Schnelle, T.; Müller, T.; Glasser, H.; Lisec, T.; Wagner, B. | Journal Article |
| 1995 | Principles of development and design of microsystems
Wagner, B. | Journal Article |
| 1995 | Quantenausbeute hocheffizienter texturierter Silicium-Solarzellen
Schumacher, J.; Sterk, S.; Wagner, B.; Warta, W. | Conference Paper |
| 1995 | Quantum efficiency analysis of high-efficiency solar cells with textured surfaces
Schumacher, J.; Sterk, S.; Wagner, B.; Warta, W. | Conference Paper |
| 1995 | Simulation assisted design of processes for gray-tone lithography
Henke, W.; Hoppe, W.; Staudt-Fischbach, P.; Wagner, B.; Quenzer, H.J. | Conference Paper |
| 1995 | A stacked multichannel amperometric detection system
Paeschke, M.; Wollenberger, U.; Uhlig, A.; Schnakenberg, U.; Wagner, B.; Hintsche, R. | Conference Paper |
| 1995 | Surface micromachined metallic microactuator with buckling characteristics
Quenzer, H.J.; Maciossek, A.; Wagner, B.; Pott, H. | Conference Paper |
| 1995 | A surface micromachined piezoresistive pressure sensor with high sensitivity
Lisec, T.; Kreutzer, M.; Wagner, B. | Conference Paper |
| 1995 | Surface-micromachined piezoresistive pressure sensor
Lisec, T.; Stauch, H.; Wagner, B. | Conference Paper |
| 1995 | UV-depth lithography and galvanoforming for micro machining
Löchel, B.; Maciossek, A.; Wagner, B.; Quenzer, H.J. | Conference Paper |
| 1994 | Design of asynchronous dielectric micromotors
Hagedorn, R.; Fuhr, G.; Müller, T.; Schnelle, T.; Schnakenberg, U.; Wagner, B. | Journal Article |
| 1994 | Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1994 | Electric field mediated inhibition of cell and microparticle adhesion - a new way to create biocompatible surfaces
Fuhr, G.; Voigt, A.; Wagner, B. | Conference Paper |
| 1994 | Electric-field mediated cell manipulation in highly conductive media
Fuhr, G.; Wagner, B. | Conference Paper |
| 1994 | Electroplated electromagnetic components for actuators
Löchel, B.; Maciossek, A.; König, M.; Wagner, B.; Quenzer, H.J. | Conference Paper |
| 1994 | Fabrication of electrode arrays in the quarter micron regime for biotechnical applications
Reimer, K.; Hintsche, R.; Köhler, C.; Lisec, T.; Schnakenberg, U.; Wagner, B.; Fuhr, G. | Conference Paper |
| 1994 | A fast switching silicon valve for pneumatic control systems
Lisec, T.; Hoerschelmann, S.; Quenzer, H.J.; Wagner, B. | Conference Paper |
| 1994 | Magnetically driven microstructures fabricated with multilayer electroplating
Löchel, B.; Maciossek, A.; Wagner, B.; Engelmann, G.; Quenzer, H.J. | Conference Paper |
| 1994 | Micro electrode arrays and application to biosensing devices
Hintsche, R.; Paeschke, M.; Wollenberger, U.; Schnakenberg, U.; Wagner, B.; Lisec, T. | Journal Article |
| 1994 | Particle micromanipulator consisting of two orthogonal channels with travelling-wave electrode structures
Fuhr, G.; Fiedler, S.; Müller, T.; Schnelle, T.; Glasser, H.; Lisec, T.; Wagner, B. | Journal Article |
| 1994 | Radio-frequency microtools for particle and live cell manipulation
Fuhr, G.; Müller, T.; Schnelle, T.; Hagedorn, R.; Voigt, A.; Fiedler, S.; Arnold, W.M.; Zimmermann, U.; Wagner, B.; Heuberger, A. | Journal Article |
| 1994 | Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces
Henke, W.; Hoppe, W.; Quenzer, H.J.; Staudt-Fischbach, P.; Wagner, B. | Conference Paper |
| 1994 | Thermally driven microvalve with buckling behaviour of pneumatic applications
Lisec, T.; Hoerschelmann, S.; Quenzer, H.J.; Wagner, B.; Benecke, W. | Conference Paper |
| 1994 | Towards high efficiency silicon solar cells by rapid thermal processing
Hartiti, B.; Schindler, R.; Slaoui, A.; Wagner, B.; Muller, J.C.; Reis, I.; Eyer, A.; Siffert, P. | Journal Article |
| 1994 | Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
Fuhr, G.; Schnelle, T.; Wagner, B. | Journal Article |
| 1994 | VORRICHTUNG ZUR MESSUNG MECHANISCHER KRAEFTE UND KRAFTWIRKUNGEN
Wagner, B.; Benecke, W.; Riethmueller, W.; Schnakenberg, U. | Patent |
| 1993 | Crystalline thin film silicon solar cells -CTFSSC-
Wagner, B.; Friedrich, F.; Schillinger, N.; Eyer, A. | Conference Paper |
| 1993 | Fluid-filled dielectric induction micromotor with Al-SiO2 rotor
Wagner, B.; Fuhr, G.; Müller, T.; Schnelle, T.; Benecke, W. | Conference Paper |
| 1993 | Medizinische Anwendungen der Mikrosystemtechnik
Wagner, B. | Conference Paper |
| 1993 | Optical thermal processing for silicon solar cells
Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P.; Wagner, B.; Schindler, R.; Eyer, A.; Räuber, A. | Conference Paper |
| 1993 | Permanent magnet micromotors on silicon substrates
Wagner, B.; Kreutzer, M.; Benecke, W. | Journal Article |
| 1993 | Rapid optical thermal processing of silicon solar cells
Schindler, R.; Reis, I.; Wagner, B.; Eyer, A.; Lautenschlager, H.; Schetter, C.; Warta, W.; Hartiti, B.; Slaoui, A.; Muller, J.C.; Siffert, P. | Conference Paper |
| 1993 | Surface charge induction micromotors with two aluminium rotors isolated by SiO2
Fuhr, G.; Wagner, B. | Conference Paper |
| 1992 | Asynchronous traveling-wave induced linear motion of living cells
Fuhr, G.; Hagedorn, R.; Müller, T.; Wagner, B.; Grimsa, J.; Benecke, W. | Journal Article |
| 1992 | Dielectric induction micromotors - field levitation and torque-frequency characteristics
Fuhr, G.; Hagedorn, R.; Müller, T.; Schnakenberg, U.; Wagner, B.; Benecke, W. | Journal Article |
| 1992 | Levitation holding and rotation of cells within traps made by high-frequency fields
Fuhr, G.; Arnold, W.M.; Hagedorn, R.; Müller, T.; Wagner, B.; Zimmermann, U.; Benecke, W. | Journal Article |
| 1992 | Linear and rotational magnetic micromotors fabricated using silicon technology
Wagner, B.; Kreutzer, M.; Benecke, W. | Conference Paper |
| 1992 | Microactuators with moving magnets for linear, torsional or multiaxial motion
Wagner, B.; Engelmann, G.; Simon, J.; Benecke, W. | Conference Paper |
| 1992 | Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B. | Journal Article |
| 1992 | Pumping of water solutions in microfabricated electrohydrodynamic systems
Fuhr, G.; Hagedorn, R.; Müller, T.; Benecke, W.; Wagner, B. | Conference Paper |
| 1992 | A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W. | Conference Paper |
| 1991 | Development of commercial CMOS process-based technologies for the fabrication of smart accelerometers
Schnakenberg, U.; Wagner, B.; Benecke, W.; Riethmüller, W. | Conference Paper |
| 1991 | Dielektrischer Motor mit gesteuerter Laufrichtung und wahlweise kontinuierlichem oder diskontinuierlichem Lauf
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1991 | Electromagnetic microactuators with multiple degrees of freedom
Wagner, B.; Kreutzer, M.; Benecke, W. | Conference Paper |
| 1991 | Linear motion of dielectric particles and living cells in microfabricated structures induced by travelling electric fields
Fuhr, G.; Benecke, W.; Hagedorn, R.; Wagner, B. | Conference Paper |
| 1991 | Microfabricated actuator with moving permanent magnet
Wagner, B.; Benecke, W. | Conference Paper |
| 1991 | Multiaxial electromagnetic microactuators
Wagner, B.; Benecke, W. | Conference Paper |
| 1990 | Dielektrischer Motor
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1990 | Dielektrisches mikromechanisches Element
Benecke, W.; Wagner, B.; Gimsa, J.; Fuhr, G.; Hagedorn, R.; Glaser, R. | Patent |
| 1990 | Experimental study on optically activated silicon resonators
Wagner, B.; Benecke, W.; Wölfelschneider, H.; Ramakrishnan, S.; Kist, R. | Conference Paper |
| 1990 | Magnetically driven microactuators - design considerations
Wagner, B.; Benecke, W. | Conference Paper |
| 1989 | Faseroptische Sensoren mit mikromechanischen Wandlerelementen
Wagner, B. | Conference Paper |
| 1989 | Miniaturized accelerometers based on silicon micromachining techniques
Benecke, W.; Riethmüller, W.; Schnakenberg, U.; Wagner, B. | Conference Paper |
| 1988 | The implementation of AMIGO distribution lists
Benford, S.; Onions, J.; Bogen, M.; Wagner, B. | Conference Paper |